专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2004030084A3 METHOD FOR QUANTIFYING UNIFORMITY PATTERNS AND INCLUSION OF EXPERT KNOWLEDGE FOR TOOL DEVELOPMENT AND CONTROL 审中-公开
标题翻译：量化均匀性模式的方法和包含专家知识的工具开发和控制
公开(公告)号：WO2004030084A3
公开(公告)日：2004-06-24
申请号：PCT/US0330610
申请日：2003-09-24
申请人： LAM RES CORP , BAILEY ANDREW D III , YADAV PUNEET , MISRA PRATIK
发明人： BAILEY ANDREW D III , YADAV PUNEET , MISRA PRATIK
IPC分类号： H01L21/66
CPC分类号： H01L22/20
摘要： A system and method of for determining multiple uniformity metrics of a semiconductor wafer manufacturing process includes collecting a quantity across each one of a group of semiconductor wafers. The collected quantity data is scaled and a principal component analysis (PCA) is performed on the collected, scaled quantity data to produce a first set of metrics for the first group of semiconductor wafers. The first set of metrics including a first loads matrix and a first scores matrix.
摘要翻译：用于确定半导体晶片制造工艺的多个均匀性度量的系统和方法包括收集跨越一组半导体晶片中的每一个的数量。收集的数量数据被缩放并且对收集的缩放量数据执行主成分分析（PCA）以产生用于第一组半导体晶片的第一组度量。第一组度量包括第一加载矩阵和第一分数矩阵。

2. 发明申请

WO2006036893B1 COMPUTER-IMPLEMENTED DATA PRESENTATION TECHNIQUES FOR A PLASMA PROCESSING SYSTEM 审中-公开
标题翻译：计算机实现的等离子体处理系统数据表示技术
公开(公告)号：WO2006036893B1
公开(公告)日：2006-06-01
申请号：PCT/US2005034427
申请日：2005-09-23
申请人： LAM RES CORP , BAILEY ANDREW D III , YADAV PUNEET
发明人： BAILEY ANDREW D III , YADAV PUNEET
IPC分类号： G06F11/30 , G06F15/00 , G21C17/00
CPC分类号： H01J37/32935
摘要： A computer-implemented data presentation technique for presenting a set of expected failure states of system-related constructs pertaining to a plasma processing system is disclosed. The technique includes receiving a set of indicia pertaining to a first system-related construct of said system-related constructs. The technique also includes computing, in accordance with a first sub-method and responsive to said receiving said first set of indicia, a first expected failure state value. The technique further includes computing a first normalized expected failure state value in accordance with a first weight; correlating said first normalized expected failure state value to a first color; and displaying said first color in a cell of an n-dimensional matrix, wherein n is a number greater than 2.
摘要翻译：公开了用于呈现与等离子体处理系统有关的系统相关构造的一组预期故障状态的计算机实现的数据呈现技术。该技术包括接收与所述系统相关构造的第一系统相关构造有关的一组标记。该技术还包括根据第一子方法并响应于所述接收所述第一组标记来计算第一预期故障状态值。该技术还包括根据第一权重计算第一标准化预期故障状态值; 将所述第一标准化预期故障状态值与第一颜色相关联; 以及在n维矩阵的单元中显示所述第一颜色，其中n是大于2的数。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式