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1. 发明申请

WO2006007192A3 THREE-DIMENSIONAL PHOTORESIST STRUCTURES AND METHOD OF MAKING 审中-公开
标题翻译：三维光电子结构及其制作方法
公开(公告)号：WO2006007192A3
公开(公告)日：2006-12-28
申请号：PCT/US2005018402
申请日：2005-05-26
申请人： UNIV DELAWARE , YAO PENG , PRATHER DENNIS W
发明人： YAO PENG , PRATHER DENNIS W
IPC分类号： G03F7/26
CPC分类号： B44F1/00 , B82Y20/00 , G02B6/1225 , G03F7/0035 , G03F7/0037 , H01Q15/006
摘要： A method and article of manufacture for three-dimensional structures having micron dimensions. A substrate is coated with layers of photo resist. Each layer of photo resist is exposed with its own two-dimensional mask defining one slice of an object. Subsequent layers of photo resist are exposed with different patterns. Once all layers have been fabricated and exposed to identify two-dimensional features for the layer, the multiple layers are developed to removed photo resist which has not been exposed. The layered structure represents a threedimensional object where the depth dimension is defined by the photo resist layer thickness. By decreasing the wavelength of the light exposure, it is possible to confine exposure to the single layer of photo resist.
摘要翻译：具有微米尺寸的三维结构的方法和制品。衬底涂有光致抗蚀剂层。每层抗蚀剂用其自己的二维掩模曝光，定义一个物体的一个切片。随后的光致抗蚀剂层以不同的图案曝光。一旦已经制造和暴露所有层以识别层的二维特征，则显影多层以除去尚未曝光的光致抗蚀剂。分层结构表示深度尺寸由光致抗蚀剂层厚度限定的三维物体。通过减少曝光的波长，可以将曝光限制在单层光致抗蚀剂上。

2. 发明申请

WO2006076400A3 MICRO POLYMERIZATION CATALYZED BY EXTERNAL ACID SOURCE FOR CHEMICAL LITHOGRAPHY 审中-公开
标题翻译：通过外源酸催化的化学反应的微聚合
公开(公告)号：WO2006076400A3
公开(公告)日：2010-01-07
申请号：PCT/US2006000922
申请日：2006-01-12
申请人： YAO PENG , PRATHER DENNIS W , MURAKOWSKI JANUSZ , SCHNEIDER GARRETT
发明人： YAO PENG , PRATHER DENNIS W , MURAKOWSKI JANUSZ , SCHNEIDER GARRETT
IPC分类号： B05D3/04
CPC分类号： G03F7/0002 , B41M1/30 , B41M1/305 , B41M5/368 , B82Y10/00 , B82Y40/00
摘要： A method for preparing images in polymers comprising: preparing a template with an extruding desired pattern (501); contacting a surface of apolymer with a desiured pattern of the extruded surface of the template (503); treating the surface of the polymer with at least one of a liquid acid and vapor (505); treating the surface of the polymer with a high temperature for crosslinking (506); separating the template and polymer and revealing an acid imprint of the desired pattern on the surface of the polymer (507); baking the polymer to drive diffusion of the acid (509); and developing the polymer with at least one of a wet and dry process to produce a negative pattern in the polymer (511).
摘要翻译：一种用于制备聚合物中的图像的方法，包括：用挤出所需图案制备模板（501）; 使聚合物的表面与模板的挤出表面的脱模图案接触（503）; 用液体酸和蒸气中的至少一种处理聚合物的表面（505）; 用高温交联聚合物表面处理（506）; 分离模板和聚合物并在聚合物（507）的表面上露出所需图案的酸性印迹; 烘烤聚合物以驱动酸的扩散（509）; 并用湿法和干法中的至少一种显影聚合物，以在聚合物（511）中产生负图案。

3. 发明申请

WO2005120187A2 OPTICAL COUPLER FOR COUPLING AN OPTICAL FIBER INTO A WAVEGUIDE 审中-公开
标题翻译：光耦合器将光纤耦合到波形管中
公开(公告)号：WO2005120187A2
公开(公告)日：2005-12-22
申请号：PCT/US2005001427
申请日：2005-01-14
申请人： UNIV DELAWARE , LU ZHAOLIN , PRATHER DENNIS W
发明人： LU ZHAOLIN , PRATHER DENNIS W
IPC分类号： G02B6/122 , G02B6/30 , G02B6/42
CPC分类号： G02B6/30 , B82Y20/00 , G02B6/1223 , G02B6/1228 , G02B6/305 , G02B6/4206
摘要： An optical coupler for parallel coupling from a single mode optical fiber, or fiber ribbon, into a silicon-on-insulator (SOI) waveguide for integration with silicon optoelectronic circuits. The optical coupler incorporates the advantages of the vertically tapered waveguides and prism couplers, yet offers the flexibility of planar integration. The optical coupler may be fabricated using wafer polishing technology or grayscale photolithography. The optical coupler can be packaged using epoxy bonding to form a fiber-waveguide parallel coupler or connector.
摘要翻译：用于从单模光纤或光纤带平行耦合到用于与硅光电子电路集成的绝缘体上硅（SOI）波导的光耦合器。光耦合器结合了垂直锥形波导和棱镜耦合器的优点，但提供了平面集成的灵活性。光耦合器可以使用晶片抛光技术或灰度光刻制造。光耦合器可以使用环氧树脂粘合封装形成光纤波导并联耦合器或连接器。

