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1. 发明申请

WO2013052297A1 ELECTROMECHANICAL SYSTEMS DEVICE WITH NON-UNIFORM GAP UNDER MOVABLE ELEMENT 审中-公开
标题翻译：机电系统装置与可移动元件下的非均匀接缝
公开(公告)号：WO2013052297A1
公开(公告)日：2013-04-11
申请号：PCT/US2012/056927
申请日：2012-09-24
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , DJORDJEV, Konstadin , ZHONG, Fan
发明人： TAO, Yi , DJORDJEV, Konstadin , ZHONG, Fan
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/001
摘要： Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical system device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompassed within an anchor region with a black mask.
摘要翻译：为在机械层下具有不均匀间隙的机电系统装置提供系统，方法和装置。机电系统装置包括通过至少两个支撑结构在其衬底上的边缘处支撑的可移动元件。可移动元件可以通过在两个或更多个相应的不同区域中具有两个或多个不同高度的间隙与基板间隔开。间隙在间隙下方的第一区域中具有第一高度，例如装置的活动区域，以及与支撑结构相邻的第二区域中的第二高度。在干涉式调制器实现中，第二区域可以包含在具有黑色掩模的锚定区域内。

2. 发明申请

WO2013036436A1 MECHANICAL LAYER FOR INTERFEROMETRIC MODULATORS AND METHODS OF MAKING THE SAME 审中-公开
标题翻译：用于干涉式调制器的机械层及其制造方法
公开(公告)号：WO2013036436A1
公开(公告)日：2013-03-14
申请号：PCT/US2012/053208
申请日：2012-08-30
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , PU, Chuan , TAO, Yi , TUPELLY, Chandra S. , DJORDJEV, Kostadin D. , ZHONG, Fan , HE, Rihui , ZHANG, Wenyue
发明人： PU, Chuan , TAO, Yi , TUPELLY, Chandra S. , DJORDJEV, Kostadin D. , ZHONG, Fan , HE, Rihui , ZHANG, Wenyue
IPC分类号： G02B26/00 , B81B3/00 , B81C1/00
CPC分类号： G02B26/001 , B81B3/0072 , B81B2201/042 , B81B2203/019 , B81C2201/0167 , B81C2201/017
摘要： This disclosure provides systems, methods and apparatus for controlling a movable layer. In one aspect, an electromechanical systems device includes a substrate and a movable layer positioned over the substrate to define a gap. The movable layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The movable layer is configured to have a curvature in a direction away from the substrate when the movable layer is in the relaxed position. In some implementations, the movable layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the movable layer upward when the sacrificial layer is removed.
摘要翻译：本公开提供了用于控制可移动层的系统，方法和装置。在一个方面，机电系统装置包括基板和位于基板上方以限定间隙的可移动层。可移动层可以在致动位置和松弛位置之间的间隙中移动，并且包括镜层，盖层和设置在镜层和盖层之间的介电层。可移动层被配置为当可移动层处于松弛位置时具有远离基底的方向的曲率。在一些实施方案中，可移动层可以形成为具有朝向衬底的正应力梯度，当消除牺牲层时，可以将可移动层的曲率向上引导。

3. 发明申请

WO2012138577A1 PIXEL VIA AND METHODS OF FORMING THE SAME 审中-公开
标题翻译：像素及其形成方法
公开(公告)号：WO2012138577A1
公开(公告)日：2012-10-11
申请号：PCT/US2012/031643
申请日：2012-03-30
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LEE, Hojin , ZHONG, Fan , TAO, Yi
发明人： LEE, Hojin , ZHONG, Fan , TAO, Yi
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841 , G02B26/001
摘要： This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask (23) on a substrate (20) at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer (35) over the black mask, depositing an optical stack (16) including a stationary electrode over the dielectric layer, and depositing a mechanical layer (14) over the optical stack. The method further includes providing a conductive via (138) in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.
摘要翻译：本公开提供了用于像素通孔的系统，方法和装置。在一个方面，一种形成具有多个像素的机电装置的方法包括在四个拐角中的每一个并且沿着每个像素的至少一个边缘区域在基底（20）上沉积导电黑色掩模（23），将电介质层（35），在所述电介质层上沉积包括固定电极的光学堆叠（16），并在所述光学堆叠上沉积机械层（14）。所述方法还包括在所述多个像素的第一像素中提供导电通孔（138），所述通孔设置在所述电介质层中并将所述固定电极电连接到所述黑色掩模，所述通孔设置在沿着第一像素，在朝向第一像素的中心的方向上与第一像素的边缘偏离。

