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1. 发明申请

WO2009076074A1 MEMS DEVICES REQUIRING NO MECHANICAL SUPPORT 审中-公开
标题翻译：不需要机械支持的MEMS器件
公开(公告)号：WO2009076074A1
公开(公告)日：2009-06-18
申请号：PCT/US2008/084979
申请日：2008-11-26
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun
发明人： KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun
IPC分类号： B81B3/00 , B81B5/00 , G02B26/00
CPC分类号： G02B26/001 , B81B3/0021 , B81B2201/042
摘要： MEMS devices such as interferometric modulators are described having movable layers (14a, 14b) that are mechanically isolated. The movable layers are electrically attractable such that they can be selectively moved between a top (16a) and bottom electrode (17a) through application of a voltage. In interferometric modulators, the movable layers are reflective such that an optically resonant cavity is formed between the layer and a partially reflective layer, thereby providing a display pixel that can be turned on or off depending on the distance between the reflective layers in the resonant cavity.
摘要翻译：描述了诸如干涉式调制器的MEMS器件具有机械隔离的可移动层（14a，14b）。可移动层是电吸引的，使得它们可以通过施加电压而选择性地在顶部（16a）和底部电极（17a）之间移动。在干涉式调制器中，可移动层是反射性的，使得在该层和部分反射层之间形成光学谐振腔，由此提供可根据谐振腔中的反射层之间的距离而导通或截止的显示像素。

2. 发明申请

WO2009006119A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 审中-公开
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：WO2009006119A1
公开(公告)日：2009-01-08
申请号：PCT/US2008/068062
申请日：2008-06-24
申请人： IDC, LLC , CHUI, Clarence , ENDISCH, Denis , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei
发明人： CHUI, Clarence , ENDISCH, Denis , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei
IPC分类号： G02B26/00 , B81B3/00 , B81C1/00
CPC分类号： G02B26/001 , B81B3/0086 , B81B2201/042 , Y10T29/42
摘要： A microelectromechanical (MEMS) device (2000) includes a first reflective layer (904), a movable element (2220), and an actuation electrode (902). The movable element (2220) is over the first reflective layer (904). The movable element (2220) includes a deformable layer (1302) and a reflective element (914). The actuation electrode (902) is between the deformable layer (1302) and the reflective element (914).
摘要翻译：微机电（MEMS）装置（2000）包括第一反射层（904），可移动元件（2220）和致动电极（902）。可移动元件（2220）在第一反射层（904）之上。可移动元件（2220）包括可变形层（1302）和反射元件（914）。致动电极（902）在可变形层（1302）和反射元件（914）之间。

3. 发明申请

WO2009006120A1 MICROELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION 审中-公开
标题翻译：具有从机械和电气功能分离的光学功能的微电子器件
公开(公告)号：WO2009006120A1
公开(公告)日：2009-01-08
申请号：PCT/US2008/068063
申请日：2008-06-24
申请人： IDC, LLC , CHUI, Clarence , CUMMINGS, William , GALLY, Brian, J. , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei , ENDISCH, Denis
发明人： CHUI, Clarence , CUMMINGS, William , GALLY, Brian, J. , KOGUT, Lior , TUNG, Ming-hau , TUNG, Yeh-jiun , CHIANG, Chih-wei , ENDISCH, Denis
IPC分类号： G02B26/00 , B81B3/00 , B81C1/00
CPC分类号： G02B26/001 , B81B3/0051 , B81B2201/047 , G02B26/023 , G02B26/08 , G02F1/01 , G02F1/0128 , G02F1/133621 , G02F1/29 , G09G3/3466 , G09G3/3696 , Y10T29/42
摘要： A microelectromechanical (MEMS) device (1300) includes a substrate (20), a movable element (1340) over the substrate (20), and an actuation electrode (142) above the movable element (1340). The movable element (1340) includes a deformable layer (1302) and a reflective element (1314), The deformable layer (1302) is spaced from the reflective element (1314).
摘要翻译：微机电（MEMS）装置（1300）包括衬底（20），在衬底（20）上方的可移动元件（1340）和可动元件（1340）上方的致动电极（142）。可移动元件（1340）包括可变形层（1302）和反射元件（1314）。可变形层（1302）与反射元件（1314）间隔开。

4. 发明申请

WO2008076448A1 MEMS SWITCHES WITH DEFORMING MEMBRANES 审中-公开
标题翻译：具有变形膜的MEMS开关
公开(公告)号：WO2008076448A1
公开(公告)日：2008-06-26
申请号：PCT/US2007/025938
申请日：2007-12-17
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , LEWIS, Alan , KOGUT, Lior , TUNG, Ming-hau
发明人： LEWIS, Alan , KOGUT, Lior , TUNG, Ming-hau
IPC分类号： H01H59/00 , G02B26/08 , G02B26/00
CPC分类号： H01H1/0036 , G02B26/001 , G02B26/0841 , H01H59/0009 , H01H2001/0084 , Y10T29/49105
摘要： MEMS switches are formed with membranes or layers (64) that are deformable upon the application of a voltage. The MEMS switches may comprise compliant terminals (82) and/or contact conductors (58) to produce contact swiping.
摘要翻译： MEMS开关由膜或层（64）形成，其在施加电压时可变形。 MEMS开关可以包括顺应端子（82）和/或接触导体（58）以产生接触滑动。

