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    • 7. 发明申请
    • SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP
    • 用于位置控制泵中的机械活塞的系统和方法
    • WO2007061957B1
    • 2007-12-06
    • PCT/US2006044907
    • 2006-11-20
    • ENTEGRIS INCGONNELLA GEORGECEDRONE JAMESGASHGAEE IRAJ
    • GONNELLA GEORGECEDRONE JAMESGASHGAEE IRAJ
    • F04B49/06
    • F04B49/065F04B13/00F04B17/03F04B43/0081F04B43/02F04B2201/0201F04B2201/1208
    • Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
    • 这里公开的系统和方法的实施例利用无刷直流电动机(BLDCM)来驱动泵送系统中的单级或多级泵以实时,平稳地运动,并且对流体运动进行极其精确和可重复的位置控制,并且 分配量,用于半导体制造。 BLDCM可以使用位置传感器来实时位置反馈给执行定制的场定向控制方案的处理器。 本发明的实施例可以通过经由定制控制方案根据基础功能的关键性增加和减小BLDCM的操作频率而减少热量产生而不会不利地损害分配泵的精确位置控制。 该控制方案能够以非常低的速度运行BLDCM,同时保持恒定的速度,这使得泵送系统能够以最小的变化以很宽的速度范围运行,从而大大提高了分配性能和操作能力。
    • 9. 发明申请
    • FIXED VOLUME VALVE SYSTEM
    • 固定体积阀系统
    • WO2007067339A3
    • 2007-09-20
    • PCT/US2006044908
    • 2006-11-20
    • ENTEGRIS INCGASHGAEE IRAJGONNELLA GEORGECEDRONE JAMES
    • GASHGAEE IRAJGONNELLA GEORGECEDRONE JAMES
    • G01F11/00
    • F04B25/00F04B7/0275
    • Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
    • 本发明的实施例提供了提供均匀滞留体积的阀。 本发明的一个实施例提供了一种阀,该阀包括限定阀腔的阀体(例如,一个或多个件),该阀腔具有阀座,入口流动通道,出口流动通道和与阀座交叉的隔膜控制流动通道 。 阀座成形为使得当至少阈值真空被施加到隔膜控制流动通道时,阀具有固定的滞留体积。 该阀还包括可朝向和远离阀座移动的隔膜。 根据本发明的一个实施例,阀座可以具有半球形形状,当最小真空被施加到膜片控制流动通道时膜片符合该半球形形状。
    • 10. 发明申请
    • SYSTEM AND METHOD FOR POSITION CONTROL OF A MECHANICAL PISTON IN A PUMP
    • 泵中机械活塞位置控制的系统与方法
    • WO2007061957A8
    • 2007-08-16
    • PCT/US2006044907
    • 2006-11-20
    • ENTEGRIS INCGONNELLA GEORGECEDRONE JAMESGASHGAEE IRAJ
    • GONNELLA GEORGECEDRONE JAMESGASHGAEE IRAJ
    • F04B49/06
    • F04B49/065F04B13/00F04B17/03F04B43/0081F04B43/02F04B2201/0201F04B2201/1208
    • Embodiments of the systems and methods disclosed herein utilize a brushless DC motor (BLDCM) to drive a singie-stage or a multi-stage pump in a pumping system for real time, smooth motion, and extremely precise and repeatable position control over fluid movements and dispense amounts, useful in semiconductor manufacturing. The BLDCM may employ a position sensor for real time position feedback to a processor executing a custom field-oriented control scheme. Embodiments of the invention can reduce heat generation without undesirably compromising the precise position control of the dispense pump by increasing and decreasing, via a custom control scheme, the operating frequency of the BLDCM according to the criticality of the underlying function(s). The control scheme can run the BLDCM at very low speeds while maintaining a constant velocity, which enables the pumping system to operate in a wide range of speeds with minimal variation, substantially increasing dispense performance and operation capabilities.
    • 本文公开的系统和方法的实施例利用无刷直流电动机(BLDCM)来驱动泵送系统中的单级或多级泵,以便实时,平稳地运动,以及对流体运动进行非常精确和可重复的位置控制, 分配量,用于半导体制造。 BLDCM可以使用位置传感器来实现位置反馈到执行定制的面向场的控制方案的处理器。 本发明的实施例可以通过根据底层功能的关键性,通过自定义控制方案增加和减少BLDCM的工作频率,而不会不期望地损害分配泵的精确位置控制而不发生损害。 该控制方案可以以非常低的速度运行BLDCM,同时保持恒定的速度,这使得泵送系统能够以较小的变化,大幅度增加的分配性能和操作能力在宽范围的速度下运行。