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1. 发明申请

WO2016059519A1 CAPACITIVE MICROELECTROMECHANICAL SENSOR WITH SELF-TEST CAPABILITY 审中-公开
标题翻译：具有自检能力的电容式微电子传感器
公开(公告)号：WO2016059519A1
公开(公告)日：2016-04-21
申请号：PCT/IB2015/057720
申请日：2015-10-09
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , ERKKILÄ, Jouni
IPC分类号： G01P15/125 , G01P21/00
CPC分类号： G01R31/2884 , G01P15/125 , G01P21/00
摘要： A capacitive sensor that includes at least one capacitive element and a switched-capacitor readout circuit part for detecting at least one signal capacitance that results from motions of the capacitive element. The self-test bias voltage of the actuation circuit part is coupled to the capacitive element during a first period that is synchronized to the front end reset period and occurs when the self-test of the capacitive sensor is enabled by the self-test controller.
摘要翻译：一种电容传感器，其包括至少一个电容元件和用于检测由电容元件的运动产生的至少一个信号电容的开关电容读出电路部分。在与前端复位周期同步的第一周期期间，致动电路部分的自测偏置电压耦合到电容元件，并且当自测试控制器启用电容传感器的自检时发生。

2. 发明申请

WO2015121780A2 A drive circuitry for a MEMS resonator 审中-公开
标题翻译： MEMS谐振器的驱动电路
公开(公告)号：WO2015121780A2
公开(公告)日：2015-08-20
申请号：PCT/IB2015/050903
申请日：2015-02-06
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse
IPC分类号： H03H7/00 , G01C19/5776 , H03L7/08 , H03H7/01
CPC分类号： G01C19/5712 , G01C19/5776 , H03B5/06 , H03H7/002 , H03H7/0153 , H03H2007/008 , H03L7/0805 , H03L7/099
摘要： A drive loop circuitry for a MEMS resonator. The circuitry comprises closed loop means for detecting and amplifying a signal of the MEMS resonator, means for phase shifting the detected and amplified signal, and means for feeding the detected, amplified and phase shifted signal as a feedback signal back to the MEMS resonator. The means for phase shifting the detected and amplified signal comprise a low pass filter of at least 2 nd order.
摘要翻译：用于MEMS谐振器的驱动回路电路
。该电路包括用于检测和放大MEMS谐振器的信号的闭环装置，用于对检测和放大的信号进行相移的装置，以及用于将检测到的放大的相移信号作为反馈信号反馈回MEMS谐振器的装置。用于对检测和放大的信号进行相移的装置包括至少2阶的低通滤波器。

3. 发明申请

WO2017195020A1 A SECONDARY SENSE LOOP WITH FORCE FEEDBACK CAPABILITY 审中-公开
标题翻译：有强大反馈能力的二次感应环路
公开(公告)号：WO2017195020A1
公开(公告)日：2017-11-16
申请号：PCT/IB2017/000547
申请日：2017-05-11
申请人： MURATA MANUFACTURING CO., LTD.
发明人： COLLIN, Rauli , WJUGA, Konsta , AALTONEN, Lasse
IPC分类号： G01C19/5776
摘要： A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.
摘要翻译：用于MEMS陀螺仪的次级感测回路包括次级元件，次级元件包括至少一个机械谐振器，模拟前端电路，数字次级回路电路和模拟后端电路。数字次级回路电路包括信号路径，在其输入处接收表示机械谐振器的检测运动的模拟次级输入信号并且在其输出处提供指示所述MEMS陀螺仪经受的角速度的输出信号，所述信号路径包括被配置为将模拟次级输入信号数字化为数字化次级信号的模数转换器以及控制被配置为调整次级感测回路的响应函数的闭合力反馈回路的操作的数字力反馈电路。

