专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2009078923A3 FILM ADHESIVE FOR SEMICONDUCTOR VACUUM PROCESSING APPARATUS 审中-公开
标题翻译：用于半导体真空处理设备的胶膜粘合剂
公开(公告)号：WO2009078923A3
公开(公告)日：2009-09-17
申请号：PCT/US2008013466
申请日：2008-12-18
申请人： LAM RES CORP , LARSON DEAN JAY , STEVENSON TOM , WANG VICTOR
发明人： LARSON DEAN JAY , STEVENSON TOM , WANG VICTOR
IPC分类号： H01L21/3065 , H01L21/205
CPC分类号： H01L21/67069 , B32B37/12 , H01L21/67103 , H01L21/68757 , Y10T156/10 , Y10T156/1062 , Y10T428/31504
摘要： A bonded assembly to reduce particle contamination in a semiconductor vacuum chamber such as a plasma processing apparatus is provided, including an elastomeric sheet adhesive bond between mating surfaces of a component and a support member to accommodate thermal stresses. The elastomeric sheet comprises a silicone adhesive to withstand a high shear strain of =800% at a temperature range between room temperature and 300°C such as heat curable high molecular weight dimethyl silicone with optional fillers. The sheet form has bond thickness control for parallelism of bonded surfaces. The sheet adhesive may be cut into pre-form shapes to conform to regularly or irregularly shaped features, maximize surface contact area with mating parts, and can be installed into cavities. Installation can be manually, manually with installation tooling, or with automated machinery. Composite layers of sheet adhesive having different physical properties can be laminated or coplanar.
摘要翻译：提供了一种用于减少诸如等离子体处理装置的半导体真空室中的颗粒污染的粘合组件，包括在部件的配合表面和支撑构件之间的弹性片粘合剂粘合以适应热应力。弹性体片材包括硅氧烷粘合剂，以在室温和300℃之间的温度范围内承受= 800％的高剪切应变，例如可热固化的高分子量二甲基硅氧烷和任选的填料。片材形式具有用于粘结表面平行度的粘结厚度控制。片状粘合剂可以被切割成预成型形状以符合规则或不规则形状的特征，使与配合部件的表面接触面积最大化，并且可以安装到空腔中。安装可以手动，手动安装工具或自动化机械。具有不同物理性质的片状粘合剂的复合层可以层压或共面。

2. 发明申请

WO0079571A3 VACUUM COMPLIANT DOOR HINGE 审中-公开
标题翻译：真空合成门铰链
公开(公告)号：WO0079571A3
公开(公告)日：2001-12-20
申请号：PCT/US0014735
申请日：2000-05-30
申请人： LAM RES CORP
发明人： LARSON DEAN JAY , SUTTON THOMAS R
IPC分类号： H01L21/677 , E05D3/02 , E05D11/08 , H01L21/00
CPC分类号： H01L21/67126 , E05D3/022 , E05D11/084 , E05Y2900/60 , Y10T16/53834 , Y10T16/53885 , Y10T16/5402
摘要： A hinge assembly and methods for mounting a hatch relative to a port defined in a cover of a vacuum chamber to close and open the port. A torsion rod mounted between the port and the hatch is in torsion when the hatch is in a closed position relative to the port, assisting port-opening motion. A sleeve surrounds the rod and is movable with the hatch. Friction hinge structures between the cover and the sleeve, and between the hatch and a second sleeve are in a friction-engaging relationship with the corresponding sleeve. Each friction hinge structure provides high resistance to relative motion between a friction spring and the corresponding sleeve. During the port-opening motion of the hatch the friction springs provide low resistance to such relative motion. The hinge structures provide tolerance resistance and vacuum compliance by allowing relative movement between a hinge mounting plate and the hatch. During vacuum pumping, the hinges allow the hatch to move from an O-ring pre-load position, to an intermediate position, and then to a final position so that the pre-loaded O-ring compresses to an operational O-ring compression. Since the hinges permit the O-ring pre-load position to exist prior to vacuum operation and under all variations of certain manufacturing tolerances, the full range of relative motion between the plate and the hatch is permitted, such that the sealing surfaces seal in a tolerance resistance and vacuum compliant manner.
摘要翻译：铰链组件以及用于相对于限定在真空室的盖中的端口安装舱口以闭合和打开端口的方法。当舱口处于相对于端口的关闭位置时，安装在端口和舱口之间的扭杆处于扭转状态，有助于开启开启运动。套筒环绕杆，可以用舱口移动。盖和套筒之间以及舱口与第二套筒之间的摩擦铰链结构与相应的套筒处于摩擦接合关系。每个摩擦铰链结构为摩擦弹簧和相应的套筒之间的相对运动提供了很高的阻力。在舱口开口运动期间，摩擦弹簧对这种相对运动提供较低的阻力。铰链结构通过允许铰链安装板和舱口之间的相对运动来提供公差阻力和真空顺从性。在真空泵送期间，铰链允许舱口从O形环预载位置移动到中间位置，然后到最终位置，使得预加载的O形环压缩到可操作的O形环压缩。由于铰链允许在真空操作之前和在某些制造公差的所有变化下存在O形环预加载位置，所以允许板和舱口之间的相对运动的全范围，使得密封表面密封在耐公差和真空兼容的方式。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式