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    • 4. 发明申请
    • METHOD OF MANUFACTURING AN INK-JET PRINTHEAD
    • 制造喷墨打印机的方法
    • WO2016150715A1
    • 2016-09-29
    • PCT/EP2016/055126
    • 2016-03-10
    • SICPA HOLDING SA
    • GIOVANOLA, LuciaBALDI, SilviaMERIALDO, AnnaSCHINA, Paolo
    • B41J2/14B41J2/16
    • B41J2/1433B41J2/162B41J2/1623B41J2/1628B41J2/1629B41J2/1631B41J2/1632
    • The present application relates to a method of manufacturing an ink-jet printhead comprising: providing a silicon substrate (10) including active ejecting elements (11); providing a hydraulic structure layer (20) for defining hydraulic circuits configured to enable a guided flow of ink; providing a silicon orifice plate (30) having a plurality of nozzles (31) for ejection of the ink; assembling the silicon substrate (10) with the hydraulic structure layer (20) and the silicon orifice plate (30); wherein providing the silicon orifice plate (30) comprises: providing a silicon wafer (40) having a planar extension delimited by a first surface (41) and a second surface (42) on opposite sides of the silicon wafer (40); performing a thinning step at the second surface (42) so as to remove from the second surface (42) a central portion (43) having a preset height (H), the silicon wafer (40) being formed, following the thinning step, by a base portion (44) having a planar extension and a peripheral portion (45) extending from the base portion (44), transversally with respect to the planar extension of the base portion (44); and forming in the silicon wafer (40) a plurality of through holes, each defining a respective nozzle (31) for ejection of the ink. The method according to the present invention is characterized in that the silicon wafer (40) is a silicon-on-insulator wafer, wherein the silicon-on- insulator wafer comprises a silicon device layer (38) adjacent to the first surface (41), a silicon handle layer (37) adjacent to the second surface (42) and an insulator layer (39) in- between.
    • 本申请涉及一种制造喷墨打印头的方法,包括:提供包括有效喷射元件(11)的硅基板(10); 提供用于限定液压回路的液压结构层(20),所述液压回路构造成能够引导油墨流动; 提供具有用于喷射墨水的多个喷嘴(31)的硅孔板(30); 用液压结构层(20)和硅孔板(30)组装硅衬底(10); 其中提供硅孔板(30)包括:提供具有由第一表面(41)限定的平面延伸的硅晶片(40)和在硅晶片(40)的相对侧上的第二表面(42); 在所述第二表面(42)处进行变薄步骤,以便从所述第二表面(42)移除具有预设高度(H)的中心部分(43),所述硅晶片(40)在所述变薄步骤之后形成, 通过具有平面延伸部的基部(44)和从基部(44)延伸的周边部分(45),相对于基部(44)的平面延伸部横向延伸; 以及在硅晶片(40)中形成多个通孔,每个通孔限定用于喷射墨水的相应喷嘴(31)。 根据本发明的方法的特征在于,硅晶片(40)是绝缘体上硅晶片,其中绝缘体上硅晶片包括与第一表面(41)相邻的硅器件层(38) ,与第二表面(42)相邻的硅手柄层(37)和介于其间的绝缘体层(39)。