5. 发明申请

WO2008002459A3 SUPPORT STRUCTURE FOR FREE-STANDING MEMS DEVICE AND METHODS FOR FORMING THE SAME 审中-公开
公开(公告)号：WO2008002459A3
公开(公告)日：2008-01-03
申请号：PCT/US2007/014513
申请日：2007-06-21
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOGUT, Lior , TUNG, Ming-hau , ARBUCKLE, Brian
发明人： KOGUT, Lior , TUNG, Ming-hau , ARBUCKLE, Brian
IPC分类号： B81B3/00
摘要： A microelectromechanical (MEMS) device includes a functional layer including a first material and a deformable layer including a second material. The second material is different from the first material. The deformable layer is mechanically coupled to the functional layer at a junction. The functional layer and the deformable layer have substantially equal internal stresses at the junction.

6. 发明申请

WO2008121543A2 MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING CONDUCTING LAYERS SEPARATED BY STOPS 审中-公开
标题翻译：利用导电层分离导电层的微电子机械装置和方法
公开(公告)号：WO2008121543A2
公开(公告)日：2008-10-09
申请号：PCT/US2008/057273
申请日：2008-03-17
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , KOGUT, Lior , TUNG, Ming-Hau
发明人： KOGUT, Lior , TUNG, Ming-Hau
IPC分类号： B81B3/00 , G02B26/00
CPC分类号： B81B3/001 , B81B2201/047 , G02B26/001 , G02B26/0841 , Y10T29/49002
摘要： A microelectromechanical system (MEMS) device includes a reflective element that includes at least one stop member. The device also includes an electrode and an aperture that extends at least partially through the electrode. The aperture has a boundary. The device has an electrically nonconductive surface within the aperture or on a portion of the boundary of the aperture. A support structure separates the reflective element from the electrode. The reflective element can be moved between a first position and a second position. The stop member is spaced from the electrically nonconductive surface when the reflective element is in the first position. A portion of the stop member is in contact with the electrically nonconductive surface when the reflective element is in the second position. The reflective element and the electrode are electrically isolated from each other when the reflective element is in the second position.
摘要翻译：微电子机械系统（MEMS）装置包括反射元件，该反射元件包括至少一个止动构件。该装置还包括电极和至少部分延伸穿过电极的孔。光圈有一个边界。该装置在孔内或孔的边界的一部分上具有非导电表面。支撑结构将反射元件与电极分开。反射元件可以在第一位置和第二位置之间移动。当反射元件处于第一位置时，止动构件与不导电表面间隔开。当反射元件处于第二位置时，止动构件的一部分与不导电表面接触。当反射元件处于第二位置时，反射元件和电极彼此电隔离。

7. 发明申请

WO2009026250A1 SYSTEM AND METHOD FOR MEASURING ADHESION FORCES IN MEMS DEVICES 审中-公开
标题翻译：用于测量MEMS器件中粘合力的系统和方法
公开(公告)号：WO2009026250A1
公开(公告)日：2009-02-26
申请号：PCT/US2008/073513
申请日：2008-08-18
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , GUDLAVALLETI, Sauri , TUNG, Ming-hau , KOGUT, Lior
发明人： GUDLAVALLETI, Sauri , TUNG, Ming-hau , KOGUT, Lior
IPC分类号： G02B26/00 , B81C1/00
CPC分类号： G02B26/0841 , B81B2201/047 , B81C99/0045 , G02B26/001
摘要： A MEMS test device comprises a flexible beam spaced apart from an optical stack. The MEMS test device includes a reflective layer and a partially reflective layer, such that a change in the position of the MEMS test device can be observed without the use of an external interferometer. The flexible beam may be cantilevered or fixed at each end. The flexible beam may include a shoe suspended from the side of the beam facing the optical stack, to provide a fixed contact area. An array of MEMS test devices may be used to determine compliance, or to calculate adhesion forces.
摘要翻译： MEMS测试装置包括与光学堆叠间隔开的柔性梁。 MEMS测试装置包括反射层和部分反射层，使得可以在不使用外部干涉仪的情况下观察MEMS测试装置的位置的变化。柔性梁可以在每一端悬臂或固定。柔性梁可以包括从面向光学堆叠的梁的侧面悬挂的鞋，以提供固定的接触面积。可以使用一系列MEMS测试装置来确定柔量，或计算附着力。

