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1. 发明申请

WO2021144634A1 ACCURATE RAMAN SPECTROSCOPY 审中-公开
公开(公告)号：WO2021144634A1
公开(公告)日：2021-07-22
申请号：PCT/IB2020/061066
申请日：2020-11-24
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： SCHLEIFER, Elad , OREN, Yonatan , SHAYARI, Amir , HOLLANDER, Eyal , DEICH, Valery , YALOV, Shimon , BARAK, Gilad
IPC分类号： G01J3/02 , G01J3/44 , G01N21/27 , G01N21/65 , G01N2201/06113 , G01N2201/0636
摘要： A method, a system, and a non-transitory computer readable medium for accurate Raman spectroscopy. The method may include executing at least one iteration of the steps of: (i) performing, by an optical measurement system, a calibration process that comprises (a) finding a misalignment between a region of interest defined by a spatial filter, and an impinging beam of radiation that is emitted from an illuminated area of a sample, the impinging beam impinges on the spatial filter; and (b) determining a compensating path of propagation of the impinging beam that compensates the misalignment; and (ii) performing a measurement process, while the optical measurement system is configured to provide the compensating path of propagation of the impinging beam, to provide one or more Raman spectra.

2. 发明申请

WO2018211505A1 RAMAN SPECTROSCOPY BASED MEASUREMENT SYSTEM 审中-公开
公开(公告)号：WO2018211505A1
公开(公告)日：2018-11-22
申请号：PCT/IL2018/050531
申请日：2018-05-15
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： OREN, Yonatan
IPC分类号： G01N21/17 , G01N21/65
CPC分类号： G01B11/02 , G01B2210/56 , G01N21/17 , G01N21/65 , G03F7/70616 , G03F7/70625
摘要： A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure.

3. 发明申请

WO2017103935A1 HYBRID METROLOGY METHOD AND SYSTEM 审中-公开
标题翻译：混合计量方法和系统
公开(公告)号：WO2017103935A1
公开(公告)日：2017-06-22
申请号：PCT/IL2016/051350
申请日：2016-12-15
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： BARAK, Gilad , HAINICK, Yanir , OREN, Yonatan
IPC分类号： G01J3/44 , G01N21/956
CPC分类号： G01N21/65 , G01B2210/56 , G01L1/00
摘要： A method and system are presented for use in measuring characteristic(s) of patterned structures. The method utilizes processing of first and second measured data, wherein the first measured data is indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of illuminating and/or collected light conditions corresponding to the characteristic(s) to be measured, and the second measured data comprises at least one spectrum obtained from the patterned structure in Optical Critical Dimension (OCD) measurement session. The processing comprises applying model-based analysis to the at least one Raman spectrum and the at least one OCD spectrum, and determining the characteristic(s) of the patterned structure under measurements.
摘要翻译：提出了用于测量图案化结构的特征的方法和系统。该方法利用第一和第二测量数据的处理，其中第一测量数据表示在使用至少一个选择的光学测量方案进行测量的情况下从图案化结构获得的至少一个拉曼光谱，每个光学测量方案具有照明和/或收集的预定配置光条件对应于待测量的特性，并且第二测量数据包括从光学临界尺寸（OCD）测量会话中的图案化结构获得的至少一个光谱。处理包括将基于模型的分析应用于至少一个拉曼光谱和至少一个OCD光谱，并确定测量下的图案化结构的特性。

4. 发明申请

WO2021130757A1 COMBINED OCD AND PHOTOREFLECTANCE METHOD AND SYSTEM 审中-公开
公开(公告)号：WO2021130757A1
公开(公告)日：2021-07-01
申请号：PCT/IL2020/051331
申请日：2020-12-24
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： OREN, Yonatan , BARAK, Gilad
IPC分类号： G01B11/02 , G01N21/17 , G01N21/55 , G01N29/44 , G01N29/46
摘要： A combined OCD and photoreflectance system and method for improving the OCD performance in measurements of optical properties of a target sample. The system comprises (a) either a single channel OCD set-up comprised of a single probe beam configured in a direction normal/oblique to the target sample or a multi-channel OCD set-up having multiple probe beams configured in normal and oblique directions to the target sample for measuring the optical properties of the target sample, (b) at least one laser source for producing at least one laser beam, (c) at least one modulation device to turn the at least one laser beam into at least one alternatingly modulated laser beam, and (d) at least one spectrometer for measuring spectral components of the at least one light beam reflecting off said target sample; wherein the at least one alternatingly modulated laser beam is alternatingly modulating the spectral reflectivity of the target sample,