4. 发明申请

WO03062882A3 ELECTRO-OPTICAL SWITCHING USING COUPLED PHOTONIC CRYSTAL WAVEGUIDES 审中-公开
标题翻译：使用耦合光电晶体波形的电光开关
公开(公告)号：WO03062882A3
公开(公告)日：2003-10-16
申请号：PCT/US0301384
申请日：2003-01-17
申请人： UNIV DELAWARE , PRATHER DENNIS W , SHARKAWY AHMED , SHI SHOUYUN , SOREF RICHARD A
发明人： PRATHER DENNIS W , SHARKAWY AHMED , SHI SHOUYUN , SOREF RICHARD A
IPC分类号： G02B6/122 , G02F1/313 , G02B6/26 , G02B6/42
CPC分类号： B82Y20/00 , G02B6/1225 , G02F1/3132 , G02F2202/32
摘要： An electro-optical switch (10) implemented in coupled photonic crystal waveguides (12, 14) is disclosed. The switch (10) is proposed and analyzed using both a finite-difference time-domain ("FDTD") method and a plane wave expansion ("PWM") method. The switch (10) may be implemented in a square lattice (18) of silicon posts in air, as well as in a hexagonal lattice (38) of air holes in a silicon slab. Switching occurs due to a change in the conductance in the coupling region between the photonic crystal waveguides (12, 14), which modulates the coupling coefficient and eventually causes switching. Conductance may be induced electrically by carrier injection or optically by electron-hole pair generation. The electro-optical switch (10) has low insertion loss and optical crosstalk in both the cross and bar switching states.
摘要翻译：公开了一种在耦合光子晶体波导（12,14）中实现的电光开关（10）。使用有限差分时域（“FDTD”）法和平面波扩展（“PWM”）方法提出和分析开关（10）。开关（10）可以在空气中的硅柱的正方格（18）以及硅板中的空气孔的六边形格子（38）中实现。由于调制耦合系数并最终导致开关的光子晶体波导（12,14）之间的耦合区域中的电导的变化而发生切换。可以通过载流子注入或通过电子 - 空穴对生成来光学地诱导电导。电光开关（10）在交叉和条形开关状态下具有低插入损耗和光学串扰。

5. 发明申请

WO2005084163A3 METHOD FOR CREATING FLIP-CHIP CONDUCTIVE POLYMER BUMPS USING PHOTOLITHOGRAPHY AND POLISHING 审中-公开
标题翻译：使用光刻技术和抛光技术制造卷绕芯片导电聚合物的方法
公开(公告)号：WO2005084163A3
公开(公告)日：2008-10-16
申请号：PCT/US2004025843
申请日：2004-08-09
申请人： UNIV DELAWARE , PRATHER DENNIS W , LOHOKARE SAURABH
发明人： PRATHER DENNIS W , LOHOKARE SAURABH
IPC分类号： H01L21/44 , H01L21/48 , H01L21/60 , H01L23/48
CPC分类号： H01L24/11 , H01L21/4853 , H01L2224/13099 , H01L2924/01005 , H01L2924/01006 , H01L2924/01013 , H01L2924/01015 , H01L2924/01019 , H01L2924/01022 , H01L2924/01023 , H01L2924/01027 , H01L2924/01033 , H01L2924/01047 , H01L2924/01051 , H01L2924/01074 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/12042 , H01L2924/19043 , H01L2924/3011 , H01L2924/351 , H01L2924/00
摘要： A method for fabricating a flip-chip semiconductor device having plural conductive polymer bumps includes forming plural molds on a substrate using a photolithographic technique; filling the molds by applying and spinning a layer of conductive polymer material onto the substrate; polishing the conductive polymer material layer to remove excess conductive material from a surface of the substrate; and stripping the plural molds from the substrate to reveal the plural bumps. In various aspects of disclosure, either positive resist or negative resist may be used. The electrical contact resistance compares favorably with squeegee-based bumps; there is an improvement in the contact resistance of the bumps patterned using polishing techniques in comparison to that of squeegee-based conductive polymer bumps.
摘要翻译：一种制造具有多个导电聚合物凸块的倒装芯片半导体器件的方法包括：使用光刻技术在衬底上形成多个模具; 通过将一层导电聚合物材料施加并旋转到基底上来填充模具; 抛光导电聚合物材料层以从衬底的表面去除过量的导电材料; 以及从所述基板剥离所述多个模具以露出所述多个凸块。在公开的各个方面，可以使用正性抗蚀剂或负性抗蚀剂。电接触电阻与刮刀基凸块相比有利; 与使用了刮板的导电性聚合物凸块相比，使用研磨技术图案化的凸块的接触电阻有所改善。