4. 发明申请

WO2011084644A1 INTERFEROMETRIC PIXEL WITH PATTERNED MECHANICAL LAYER 审中-公开
标题翻译：具有模式机械层的平面像素
公开(公告)号：WO2011084644A1
公开(公告)日：2011-07-14
申请号：PCT/US2010/060864
申请日：2010-12-16
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , ZHONG, Fan , TUNG, Yeh-jiun
发明人： TAO, Yi , ZHONG, Fan , TUNG, Yeh-jiun
IPC分类号： G02B26/00 , B81B3/00
CPC分类号： G02B26/001 , B81B3/007 , B81B2201/047
摘要： Electromechanical modulators and methods of making the same are disclosed. In one embodiment, a display includes a sub-pixel having a membrane layer with a void formed therein. The void can be configured to increase the flexibility of the membrane layer. The sub-pixel can further include an optical mask configured to hide the void from a viewer. In another embodiment, a display can include at least two movable reflectors wherein each movable reflector has a different stiffness but each movable reflector has substantially the same effective coefficient of thermal expansion.
摘要翻译：公开了机电调制器及其制造方法。在一个实施例中，显示器包括具有其中形成有空隙的膜层的子像素。空隙可以被配置成增加膜层的柔性。子像素还可以包括被配置为从观察者隐藏空隙的光学掩模。在另一个实施例中，显示器可以包括至少两个可移动反射器，其中每个可移动反射器具有不同的刚度，但每个可移动反射器具有基本上相同的有效热膨胀系数。

5. 发明申请

WO2012129221A1 DIELECTRIC SPACER FOR DISPLAY DEVICES 审中-公开
标题翻译：用于显示设备的电介质间隔器
公开(公告)号：WO2012129221A1
公开(公告)日：2012-09-27
申请号：PCT/US2012/029792
申请日：2012-03-20
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , ZHONG, Fan , TAO, Yi
发明人： ZHONG, Fan , TAO, Yi
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , Y10T29/4913
摘要： This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate.
摘要翻译：本公开提供了用于在衬底上形成间隔物并在间隔件和衬底上构建机电装置的系统，方法和装置。在一个方面，通过添加导致衬底上方的高点的层，在间隔物之上形成凸起的锚定区域。高点可以保护MEMS装置的可移动部分不与背板接触。

6. 发明申请

WO2011126953A1 MECHANICAL LAYER OF AN ELECTROMECHANICAL DEVICE AND METHODS OF FORMING THE SAME 审中-公开
标题翻译：机电装置的机械层及其形成方法
公开(公告)号：WO2011126953A1
公开(公告)日：2011-10-13
申请号：PCT/US2011/031010
申请日：2011-04-01
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , ZHONG, Fan
发明人： TAO, Yi , ZHONG, Fan
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： This disclosure provides mechanical layers (14) and methods of forming the same. In one aspect, an electromechanical systems device includes a substrate (20) and a mechanical layer (14) having an actuated position and a relaxed position. The mechanical layer is spaced from the substrate to define a collapsible gap (19). The gap is in a collapsed condition when the mechanical layer is in the actuated position and in a non - collapsed condition when the mechanical layer is in the relaxed position. The mechanical layer includes a reflective layer(121), a conductive layer (123), and a supporting layer (122). The supporting layer is positioned between the reflective layer and the conductive layer and is configured to support the mechanical layer.
摘要翻译：本公开提供机械层（14）及其形成方法。一方面，机电系统装置包括具有致动位置和松弛位置的基底（20）和机械层（14）。机械层与衬底间隔开以限定可折叠间隙（19）。当机械层处于松弛位置时，机械层处于致动位置并处于非塌陷状态时，间隙处于折叠状态。机械层包括反射层（121），导电层（123）和支撑层（122）。支撑层位于反射层和导电层之间，并被构造成支撑机械层。