5. 发明申请

WO2021117035A1 METHOD AND SYSTEM FOR BROADBAND PHOTOREFLECTANCE SPECTROSCOPY 审中-公开
公开(公告)号：WO2021117035A1
公开(公告)日：2021-06-17
申请号：PCT/IL2020/051265
申请日：2020-12-08
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： OREN, Yonatan , BARAK, Gilad
IPC分类号： G01N21/65
摘要： Photoreflectance (PR) spectroscopy system and method for accumulating separately a "pump on" light beam and a "pump off light beam reflecting off a sample. The system comprises: (a) a probe source for producing a probe beam, the probe beam is used for measuring spectral reflectivity of a sample, (b) a pump source for producing a pump beam, (c) at least one spectrometer, (d) a first modulation device to allow the pump beam to alternatingly modulate the spectral reflectivity of the sample, so that, a light beam reflecting from the sample is altematingly a "pump on" light beam and a "pump off light beam, (e) a second modulation device in a path of the light beam reflecting off the sample to alternatingly direct the "pump on" light beam and the "pump off light beam to the at least one spectrometer, and (f) a computer.

6. 发明申请

WO2020021554A1 OPTICAL TECHNIQUE FOR MATERIAL CHARACTERIZATION 审中-公开
公开(公告)号：WO2020021554A1
公开(公告)日：2020-01-30
申请号：PCT/IL2019/050847
申请日：2019-07-25
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： BARAK, Gilad , OREN, Yonatan
IPC分类号： H01L21/268 , G01N21/21 , G03F7/20
摘要： A polarized Raman Spectrometric system for defining parameters of a polycrystalline material, the system comprises a polarized Raman Spectrometric apparatus, a computer-controlled sample stage for positioning a sample at different locations, and a computer comprising a processor and an associated memory. The polarized Raman Spectrometric apparatus generates signal(s) from either small sized spots at multiple locations on a sample or from an elongated line- shaped points on the sample, and the processor analyzes the signal(s) to define the parameters of said polycrystalline material.

7. 发明申请

WO2017103934A1 RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES 审中-公开
标题翻译：基于拉曼光谱的图形结构测量
公开(公告)号：WO2017103934A1
公开(公告)日：2017-06-22
申请号：PCT/IL2016/051349
申请日：2016-12-15
申请人： NOVA MEASURING INSTRUMENTS LTD.
发明人： BARAK, Gilad , HAINICK, Yanir , OREN, Yonatan , MACHAVARIANI, Vladimir
IPC分类号： G01N21/66
CPC分类号： G01N21/65 , G01B2210/56 , G01L1/00
摘要： A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: providing measured data comprising data indicative of at least one Raman spectrum obtained from a patterned structure under measurements using at least one selected optical measurement scheme each with a predetermined configuration of at least one of illuminating and collected light conditions corresponding to the characteristic(s) to be measured; processing the measured data, and determining, for each of the at least one Raman spectrum, a distribution of Raman-contribution efficiency (RCE) within at least a part of the structure under measurements, being dependent on characteristics of the structure and the predetermined configuration of the at least one of illuminating and collected light conditions in the respective optical measurement scheme; analyzing the distribution of Raman- contribution efficiency and determining the characteristic(s) of the structure.
摘要翻译：呈现用于测量图案化结构的一个或多个特征的方法和系统。该方法包括：提供测量数据，该测量数据包括指示从测量下的图案化结构获得的至少一个拉曼光谱的数据，使用至少一个选定的光学测量方案，每个光学测量方案具有对应于该特性的照明和收集光条件中的至少一个的预定配置（s）被测量; 处理测量的数据，以及针对至少一个拉曼光谱中的每一个确定在测量结构的至少一部分内的拉曼贡献效率（RCE）的分布，其取决于结构的特征和预定配置在相应的光学测量方案中照明和收集的光条件中的至少一个的条件; 分析拉曼贡献效率的分布并确定结构的特征。

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