专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2006114127A1 MEMS DEVICE WITH MUTUALLY PERPENDICULAR DEFLECTABLE REFLECTIVE AND ELECTRODE SURFACES 审中-公开
标题翻译：具有不可预测的反射和电极表面的MEMS器件
公开(公告)号：WO2006114127A1
公开(公告)日：2006-11-02
申请号：PCT/EP2005/010500
申请日：2005-09-28
申请人： MICRONIC LASER SYSTEMS AB , LJUNGBLAD, Ulric , ENOKSSON, Peter , BRING, Martin
发明人： LJUNGBLAD, Ulric , ENOKSSON, Peter , BRING, Martin
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to a MEMS device including at least one pixel element (132); said pixel element (132) including, a support structure (134), at least one deflectable reflective surface (135) supported by said support structure (134), at least one deflectable electrode surface (146, 148), which electrode surface (146, 148) is essentially perpendicular to said deflectable reflective surface (135), said electrode surface (146, 148) is electrostatically attractable by a standing bar (160, 170) arranged in between pixel elements (132), wherein said standing bar is attracting a greater portion of said electrode surface (146, 148) on a first side of the tilting axis of said pixel element (132) compared to a second side of the tilting axis of said pixel element (132).The invention also relates to a method for operating a MEMS device.
摘要翻译：本发明涉及一种包括至少一个像素元件（132）的MEMS器件; 所述像素元件（132）包括支撑结构（134），由所述支撑结构（134）支撑的至少一个可偏转反射表面（135），至少一个可偏转电极表面（146,148），所述电极表面，148）基本上垂直于所述可偏转反射表面（135），所述电极表面（146,148）通过布置在像素元件（132）之间的立杆（160,170）静电吸引，其中所述立杆吸引与所述像素元件（132）的倾斜轴的第二侧相比，在所述像素元件（132）的倾斜轴线的第一侧上的所述电极表面（146,148）的较大部分。本发明还涉及用于操作MEMS器件的方法。

2. 发明申请

WO2009037360A2 NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY 审中-公开
标题翻译：用于MASKLESS LITHOGRAPHY的新型单晶硅微型电镜
公开(公告)号：WO2009037360A2
公开(公告)日：2009-03-26
申请号：PCT/EP2008/062641
申请日：2008-09-22
申请人： MICRONIC LASER SYSTEMS AB , BRING, Martin , ENOKSSON, Peter
发明人： BRING, Martin , ENOKSSON, Peter
IPC分类号： B81C1/00
CPC分类号： B81C1/00174 , B81B2201/042 , G02B26/0841
摘要： A novel silicon micromirror structure for improving image fidelity in laser pattern generators is presented. In some embodiments, the micromirror is formed from monocrystalline silicon. Analytical- and finite element analysis of the structure as well as an outline of a fabrication scheme to realize the structure are given. The spring constant of the micromirror structure can be designed independently of the stiffness of the mirror-surface. This makes it possible to design a mirror with very good planarity, resistance to sagging during actuation, and it reduces influence from stress in reflectivity-increasing multilayer coatings.
摘要翻译：提出了一种用于提高激光图案发生器图像保真度的新型硅微镜结构。在一些实施例中，微镜由单晶硅形成。给出了结构的分析和有限元分析以及实现结构的制造方案的概要。微镜结构的弹簧常数可以独立于镜面的刚度来设计。这使得可以设计具有非常好的平面性，在致动期间的下垂阻力的反射镜，并且其减小了增加反射率的多层涂层中的应力的影响。

3. 发明申请

WO2019093948A1 CONTACTLESS WAVEGUIDE SWITCH AND METHOD FOR MANUFACTURING A WAVEGUIDE SWITCH 审中-公开
公开(公告)号：WO2019093948A1
公开(公告)日：2019-05-16
申请号：PCT/SE2018/051128
申请日：2018-11-05
申请人： RAHIMINEJAD, Sofia , ENOKSSON, Peter , HAASL, Sjoerd
发明人： RAHIMINEJAD, Sofia , ENOKSSON, Peter , HAASL, Sjoerd
IPC分类号： G02B6/35 , G02F1/01 , H01P1/10
摘要： The present invention relates to a waveguide switch for switching between an ON- state and an OFF-state for a waveguide channel, comprising: a moveable waveguide switch body comprising: an input opening for receiving an electromagnetic wave, an output opening for releasing an electromagnetic wave, wherein the waveguide switch body further comprises a blocking element arranged such that in the ON state, an electromagnetic wave may pass from the input opening to the output opening, and in the OFF state the blocking element substantially impedes an electromagnetic wave traveling from the input opening to the output opening, whereby the switch from the ON state to the OFF state is a rotational or translation movement of the waveguide switch body. The present invention also relates to a waveguide system employing such a switch and a method of manufacturing such a switch. By the present invention, contactless switching is provided in a high-frequency system.