7. 发明申请

WO2012148777A1 MECHANICAL LAYER AND METHODS OF MAKING THE SAME 审中-公开
标题翻译：机械层及其制造方法
公开(公告)号：WO2012148777A1
公开(公告)日：2012-11-01
申请号：PCT/US2012/034276
申请日：2012-04-19
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , LEE, Hojin , ZHONG, Fan
发明人： TAO, Yi , LEE, Hojin , ZHONG, Fan
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.
摘要翻译：本公开提供了机械层及其形成方法。一方面，形成像素的方法包括在衬底上沉积黑色掩模，在黑色掩模上沉积光学堆叠，以及在光学堆叠上形成机械层。黑色掩模沿着像素的一侧的至少一部分设置，并且机械层在机械层和光学堆叠之间限定空腔。机械层包括反射层，电介质层和盖层，并且介电层设置在反射层和盖层之间。该方法还包括沿着像素的侧面在机械层的电介质层中形成凹口，以便沿像素的侧面减小电介质层与黑色掩模的重叠。

8. 发明申请

WO2011119379A2 MECHANICAL LAYER AND METHODS OF SHAPING THE SAME 审中-公开
标题翻译：机械层及其形成方法
公开(公告)号：WO2011119379A2
公开(公告)日：2011-09-29
申请号：PCT/US2011/028549
申请日：2011-03-15
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , ZHONG, Fan , SASAGAWA, Teruo
发明人： TAO, Yi , ZHONG, Fan , SASAGAWA, Teruo
IPC分类号： B81B3/00
CPC分类号： B81B3/0072 , B81B2201/047 , G02B5/284 , G02B26/001 , G09G3/3466
摘要： Mechanical layers and methods of shaping mechanical layers are disclosed. In one embodiment, a method includes depositing a support layer (85), a sacrificial layer (84) and a mechanical layer (34) over a substrate (20), and forming a support post (60) from the support layer. A kink (90) is formed adjacent to the support post in the mechanical layer. The kink comprises a rising edge (91) and a falling edge (92), and the kink is configured to control the shaping and curvature of the mechanical layer upon removal of the sacrificial layer.
摘要翻译：公开了机械层和机械层成型方法。在一个实施例中，一种方法包括在衬底（20）上沉积支撑层（85），牺牲层（84）和机械层（34），以及从支撑层形成支撑柱（60）。在机械层中邻近支撑柱形成扭结（90）。扭结包括上升沿（91）和下降缘（92），并且扭结构造成在去除牺牲层时控制机械层的成形和曲率。

9. 发明申请

WO2010111153A3 DISPLAY DEVICE WITH OPENINGS BETWEEN SUB-PIXELS AND METHOD OF MAKING SAME 审中-公开
公开(公告)号：WO2010111153A3
公开(公告)日：2010-09-30
申请号：PCT/US2010/028050
申请日：2010-03-19
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , TAO, Yi , ZHONG, Fan
发明人： TAO, Yi , ZHONG, Fan
IPC分类号： B81B3/00 , G02B26/00
摘要： An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

10. 发明申请

WO2012030732A1 INTERFEROMETRIC DISPLAY DEVICE 审中-公开
标题翻译：干涉显示装置
公开(公告)号：WO2012030732A1
公开(公告)日：2012-03-08
申请号：PCT/US2011/049588
申请日：2011-08-29
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , ZHANG, Wenyue , GOVIL, Alok , TUNG, Ming-Hau , TAO, Yi
发明人： ZHANG, Wenyue , GOVIL, Alok , TUNG, Ming-Hau , TAO, Yi
IPC分类号： G02B26/00
CPC分类号： G02B26/001 , G09G3/3466 , G09G2300/0439
摘要： This disclosure provides systems, methods, and apparatus including one or more capacitance control layers to decrease the magnitude of an electric field between a movable layer and an electrode. In one aspect, a display device includes an electrode, a movable layer, and a capacitance control layer. At least a portion of the movable layer can be configured to move toward the electrode when a voltage is applied across the electrode and the movable layer and an interferometric cavity can be disposed between the movable layer and the first electrode. The capacitance control layer can be configured to decrease the magnitude of an electric field between the movable layer and the electrode when the voltage is applied across the movable layer and the electrode.
摘要翻译：本公开提供了包括一个或多个电容控制层的系统，方法和装置，以减小可移动层和电极之间的电场的大小。一方面，显示装置包括电极，可移动层和电容控制层。可移动层的至少一部分可以被配置为当跨越电极和可移动层施加电压并且可以在可移动层和第一电极之间设置干涉腔时朝向电极移动。电容控制层可以被配置为当跨越可移动层和电极施加电压时，减小可移动层和电极之间的电场的大小。

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