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1. 发明申请

WO2014152908A1 TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD 审中-公开
标题翻译： TOROIDAL等离子体吸收装置和方法
公开(公告)号：WO2014152908A1
公开(公告)日：2014-09-25
申请号：PCT/US2014/028194
申请日：2014-03-14
申请人： MKS INSTRUMENTS, INC.
发明人： CHEN, Xing , POKIDOV, Ilya , TIAN, Arthur , TRAN, Ken , LAM, David , WENZEL, Kevin, W.
IPC分类号： B01D53/32 , B01J12/00 , H01J37/32
CPC分类号： H01J37/32449 , B01D53/323 , B01D53/76 , B01D2257/2064 , H01J37/32339 , H01J37/32357 , H01J37/32458 , H01J37/32651 , H01J37/32669 , H01J37/32844 , H01J37/32935 , H01J2237/3321 , H01J2237/334 , H05H1/46 , H05H2001/4667 , H05H2245/121 , Y02C20/30
摘要： An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.
摘要翻译：提供了一种用于减少气体的装置。该装置包括具有多个入口和出口以及至少一个室壁的环形等离子体室。一个或多个磁芯相对于环形等离子体室设置。等离子体室限制环形等离子体。第二气体入口位于第一气体入口和气体出口之间的距离气体出口距离d处的环形等离子体室上，使得第一气体入口和第二气体入口之间的环形等离子体通道体积基本上由惰性气体填充，基于要减少的气体的期望停留时间的距离d。

2. 发明申请

WO2010151466A2 METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER 审中-公开
标题翻译：用于控制无线电频率的方法和系统
公开(公告)号：WO2010151466A2
公开(公告)日：2010-12-29
申请号：PCT/US2010/038790
申请日：2010-06-16
申请人： MKS INSTRUMENTS, INC. , NAGARKATTI, Siddharth , TIAN, Feng , LAM, David , RASHID, Abdul , BENZERROUK, Souheil , BYSTRYAK, Ilya , MENZER, David , SCHUSS, Jack, J. , AMBROSINA, Jesse, E.
发明人： NAGARKATTI, Siddharth , TIAN, Feng , LAM, David , RASHID, Abdul , BENZERROUK, Souheil , BYSTRYAK, Ilya , MENZER, David , SCHUSS, Jack, J. , AMBROSINA, Jesse, E.
IPC分类号： H02J17/00
CPC分类号： H03K5/01 , H03F3/189 , H03F3/217 , H03F2200/105 , H03F2200/375 , H03F2200/387 , H03G3/3047
摘要： A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
摘要翻译：一种用于控制脉冲功率的方法，包括从功率放大器测量第一功率脉冲以获得数据。该方法还包括产生第一信号以调整输出功率的第二脉冲，第一信号与数据相关，以最小化功率设定点与第二脉冲的基本稳定部分之间的功率差。该方法还包括产生第二信号以调整传递功率的第二脉冲，第二信号与数据相关，以最小化第二脉冲的峰值与第二脉冲的基本上稳定的部分之间的幅度差异。

3. 发明申请

WO2017112585A1 METHOD AND APPARATUS FOR PROCESSING DIELECTRIC MATERIALS USING MICROWAVE ENERGY 审中-公开
标题翻译：使用微波能加工介电材料的方法和设备
公开(公告)号：WO2017112585A1
公开(公告)日：2017-06-29
申请号：PCT/US2016/067506
申请日：2016-12-19
申请人： MKS INSTRUMENTS, INC.
发明人： CHEN, Xing , LAM, David , WENZEL, Kevin, W. , POKIDOV, Ilya
IPC分类号： B29B13/02 , B29C35/08 , B29C49/64 , H05B6/64
CPC分类号： B29C49/64 , B29B13/024 , B29C35/0805 , B29C49/6418 , B29C2035/0855 , B29K2067/003 , B29L2031/712 , H05B6/707
摘要： Methods and systems are provided for heating a dielectric preform material. An exemplary method includes inserting the preform material (102) into a microwave cavity (104) along a longitudinal axis of the microwave cavity and supplying the microwave cavity (104) with microwave power having a frequency that corresponds to an axial wavelength along the longitudinal axis (z) of the microwave cavity (104). The axial wavelength is greater than a length of the preform material (102) along the longitudinal axis (z). The method includes heating the preform material (102) within the microwave cavity (104) by the microwave power and determining temperatures of the preform material at one or more locations on a surface of the preform material. The method further includes adjusting, based on the temperatures of the preform material (102), the microwave frequency to achieve substantially uniform heating at least on a sidewall of the preform material along the longitudinal axis (z).
摘要翻译：提供了用于加热电介质预制件材料的方法和系统。示例性方法包括沿着微波腔的纵向轴线将预成形材料（102）插入到微波腔（104）中并且向微波腔（104）供应具有与沿纵向轴线的轴向波长对应的频率的微波功率（104）的长度（z）。轴向波长大于预制件材料（102）沿纵轴（z）的长度。该方法包括通过微波功率加热微波腔（104）内的预成型材料（102），并确定预成型材料表面上一个或多个位置处预成型材料的温度。该方法还包括基于预成型材料（102）的温度来调节微波频率以实现沿着纵轴（z）至少在预成型材料的侧壁上的基本均匀的加热。

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