4. 发明申请

WO2008089950A1 MEMS SENSOR FOR IN SITU TEM ATOMIC FORCE MICROSCOPY 审中-公开
标题翻译：用于现场TEM原子力显微镜的MEMS传感器
公开(公告)号：WO2008089950A1
公开(公告)日：2008-07-31
申请号：PCT/EP2008/000454
申请日：2008-01-22
申请人： NANOFACTORY INSTRUMENTS AB , NAFARI, Alexandra , SVENSSON, Krister , OLIN, Håkan , ENOKSSON, Peter , RUSU, Cristina , KARLÉN, David
发明人： NAFARI, Alexandra , SVENSSON, Krister , OLIN, Håkan , ENOKSSON, Peter , RUSU, Cristina , KARLÉN, David
IPC分类号： G12B21/22 , G01N13/16 , H01J37/20
CPC分类号： G01Q60/38 , G01Q20/04 , G01Q30/02 , H01J2237/2067 , H01J2237/2583 , H01J2237/26 , H01J2237/28
摘要： A force sensor (200) for atomic force microscopy comprising a MBMS or NEMS produced force sensor with a cantilever with a piezo resistive layer on the cantilever (300), wherein the sensor further comprises contact areas (304), a dummy cantilever (301) with a resistive layer, and where the piezoresistive layers are connected to a Wheatstone bridge located on the sensor. The sensor is to be positioned in a TBM apparatus for performing in situ TEM atomic force microscopy.
摘要翻译：一种用于原子力显微镜的力传感器（200），包括具有在所述悬臂（300）上具有压电层的悬臂的MBMS或NEMS产生的力传感器，其中所述传感器还包括接触区域（304），虚拟悬臂（301）具有电阻层，并且其中压阻层连接到位于传感器上的惠斯通电桥。传感器将放置在TBM设备中，用于进行原位TEM原子力显微镜。

5. 发明申请

WO2005069748A2 MEMS NANOINDENTER 审中-公开
公开(公告)号：WO2005069748A2
公开(公告)日：2005-08-04
申请号：PCT/SE2005/000098
申请日：2005-01-26
申请人： NANOFACTORY INSTRUMENTS AB , ENOKSSON, Peter , NAFARI, Alexandra , OLIN, Håkan , ALTHOFF, Fredrik , DANILOV, Andrey , DAHLSTRÖM, Jens
发明人： ENOKSSON, Peter , NAFARI, Alexandra , OLIN, Håkan , ALTHOFF, Fredrik , DANILOV, Andrey , DAHLSTRÖM, Jens
IPC分类号： B81B3/00 , G01L20060101 , G01L1/00 , G01L1/14 , G01L7/10 , H01J37/26
CPC分类号： G01Q60/366 , G01Q30/02 , G01Q80/00 , H01J2237/2067 , Y10T156/10
摘要： A force sensor (200) and nanoindenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane (207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).
摘要翻译：使用这种力传感器（200）的力传感器（200）和纳米凝视系统（300），其中力传感器（200）包括附接到固定体结构（210）的可移动膜（207）），其具有形成在所述膜（207）和本体结构（210）之间的弹簧（201,202,203,204）; 弹簧（201,202,203,204）可以在矩形薄膜（207）的每一侧上设置两个并且每个都呈U形，其中形成有垂直于每个U的每个开口端形成的移位元件（801）形弹簧（800）。力传感器还包括用于检测可动膜（207）和电极（206）之间的电容变化的电极（206），以便测量相对于施加的力的运动。膜（207）还包括用于提供用于可互换探针（211）的溶液的探针保持结构（214）。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式