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    • 4. 发明申请
    • PROCESS FOR THE FORMATION OF MINIATURIZED GETTER DEPOSITS AND GETTERDEPOSITS SO OBTAINED
    • 形成小型化的沉积物和获得的沉积物的方法
    • WO2006109343A2
    • 2006-10-19
    • PCT/IT2006/000242
    • 2006-04-11
    • SAES GETTERS S.P.A.MORAJA, MarcoCONTE, AndreaGUADAGNUOLO, Sara
    • MORAJA, MarcoCONTE, AndreaGUADAGNUOLO, Sara
    • H01L21/027G03F7/004
    • H01L21/0272B81C1/00285Y10T428/2462
    • A process for the formation of miniaturized getter deposits is described, comprising the steps of: forming a layer (11) of a photosensitive polymeric material on a support (10); selectively exposing the polymeric layer in order to cause a chemical modification in a portion of the polymeric layer; removing with a solvent only one between the previously exposed or the not previously exposed portion of the polymeric layer, thus forming cavities (12, 12', ...) in the polymeric layer; forming a thin layer (13) of a getter material through cathodic deposition at the bottom of said cavity and on the residual polymer; and removing with a second solvent the polymer portion not removed by the first solvent, leaving at least a getter material deposit (131, 131', ...; 20) on the support surface. The invention also relates to miniaturized getter deposits obtained through this process.
    • 描述了形成小型吸气剂沉积物的方法,包括以下步骤:在支撑体(10)上形成感光聚合物材料层(11); 选择性地暴露聚合物层以便在聚合物层的一部分中引起化学改性; 在溶剂中仅除去先前暴露的或未预先暴露的聚合物层部分之间的一种,从而在聚合物层中形成空腔(12,12',...); 通过在所述空腔的底部和残余聚合物上的阴极沉积形成吸气剂材料的薄层(13); 并且用第二溶剂除去未被第一溶剂除去的聚合物部分,在载体表面上至少留下吸气剂材料沉积物(131,131',...; 20)。 本发明还涉及通过该方法获得的小型化的吸气剂沉积物。