4. 发明申请

WO2016113653A1 CONTINUOUS SELF-TEST IN CAPACITIVE SENSOR 审中-公开
标题翻译：电容式传感器连续自检
公开(公告)号：WO2016113653A1
公开(公告)日：2016-07-21
申请号：PCT/IB2016/050088
申请日：2016-01-08
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , SALO, Teemu
IPC分类号： G01P21/00 , G01C25/00 , G01P15/125
CPC分类号： G01P21/00 , G01C25/00 , G01P15/125
摘要： A capacitive sensor device includes capacitive elements for detecting at least two inertial channels. At least one of the inertial channel comprises at least two self-test tones with distinctive fundamental frequencies. Inertial signals in the at least two inertial channels are caused by change of capacitance in the capacitive elements due to movements of rotor masses. Self-test tones are fed into at least one capacitive element under control of a self-test control module and the at least two inertial channels are temporally multiplexed to allow feeding of the self- test tones during normal operation of the capacitive sensor device. Signals in the inertial channels are processed for extracting self-test signals corresponding to the self-test tones, and the self-test signals are analyzed for self-test purposes. Alarm is triggered if multiple consecutive samples of predefined set of self-test signals indicate error with same polarity.
摘要翻译：电容传感器装置包括用于检测至少两个惯性通道的电容元件。惯性通道中的至少一个包括具有独特基频的至少两个自检音调。至少两个惯性通道中的惯性信号是由于转子质量的移动而由电容元件中的电容的变化引起的。在自测试控制模块的控制下，将自测音馈送到至少一个电容元件，并且至少两个惯性通道在时间上被多路复用以允许在电容传感器装置的正常操作期间馈送自测音。对惯性通道中的信号进行处理，以提取与自检音相对应的自检信号，并对自检信号进行自检。如果预定义的一组自检信号的多个连续样本表示具有相同极性的错误，则触发报警。

5. 发明申请

WO2022090955A1 MEMS GYROCOMPASS 审中-公开
公开(公告)号：WO2022090955A1
公开(公告)日：2022-05-05
申请号：PCT/IB2021/059924
申请日：2021-10-27
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , BLOMQVIST, Anssi
IPC分类号： G01C19/38 , G01C19/56
摘要： The present invention relates to the field of MEMS (microelectromechanical systems) and, in particular, to the use of MEMS gyroscopes for in a gyrocompass for finding a geographical heading. By including at least three MEM gyroscopes with offset sense axes arranged at known orientations, the gyrocompass of the present invention does not require precise mechanical turning of the gyroscopes in order to determine the heading of the gyrocompass or to compensate for bias errors.

6. 发明申请

WO2015075657A1 CAPACITANCE PROCESSING CIRCUIT AND A MEMS DEVICE 审中-公开
标题翻译：电容处理电路和MEMS器件
公开(公告)号：WO2015075657A1
公开(公告)日：2015-05-28
申请号：PCT/IB2014/066189
申请日：2014-11-20
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , SALO, Teemu , SILLANPÄÄ, Tero
IPC分类号： H03M1/06 , H03M1/12
CPC分类号： G06F3/0416 , G06F3/044 , H03K2217/94073 , H03K2217/96015 , H03K2217/9607 , H03M1/0619 , H03M1/0621 , H03M1/124
摘要： Processing circuit for processing input signals from a capacitive transducer structure. A current-to-voltage converter receives two input signals from the capacitive transducer structure, and outputs two output signals to gain stage circuits, and to a reference voltage generator. The gain stages generate from the output voltage signals a differential output signal. The reference voltage generates from the output signals a common mode output signal. The processing circuit generates a digital signal that corresponds to a quotient of the differential output signal and the common mode output signal.
摘要翻译：用于处理来自电容式换能器结构的输入信号的处理电路。电流 - 电压转换器从电容换能器结构接收两个输入信号，并输出两个输出信号以增益级电路和参考电压发生器。增益级由输出电压信号产生差分输出信号。参考电压从输出信号产生共模输出信号。处理电路产生对应于差分输出信号和共模输出信号的商的数字信号。

