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    • 6. 发明申请
    • PROCESS FOR PRODUCING A MICROMECHANICAL SENSOR UNIT FOR DETECTING ACCELERATION
    • 一种用于生产微机械传感器单元一种判别加速度
    • WO1995027214A1
    • 1995-10-12
    • PCT/DE1995000430
    • 1995-03-30
    • SIEMENS AKTIENGESELLSCHAFTMADER, GerhardNOETZEL, JensSCHULZE, Steffen
    • SIEMENS AKTIENGESELLSCHAFT
    • G01P15/08
    • G01P21/00G01P15/0802G01P15/135G01P2015/0817G01P2015/0828
    • A micromechanical sensor unit for detecting acceleration having a pendulum with a spiral spring (B) fitted on a substrate (CH) via a support (E) and oscillating parallel to the substrate surface, and having at least one electrically conductive stop arranged on the substrate (CH) beside the pendulum as a position sensor (S), is produced in the following steps: the substrate is coated in succession with a soluble intermediate layer (P1), an electrically conductive layer (P2) and a photo-resist layer (P3). Photo-lithographic negative forms of the pendulum (Gm1), the stop (Gm2) and the support (Gm3) are made in the photo-resist layer (P3) by dissolving photo-resist material out as far as the electrically conductive layer (P2) and then filled with metal. Finally the intermediate layer (P1) beneath the pendulum and further photo-resist material immediately beside the pendulum and the stop are dissolved away.
    • 布置的微机械传感器单元,用于检测具有加速度的通过在基板(CH)的保持器(E)和平行于螺旋弹簧(B)和在所述基板(CH)至少一个相邻摆布置于衬底表面振荡摆锤,电 (P3)覆盖基板与weglösbaren中间层(P1),导电层(P2)和光致抗蚀剂层依次洗涤:导电停止为位置传感器(S)在下面的步骤制备。 在光致抗蚀剂层(P3)的摆锤(Gm1的),中风(Gm2的),并通过光致抗蚀剂的溶解的支架(GM3)的负形式光刻通过在导电层(P2),然后将其填充有金属制成。 最后,下面的摆锤和光致抗蚀剂进一步在中间层(P1)被溶解掉,至少紧邻梭和停止。