6. 发明申请

WO2005114281A2 METHOD FOR FABRICATING THREE-DIMENSIONAL PHOTONIC CRYSTALS USING A SINGLE PLANAR ETCH MASK AND DEEP REACTIVE-ION/PLASMA ETCHING 审中-公开
标题翻译：使用单平面蚀刻掩模和深层反应离子/等离子体蚀刻制备三维光子晶体的方法
公开(公告)号：WO2005114281A2
公开(公告)日：2005-12-01
申请号：PCT/US2004021567
申请日：2004-07-06
申请人： UNIV DELAWARE , SCHNEIDER GARRETT , MURAKOWSKI JANUSZ , VENKATARAMAN SRIRAM , PRATHER DENNIS W
发明人： SCHNEIDER GARRETT , MURAKOWSKI JANUSZ , VENKATARAMAN SRIRAM , PRATHER DENNIS W
IPC分类号： C30B29/60 , G02B6/12 , G02B6/122
CPC分类号： G02B6/1225 , B82Y20/00 , C30B29/60
摘要： A three dimensional photonic crystal including a matrix formed of a contiguous solid material and method of manufacturing. The matrix surrounds a plurality of substantially spherical voids. The voids are arranged in a predetermined pattern which forms a plurality of planar layers. These plurality of layers are stacked so that the voids in each layer are aligned to form vertical columns with voids from at least a subset of the other layers. The voids in each vertical column have openings between adjacent voids in the column.
摘要翻译：包括由邻接的固体材料形成的基体和制造方法的三维光子晶体。基体包围多个基本上球形的空隙。空隙以形成多个平面层的预定图案布置。堆叠这些多个层，使得每个层中的空隙对准以形成具有至少其他层的子集的空隙的垂直列。每个垂直柱中的空隙在柱中的相邻空隙之间具有开口。

7. 发明申请

WO2007011515A2 FABRICATION OF QUANTUM DOTS EMBEDDED IN THREE-DIMENSIONAL PHOTONIC CRYSTAL LATTICE 审中-公开
标题翻译：嵌入三维光子晶体尺寸的量子点的制作
公开(公告)号：WO2007011515A2
公开(公告)日：2007-01-25
申请号：PCT/US2006025600
申请日：2006-06-30
申请人： UNIV DELAWARE , MURAKOWSKI JANUSZ , SCHNEIDER GARRETT , PRATHER DENNIS W
发明人： MURAKOWSKI JANUSZ , SCHNEIDER GARRETT , PRATHER DENNIS W
IPC分类号： H01L31/00
CPC分类号： G02B6/1225 , B82Y10/00 , B82Y20/00 , G02B6/10 , Y10S977/774 , Y10S977/778 , Y10S977/814 , Y10T428/249953 , Y10T428/249969
摘要： In one embodiment, a method of producing an optoelectronic nanostructure includes preparing a substrate; providing a quantum well layer on the substrate; etching a volume of the substrate to produce a photonic crystal. The quantum dots are produced at multiple intersections of the quantum well layer within the photonic crystal. Multiple quantum well layers may also be provided so as to form multiple vertically aligned quantum dots. In another embodiment, an optoelectronic nanostructure includes a photonic crystal having a plurality of voids and interconnecting veins; a plurality of quantum dots arranged between the plurality of voids, wherein an electrical connection is provided to one or more of the plurality of quantum dots through an associated interconnecting vein.
摘要翻译：在一个实施方案中，制备光电子纳米结构的方法包括制备基底; 在衬底上提供量子阱层; 蚀刻衬底的体积以产生光子晶体。量子点在光子晶体内的量子阱层的多个交点处产生。还可以提供多个量子阱层，以形成多个垂直对准的量子点。在另一个实施例中，光电子纳米结构包括具有多个空隙和互连静脉的光子晶体; 布置在所述多个空隙之间的多个量子点，其中通过相关联的互连静脉将电连接提供给所述多个量子点中的一个或多个。