7. 发明申请

WO2016001801A1 SELF-TEST IN A CLOSED-LOOP VIBRATORY GYROSCOPE 审中-公开
标题翻译：闭环振动测试中的自检
公开(公告)号：WO2016001801A1
公开(公告)日：2016-01-07
申请号：PCT/IB2015/054766
申请日：2015-06-25
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse
IPC分类号： G01C19/5776
CPC分类号： G01C19/5776 , G01C19/5726
摘要： A closed-loop microelectromechanical gyroscope with a self- test function. At least one test input signal is generated from a signal of the vibrational primary motion and input during operation of the microelectromechanical gyroscope to the sense circuit.
摘要翻译：具有自检功能的闭环微机电陀螺仪。至少一个测试输入信号是从微机电陀螺仪运行到感测电路的振动一次运动的信号和输入产生的。

8. 发明申请

WO2015121779A2 A drive circuitry for MEMS resonator startup 审中-公开
标题翻译： MEMS谐振器启动的驱动电路
公开(公告)号：WO2015121779A2
公开(公告)日：2015-08-20
申请号：PCT/IB2015/050902
申请日：2015-02-06
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse
IPC分类号： G01C19/5776
CPC分类号： G01C19/5712 , G01C19/5776 , H03B5/06 , H03B5/364
摘要： A drive circuitry for a MEMS resonator. The circuitry comprises closed loop means for detecting and amplifying a signal of the MEMS resonator, and means for feeding the detected and amplified signal as a feedback signal back to the MEMS resonator. The circuitry also comprises DC bias voltage means for generating for the MEMS resonator a first DC bias voltage, and a second DC bias voltage that is controlled according to measured amplitudes of the MEMS resonator, one of the DC bias voltages being summed into the feedback signal. The circuitry comprises also a start-up circuitry adapted to detect a start-up state, and in response to a detected start-up state change at last one of the DC bias voltages to a predefined level. The state of constant oscillation is achieved reliably and in short time.
摘要翻译：用于MEMS谐振器的驱动电路
。该电路包括用于检测和放大MEMS谐振器的信号的闭环装置，以及用于将检测和放大的信号作为反馈信号反馈回MEMS谐振器的装置。该电路还包括DC偏置电压装置，用于为MEMS谐振器产生第一DC偏置电压和根据MEMS谐振器的测量振幅来控制的第二DC偏置电压，其中DC偏置电压之一被加和成反馈信号。该电路还包括启动电路，该启动电路适于检测启动状态并且响应于检测到的最后一个DC偏置电压的启动状态改变到预定义的电平。持续振荡的状态在短时间内可靠地实现。

9. 发明申请

WO2015083108A1 DELTA-SIGMA ANALOG-TO-DIGITAL CONVERTER 审中-公开
标题翻译： DELTA-SIGMA模拟到数字转换器
公开(公告)号：WO2015083108A1
公开(公告)日：2015-06-11
申请号：PCT/IB2014/066579
申请日：2014-12-04
申请人： MURATA MANUFACTURING CO., LTD.
发明人： AALTONEN, Lasse , SALO, Teemu , SILLANPÄÄ, Tero
IPC分类号： H03M3/02
CPC分类号： H03M3/368 , H03M3/466 , H03M3/47 , H03M3/474
摘要： A delta-sigma analog-to-digital converter for use with multiplexed input channels. The delta-sigma analog-to-digital converter comprising at least one integrator that includes an operational amplifier, a memory element with a leakage preventing switch structure for each input channel and a reset switch element adapted to reset the operational amplifier between the input channels. The specific switch design prevents effectively channel to channel cross talk between multiplexed channels.
摘要翻译：用于复用输入通道的delta-sigma模数转换器。 Δ-Σ模数转换器包括至少一个积分器，其包括运算放大器，具有用于每个输入通道的防漏开关结构的存储器元件和适于在输入通道之间复位运算放大器的复位开关元件。具体的开关设计有效地阻止了多路复用通道之间的通道串扰。

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