8. 发明申请

WO2009006122A1 INTEGRATED IMODS AND SOLAR CELLS ON A SUBSTRATE 审中-公开
标题翻译：在基底上的集成的IMODS和太阳能电池
公开(公告)号：WO2009006122A1
公开(公告)日：2009-01-08
申请号：PCT/US2008/068065
申请日：2008-06-24
申请人： QUALCOMM MEMS TECHNOLOGIES, INC. , SASAGAWA, Teruo , KOGUT, Lior , TUNG, Ming-hau
发明人： SASAGAWA, Teruo , KOGUT, Lior , TUNG, Ming-hau
IPC分类号： G02B26/00 , B81B3/00 , G09G3/34 , H01L31/075
CPC分类号： G02B26/001 , H01L27/142 , H01L31/072 , H01L31/0725 , Y02E10/50
摘要： Embodiments of the present invention relate to interferometric display devices comprising an interferometric modulator and a solar cell and methods of making thereof. In some embodiments, the solar cell is configured to provide energy to the interferometric modulator. The solar cell and the interferometric modulator may be formed above the same substrate. A layer of the solar cell may be shared with a layer of the interferometric modulator.
摘要翻译：本发明的实施例涉及包括干涉式调制器和太阳能电池的干涉式显示装置及其制造方法。在一些实施例中，太阳能电池被配置为向干涉式调制器提供能量。太阳能电池和干涉式调制器可以形成在相同基板上方。一层太阳能电池可以与干涉式调制器的一层共享。

9. 发明申请

WO2008008162A2 SUPPORT STRUCTURE FOR FREE-STANDING MEMS DEVICE AND METHODS FOR FORMING THE SAME 审中-公开
标题翻译：用于自立式MEMS装置的支撑结构及其形成方法
公开(公告)号：WO2008008162A2
公开(公告)日：2008-01-17
申请号：PCT/US2007/014511
申请日：2007-06-21
申请人： QUALCOMM INCORPORATED , KOGUT, Lior , TUNG, Ming-hau , ARBUCKLE, Brian
发明人： KOGUT, Lior , TUNG, Ming-hau , ARBUCKLE, Brian
IPC分类号： B81B3/00
CPC分类号： B81B3/0072 , G02B26/001
摘要： A microelectromechanical (MEMS) device includes a functional layer including a first material, a deformable layer including a second material different from the first material, and a connecting element including the first material. The connecting element is mechanically coupled to the deformable layer and the functional layer. The connecting element and the deformable layer form an interface between the first material and the second material. The interface is spaced from the functional layer.
摘要翻译：微机电（MEMS）器件包括功能层，该功能层包括第一材料，包括不同于第一材料的第二材料的可变形层以及包括第一材料的连接元件。连接元件机械连接到可变形层和功能层。连接元件和可变形层在第一材料和第二材料之间形成界面。界面与功能层分开。

10. 发明申请

WO2007126844A2 NON-PLANAR SURFACE STRUCTURES AND PROCESS FOR MICROELECTROMECHANICAL SYSTEMS 审中-公开
标题翻译：微电子机械系统的非平面表面结构与工艺
公开(公告)号：WO2007126844A2
公开(公告)日：2007-11-08
申请号：PCT/US2007/007613
申请日：2007-03-27
申请人： QUALCOMM INCORPORATED , TUNG, Ming-Hau , AKELLA, Sriram , CUMMINGS, William, J. , KOGUT, Lior
发明人： TUNG, Ming-Hau , AKELLA, Sriram , CUMMINGS, William, J. , KOGUT, Lior
IPC分类号： B81C1/00
CPC分类号： B81B3/0008 , G02B26/001
摘要： Methods of making MEMS devices including interferometric modulators involve depositing various layers, including stationary layers, movable layers and sacrificial layers, on a substrate. Apertures are formed in one or more of the various layers so as to form a non-planar surface on the movable and/or the stationary layers. Other layers may be formed over the formed apertures. Removal of the sacrificial layer from between the resulting non-planar movable and/or stationary layers results in a released MEMS device having reduced contact area and/or a larger surface separation between the movable and stationary layers when the MEMS device is actuated. The reduced contact area results in lower adhesion forces and reduced stiction during actuation of the MEMS device. These methods may be used to manufacture released and unreleased interferometric modulators.
摘要翻译：制造包括干涉式调制器的MEMS器件的方法涉及在衬底上沉积各种层，包括固定层，可移动层和牺牲层。在各个层中的一个或多个层中形成孔以便在可移动层和/或固定层上形成非平面表面。其他层可以形成在所形成的孔之上。从所得非平面可移动层和/或静止层之间移除牺牲层导致当MEMS器件被致动时释放的MEMS器件具有减小的接触面积和/或可移动层和固定层之间的更大表面分离。减小的接触面积在MEMS装置的致动期间导致较低的粘合力和降低的静摩擦。这些方法可用于制造释放和未释放的干涉式调制器。

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