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1. 发明申请

WO2009037360A2 NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY 审中-公开
标题翻译：用于MASKLESS LITHOGRAPHY的新型单晶硅微型电镜
公开(公告)号：WO2009037360A2
公开(公告)日：2009-03-26
申请号：PCT/EP2008/062641
申请日：2008-09-22
申请人： MICRONIC LASER SYSTEMS AB , BRING, Martin , ENOKSSON, Peter
发明人： BRING, Martin , ENOKSSON, Peter
IPC分类号： B81C1/00
CPC分类号： B81C1/00174 , B81B2201/042 , G02B26/0841
摘要： A novel silicon micromirror structure for improving image fidelity in laser pattern generators is presented. In some embodiments, the micromirror is formed from monocrystalline silicon. Analytical- and finite element analysis of the structure as well as an outline of a fabrication scheme to realize the structure are given. The spring constant of the micromirror structure can be designed independently of the stiffness of the mirror-surface. This makes it possible to design a mirror with very good planarity, resistance to sagging during actuation, and it reduces influence from stress in reflectivity-increasing multilayer coatings.
摘要翻译：提出了一种用于提高激光图案发生器图像保真度的新型硅微镜结构。在一些实施例中，微镜由单晶硅形成。给出了结构的分析和有限元分析以及实现结构的制造方案的概要。微镜结构的弹簧常数可以独立于镜面的刚度来设计。这使得可以设计具有非常好的平面性，在致动期间的下垂阻力的反射镜，并且其减小了增加反射率的多层涂层中的应力的影响。

2. 发明申请

WO2006114127A1 MEMS DEVICE WITH MUTUALLY PERPENDICULAR DEFLECTABLE REFLECTIVE AND ELECTRODE SURFACES 审中-公开
标题翻译：具有不可预测的反射和电极表面的MEMS器件
公开(公告)号：WO2006114127A1
公开(公告)日：2006-11-02
申请号：PCT/EP2005/010500
申请日：2005-09-28
申请人： MICRONIC LASER SYSTEMS AB , LJUNGBLAD, Ulric , ENOKSSON, Peter , BRING, Martin
发明人： LJUNGBLAD, Ulric , ENOKSSON, Peter , BRING, Martin
IPC分类号： G02B26/08
CPC分类号： G02B26/0841
摘要： The present invention relates to a MEMS device including at least one pixel element (132); said pixel element (132) including, a support structure (134), at least one deflectable reflective surface (135) supported by said support structure (134), at least one deflectable electrode surface (146, 148), which electrode surface (146, 148) is essentially perpendicular to said deflectable reflective surface (135), said electrode surface (146, 148) is electrostatically attractable by a standing bar (160, 170) arranged in between pixel elements (132), wherein said standing bar is attracting a greater portion of said electrode surface (146, 148) on a first side of the tilting axis of said pixel element (132) compared to a second side of the tilting axis of said pixel element (132).The invention also relates to a method for operating a MEMS device.
摘要翻译：本发明涉及一种包括至少一个像素元件（132）的MEMS器件; 所述像素元件（132）包括支撑结构（134），由所述支撑结构（134）支撑的至少一个可偏转反射表面（135），至少一个可偏转电极表面（146,148），所述电极表面，148）基本上垂直于所述可偏转反射表面（135），所述电极表面（146,148）通过布置在像素元件（132）之间的立杆（160,170）静电吸引，其中所述立杆吸引与所述像素元件（132）的倾斜轴的第二侧相比，在所述像素元件（132）的倾斜轴线的第一侧上的所述电极表面（146,148）的较大部分。本发明还涉及用于操作MEMS器件的方法。

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