8. 发明申请

WO2005043180A2 WAVE DETECTION METHODS AND APPARATUS 审中-公开
标题翻译：波检测方法和设备
公开(公告)号：WO2005043180A2
公开(公告)日：2005-05-12
申请号：PCT/US2004034757
申请日：2004-10-21
申请人： UNIV DELAWARE , PRATHER DENNIS W , DELIWALA SHRENIK , SCHUETZ CHRISTOPHER A
发明人： PRATHER DENNIS W , DELIWALA SHRENIK , SCHUETZ CHRISTOPHER A
IPC分类号： G01R29/08 , H01Q9/27 , H04B10/04 , G01R33/00
CPC分类号： G01R29/0864 , H01Q9/27
摘要： Methods and apparatus for detecting waves are disclosed. The waves are detected by modulating an optical carrier signal having a carrier signal frequency component at a carrier frequency w,ith wave signals at one or more detection frequencies, optically removing the carrier signal frequency component from the modulated optical carrier signal, and detecting an energy level of the modulated optical carrier signal after removal of the carrier signal frequency component, the energy level indicative of the presence of the wave signals.
摘要翻译：公开了用于检测波的方法和设备。通过以载波频率w调制具有载波信号频率分量的光载波信号，以一个或多个检测频率的第i个波信号来调制波，从载波信号频率分量从调制的光载波信号中光学地移除，以及检测能量在除去载波信号频率分量之后调制的光载波信号的电平，表示存在波信号的能级。

9. 发明申请

WO2004019080A3 METHOD FOR FABRICATING OPTICAL DEVICES IN PHOTONIC CRYSTAL STRUCTURES 审中-公开
标题翻译：在光子晶体结构中制造光学器件的方法
公开(公告)号：WO2004019080A3
公开(公告)日：2004-06-17
申请号：PCT/US0326499
申请日：2003-08-26
申请人： UNIV DELAWARE , MURAKOWSKI JANUSZ , PRATHER DENNIS W
发明人： MURAKOWSKI JANUSZ , PRATHER DENNIS W
IPC分类号： G02B6/122 , G03H1/02
CPC分类号： G03F7/0035 , B82Y20/00 , G02B1/005 , G02B6/1225 , G02B6/13 , G03F7/0005 , G03F7/001 , Y10S430/143
摘要： A method for manufacturing optical components in a three-dimensional photonic crystal lattice. A first resist (9) is coated on a substrate (10) and exposed to an e-beam (11), to produce an imaged area (12). Another resist coating is applied to thicken the resist (13) and an interference exposure (15) is used to image the result. This is developed to form periodic voids (16), which may be filled with a materials having a high refractive index to form a pattern (18 and 12) when the resist (13) is removed.
摘要翻译：一种用于制造三维光子晶体晶格中的光学部件的方法。将第一抗蚀剂（9）涂覆在基板（10）上并暴露于电子束（11），以产生成像区域（12）。应用另一抗蚀剂涂层来增厚抗蚀剂（13），并使用干涉曝光（15）来对结果进行成像。这被开发以形成周期性空隙（16），当抗蚀剂（13）被移除时，周期性空隙（16）可填充有具有高折射率的材料以形成图案（18和12）。

10. 发明申请

WO2004001557A3 HARDWARE IMPLEMENTATION OF THE PSEUDO-SPECTRAL TIME-DOMAIN METHOD 审中-公开
标题翻译： PSEUDO-SPECTRAL时域方法的硬件实现
公开(公告)号：WO2004001557A3
公开(公告)日：2004-06-03
申请号：PCT/US0320259
申请日：2003-06-24
申请人： HUMPHREY JOHN R , DURBANO JAMES P , PRATHER DENNIS W
发明人： HUMPHREY JOHN R , DURBANO JAMES P , PRATHER DENNIS W
IPC分类号： G01R23/16 , G06F17/13 , G06F15/00
CPC分类号： G06F17/13
摘要： A computer hardware configuration (10) for performing the pseudo-spectral time domain (PSTD) method on data. The hardware configuration includes a forward fast Fourier transform (FFT) unit (20) that calculates a forward fast Fourier transform (FFT) from the data, and a complex multiplication unit (22) that receives the FFT-processed data and calculates a spatial derivative in the frequency domain from the FFT-processed data. The hardware configuration further includes an inverse fast Fourier transform (IFFT) unit (24) that converts the spatial derivative in the frequency domain from the complex multiplication unit into the time domain, and a computation engine (26) that solves a PSTD equation based upon the spatial derivative in the time domain received from the IFFT unit.
摘要翻译：一种用于对数据执行伪频谱时域（PSTD）方法的计算机硬件配置（10）。硬件配置包括从数据计算前向快速傅里叶变换（FFT）的前向快速傅里叶变换（FFT）单元（20），以及接收经FFT处理的数据并计算空间导数的复数乘法单元（22）在频域中从FFT处理的数据。硬件配置还包括将频域中的空间导数从复数乘法转换为时域的逆快速傅立叶变换（IFFT）单元（24），以及基于以下方式求解PSTD方程的计算引擎（26）从IFFT单元接收的时域中的空间导数。

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