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1. 发明申请

WO2008015576A2 ENHANCEMENT OF INKJET-PRINTED ELEMENTS USING PHOTOLITHOGRAPHIC TECHNIQUES 审中-公开
标题翻译：使用光刻技术进行喷墨打印的元件的增强
公开(公告)号：WO2008015576A2
公开(公告)日：2008-02-07
申请号：PCT/IB2007/003256
申请日：2007-05-31
申请人： ORBOTECH LTD. , GLAZER, Arie , BOCHNER, David , MILLER, Gershon , SAPHIER, Ofer , DORFAN, Mannie
发明人： GLAZER, Arie , BOCHNER, David , MILLER, Gershon , SAPHIER, Ofer , DORFAN, Mannie
CPC分类号： G02B5/223 , G02B5/201 , G03F7/0007 , G03F7/16
摘要： A method of manufacturing includes depositing a material on a surface of a substrate in a liquid form using an inkjet process, whereby the material dries in an initial shape on the substrate. A photolithographic process is applied using a mask that is separate from the substrate in order to modify the initial shape.
摘要翻译：一种制造方法包括使用喷墨工艺将材料沉积在液体形式的基板的表面上，由此材料在基板上以初始形状干燥。使用与基板分离的掩模来施加光刻工艺，以便改变初始形状。

2. 发明申请

WO2009090633A3 INSPECTION OF A SUBSTRATE USING MULTIPLE CAMERAS 审中-公开
公开(公告)号：WO2009090633A3
公开(公告)日：2009-07-23
申请号：PCT/IL2009/000043
申请日：2009-01-11
申请人： ORBOTECH LTD. , SAPHIER, Ofer , SHAPPIRA, Israel , DAVIDI, Yaakov
发明人： SAPHIER, Ofer , SHAPPIRA, Israel , DAVIDI, Yaakov
IPC分类号： G01N21/00
摘要： Apparatus for inspection includes an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample. A motion assembly is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance. An image processor is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance.

3. 发明申请

WO2007080568A2 SYSTEM AND METHOD FOR INSPECTING WORKPIECES HAVING MICROSCOPIC FEATURES 审中-公开
标题翻译：用于检查具有微观特征的工件的系统和方法
公开(公告)号：WO2007080568A2
公开(公告)日：2007-07-19
申请号：PCT/IL2006/001418
申请日：2006-12-11
申请人： ORBOTECH LTD. , SAPHIER, Ofer , ADIN, Raanan , FISCH, David
发明人： SAPHIER, Ofer , ADIN, Raanan , FISCH, David
IPC分类号： G06K9/00
CPC分类号： G06K9/033 , G06K2209/19
摘要： Apparatus for high resolution processing of a generally planar workpiece having microscopic features to be imaged, comprising a video camera acquiring at least two candidate images of a microscopic portion on generally planar workpiece; a motion controller operative to effect motion, relative to the workpiece, of at least an optical element of the video camera along an optical axis extending generally normally to a location on a surface of the workpiece, the video camera acquiring the at least two candidate images at selected time intervals, each of the at least two candidate images differing by at least one image parameter; an image selector operative to select an individual image from among the at least two candidate images according to predefined criteria of image quality; and a selected image analyzer operative to analyze at least a portion of the individual image selected by the image selector.
摘要翻译：一种用于具有要成像的微观特征的大体平面的工件的高分辨率处理的装置，包括摄像机，其在大致平面的工件上获取微观部分的至少两个候选图像; 运动控制器，其操作以沿着通常大致延伸到工件表面上的位置的光轴实现至少摄像机的光学元件相对于工件的运动，摄像机获取至少两个候选图像在选定的时间间隔，所述至少两个候选图像中的每一个与至少一个图像参数不同; 图像选择器，用于根据图像质量的预定标准从所述至少两个候选图像中选择单个图像; 以及选择的图像分析器，用于分析由图像选择器选择的单个图像的至少一部分。

4. 发明申请

WO2004083901A2 DETECTION OF MACRO-DEFECTS USING MICRO-INSPECTION INPUTS 审中-公开
标题翻译：使用微检查输入检测宏观缺陷
公开(公告)号：WO2004083901A2
公开(公告)日：2004-09-30
申请号：PCT/IL2004/000253
申请日：2004-03-17
申请人： ORBOTECH LTD. , SHIGERU, Yamamoto , SAPHIER, Ofer , ADIN, Raanan
发明人： SHIGERU, Yamamoto , SAPHIER, Ofer , ADIN, Raanan
IPC分类号： G02B
CPC分类号： G01N21/956
摘要： Apparatus for inspection includes optical inspection functionality (28) for providing at least one optical inspection output representative of a pattern of repeating cells on a substrate. Analysis functionality (32) is operative to receive the at least one optical inspection output and to isolate pre-selected features of the repeating cells. Analysis reporting functionality is operative on the isolated pre-selected features of the repeating cells for providing an output (34) indication of variations in at least one of the isolated pre-selected features, which variations occur over plural ones of the repeating cells.
摘要翻译：用于检查的装置包括光学检查功能（28），用于提供表示基板上的重复单元的图案的至少一个光学检查输出。分析功能（32）可操作以接收所述至少一个光学检查输出并且隔离所述重复单元的预选特征。分析报告功能对于重复单元的隔离的预先选择的特征进行操作，用于提供分离的预先选择的特征中的至少一个中的变化的输出（34）指示，该变化发生在多个重复单元上。

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