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1. 发明申请

WO2010001344A2 INTEGRATING AND OPTIMIZING DIFFERENT FUNCTIONAL COMPONENTS ON A SINGLE SUBSTRATE HAVING LAYER IN COMMON 审中-公开
标题翻译：在具有共同层的单层基板上集成和优化不同的功能组件
公开(公告)号：WO2010001344A2
公开(公告)日：2010-01-07
申请号：PCT/IB2009052847
申请日：2009-06-30
申请人： NXP BV , KLEE MAREIKE , RENDERS CHRISTINA ADRIANA , LOK PIETER , ROEST AARNOUD LAURENS , DEN DEKKER ARNOLDUS , REIMANN KLAUS , STEENEKEN PETER GERARD , WUNNICKE OLAF
发明人： KLEE MAREIKE , RENDERS CHRISTINA ADRIANA , LOK PIETER , ROEST AARNOUD LAURENS , DEN DEKKER ARNOLDUS , REIMANN KLAUS , STEENEKEN PETER GERARD , WUNNICKE OLAF
IPC分类号： H03H9/05 , H01L21/00 , H01L27/00
CPC分类号： H03H9/0542 , H01L27/0805
摘要： The invention relates to a method of manufacturing a monolithic device comprising multiple process steps. The monolithic device comprises at least two different electrical or electromechanical functional components (GS, CS, TC1, TC2, HKC, BW, BWM, FBAR). Each respective electromechanical functional component is formed by a respective functional stack (FS1, FS2) comprising a plurality of layers. The at least two 5 functional components (GS...FBAR) have a first layer in common (DL, E1, E2, E3). The method comprises a step of: providing a first ranking of the functional components (GS...FBAR) for the first layer (DL, E1, E2, E3) which is based on a plurality of respective performance indicators for each respective one of the functional. The multiple process steps comprise a step of manufacturing the first layer (DL, E1, E2, E3) such that it is physically 10 and/or geometrically optimized for at least a single one of the functional components selected on the basis of a highest rank in the first ranking. The method in accordance with the invention provides for a monolithic integration of different functional components (GS...FBAR). In this method layers of the functional stack are reused, which saves process steps, and optimized for optimal performance of at least one of the functional components 15 (GS...FBAR) without jeopardizing the performance of the monolithic device to unacceptable levels. The invention further relates to a monolithic device which features a wider applicability than the known monolithic devices because the tunable and/or high-k dielectric layer in respective functional stacks can be better shared between the functional components.
摘要翻译：本发明涉及一种制造包括多个工艺步骤的整体式装置的方法。单片装置包括至少两个不同的电或机电功能部件（GS，CS，TC1，TC2，HKC，BW，BWM，FBAR）。每个相应的机电功能部件由包括多个层的相应的功能堆叠（FS1，FS2）形成。至少两个5个功能组件（GS ... FBAR）具有共同的第一层（DL，E1，E2，E3）。该方法包括以下步骤：为第一层（DL，E1，E2，E3）提供功能组件（GS ... FBAR）的第一等级，其基于多个相应的性能指示符功能。多个处理步骤包括制造第一层（DL，E1，E2，E3）的步骤，使得其在基于最高等级选择的功能组件中的至少一个功能部件的物理上为10和/或几何优化排名第一。根据本发明的方法提供了不同功能组件（GS ... FBAR）的单片集成。在该方法中，功能堆叠的层被重复使用，这节省了工艺步骤，并且优化了功能组件15（GS ... FBAR）中的至少一个的最佳性能，而不会将单片设备的性能损害到不可接受的水平。本发明还涉及具有比已知单片器件更广泛适用性的单片器件，因为相应功能堆叠中的可调谐和/或高k电介质层可以在功能部件之间更好地共享。

2. 发明申请

WO2009153754A2 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：WO2009153754A2
公开(公告)日：2009-12-23
申请号：PCT/IB2009052614
申请日：2009-06-18
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括：谐振器; 致动电极; 以及第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

3. 发明申请

WO2009153754A3 MEMS RESONATOR FOR FILTERING AND MIXING 审中-公开
标题翻译：用于滤波和混合的MEMS谐振器
公开(公告)号：WO2009153754A3
公开(公告)日：2010-05-27
申请号：PCT/IB2009052614
申请日：2009-06-18
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF T M , REIMANN KLAUS
IPC分类号： H03D7/00
CPC分类号： H03D7/00 , H03H9/02259 , H03H9/02275 , H03H9/2452 , H03H9/465 , H03H2009/02496 , H03H2009/2442
摘要： A method of operating a micro-electromechanical system, comprising a resonator; an actuation electrode; and a first detection electrode, to filter and mix a plurality of signals. The method comprises applying a first alternating voltage signal to the actuation electrode, wherein an actuation force is generated having a frequency bandwidth that is greater than and includes a resonant bandwidth of a mechanical frequency response of the resonator, and wherein a displacement of the resonator is produced which is filtered by the mechanical frequency response and varies a value of an electrical characteristic of the first detection electrode. The method also comprises applying a second alternating voltage signal to the first detection electrode, wherein the second voltage signal is mixed with the varying value to produce a first alternating current signal. The first alternating current signal is detected at the first detection electrode.
摘要翻译：一种操作微机电系统的方法，包括谐振器; 致动电极; 和第一检测电极，以过滤和混合多个信号。该方法包括向致动电极施加第一交流电压信号，其中产生具有大于并包括谐振器的机械频率响应的谐振带宽的频率带宽的致动力，并且其中谐振器的位移为产生的，其被机械频率响应过滤，并且改变第一检测电极的电特性的值。该方法还包括向第一检测电极施加第二交流电压信号，其中第二电压信号与变化值混合以产生第一交流信号。在第一检测电极处检测第一交流信号。

4. 发明申请

WO2007036820A3 OSCILLATOR BASED ON PIEZORESISTIVE RESONATORS 审中-公开
标题翻译：基于PIEZORESISTIVE共振器的振荡器
公开(公告)号：WO2007036820A3
公开(公告)日：2007-10-18
申请号：PCT/IB2006053185
申请日：2006-09-08
申请人： NXP BV , STEENEKEN PETER GERARD , VAN BEEK JOZEF THOMAS MARTINUS
发明人： STEENEKEN PETER GERARD , VAN BEEK JOZEF THOMAS MARTINUS
IPC分类号： H03B5/32
CPC分类号： H03B5/32
摘要： An oscillator circuit is described comprising a piezoresistive resonator and a phase changing devices. Oscillator circuits with piezoresistive resonators do have the advantage that they can perform self-sustaining oscillation without additional active devices as e.g. transistors since they can be used as amplifiers. Phase changing devices as capacitors, coils and further piezoresistive resonator are used in order to compensate the p/2 phase shift of the piezoresistive resonator.
摘要翻译：描述了包括压阻谐振器和相变装置的振荡器电路。具有压阻谐振器的振荡器电路确实具有这样的优点：它们可以执行自维持振荡，而不需要额外的有源器件，例如，晶体管，因为它们可以用作放大器。使用相变装置作为电容器，线圈和其它压阻谐振器，以便补偿压阻谐振器的p / 2相移。

5. 发明申请

WO2006117709A2 CAPACITIVE RF-MEMS DEVICE WITH INTEGRATED DECOUPLING CAPACITOR 审中-公开
标题翻译：具有集成解耦电容器的电容式RF-MEMS器件
公开(公告)号：WO2006117709A2
公开(公告)日：2006-11-09
申请号：PCT/IB2006051247
申请日：2006-04-21
申请人： KONINKL PHILIPS ELECTRONICS NV , STEENEKEN PETER GERARD
发明人： STEENEKEN PETER GERARD
CPC分类号： H01H59/0009 , H01G5/16 , H01G5/40 , H01H2059/0072 , Y10T29/435
摘要： The present invention provides a capacitive RF-MEMS device comprising a vertically integrated decoupling capacitor (14). The decoupling capacitor (14) therefore does not take extra area. Furthermore, the RF-MEMS according to the invention needs less interconnects, which also saves space and which reduces the series inductance/resistance in the RF path.
摘要翻译：本发明提供一种包括垂直集成去耦电容器（14）的电容式RF-MEMS器件。因此，去耦电容器（14）不占用额外的面积。此外，根据本发明的RF-MEMS需要更少的互连，这也节省了空间，并且降低了RF路径中的串联电感/电阻。

6. 发明申请

WO2008129467A8 DAYLIGHT DEFLECTION SYSTEM WITH INTEGRATED ARTIFICIAL LIGHT SOURCE 审中-公开
标题翻译：具有综合人造光源的日光偏转系统
公开(公告)号：WO2008129467A8
公开(公告)日：2009-11-19
申请号：PCT/IB2008051455
申请日：2008-04-16
申请人： PHILIPS INTELLECTUAL PROPERTY , KONINKL PHILIPS ELECTRONICS NV , HENTE DIRK , BUDDE WOLFGANG OTTO , LIFKA HERBERT , STEENEKEN PETER GERARD , VAN DE WEIJER PETER , JACOBS JOSEPH HENDRIK ANNA MAR , VAN ELSBERGEN VOLKER
发明人： HENTE DIRK , BUDDE WOLFGANG OTTO , LIFKA HERBERT , STEENEKEN PETER GERARD , VAN DE WEIJER PETER , JACOBS JOSEPH HENDRIK ANNA MARIA , VAN ELSBERGEN VOLKER
IPC分类号： E06B9/386 , F21S11/00
CPC分类号： E06B9/386 , E06B2009/2417 , E06B2009/247 , F21S11/00 , F21S19/005 , F21Y2105/00 , F21Y2115/15
摘要： The present invention relates to a daylight deflection system including an arrangement of louvers (5) which are aligned and formed to block daylight impinging from an outer side (3) at higher angles of incidence with respect to a horizontal direction (19), to deflect daylight impinging from the outer side (3) at lower angles of incidence with respect to the horizontal direction (19) towards an indoor ceiling, and to allow visual transmission in at least the horizontal direction (19). In this deflection system OLED´s (8) or optical light guides (16) coupled to LED´s (17) are attached to or integrated in the louvers (5), said OLED´s (8) or light guides (16) being microstructured at a surface to deflect the daylight toward the indoor sealing. With this daylight deflection system indoor lighting combining daylight and artificial light is achieved in a compact manner.
摘要翻译：本发明涉及一种日光偏转系统，其包括百叶窗（5）的布置，所述百叶窗（5）的排列和形成以阻挡相对于水平方向（19）以较高入射角从外侧（3）入射的日光，以偏转从外侧（3）以相对于水平方向（19）的入射角朝向室内天花板入射的日光，并允许至少水平方向（19）的视觉传播。在该偏转系统中，耦合到LED（17）的OLED（8）或光导体（16）附接到或集成在百叶窗（5）中，所述OLED（8）或光导（16）在表面微结构化以将日光偏向室内密封。利用这种日光偏转系统，结合日光和人造光的室内照明以紧凑的方式实现。

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