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    • 1. 发明申请
    • METHOD AND APPARATUS FOR APPLYING A SHEET TO A SUBSTRATE
    • 将片材施用于基材的方法和设备
    • WO2008068701A2
    • 2008-06-12
    • PCT/IB2007/054888
    • 2007-12-03
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • B05D1/28
    • B05D1/28B05C1/027B82Y10/00B82Y40/00G03F7/0002
    • The invention provides a method and apparatus for laminating a sheet to a substrate in a stress free and distortion-less manner. The method comprises providing the sheet and substrate such that an attractive force between them exists that is capable of bringing the sheet and surface together at least when their distance is shorter than a critical distance. The method creates these conditions by locally making an initial contact between the sheet and substrate such that at a contact front, being the boundary between areas where the substrate and sheet are in contact and those where they are not in contact, these conditions exist. In a further step the sheet and substrate are allowed to gradually make contact such that the contact front advances along either of the substrate or sheet surface therewith increasing the contacting area between the substrate and the sheet. The method is advantages when used during imprint lithography or embossing processes or other processes where feature patterns need to be transferred from the substrate to the surface or vice versa.
    • 本发明提供了一种以无应力和无变形的方式将薄片层压到衬底上的方法和设备。 该方法包括提供片材和基材,使得它们之间存在吸引力,其至少在它们的距离短于临界距离时能够将片材和表面结合在一起。 该方法通过在片材和基材之间局部地进行初始接触而产生这些条件,使得在接触前方,作为基材和片材接触的区域与它们不接触的区域之间的边界,存在这些条件。 在进一步的步骤中,允许片材和基材逐渐接触,使得接触前沿沿着基材或片材表面中的任一个前进,由此增加基材和片材之间的接触面积。 该方法在压印平版印刷或压印过程或其他特征图案需要从基片转印到表面或反过来的过程中使用时是有利的。
    • 2. 发明申请
    • METHOD AND SYSTEM FOR CONTACTING OF A FLEXIBLE SHEET AND A SUBSTRATE
    • 用于接触柔性片和基片的方法和系统
    • WO2008087573A2
    • 2008-07-24
    • PCT/IB2008/050093
    • 2008-01-11
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • VERSCHUUREN, Marcus, A.MEGENS, Mischa
    • G03F7/0002B05D1/28B82Y10/00B82Y40/00Y10S438/973Y10S438/976
    • The invention relates to a method for contacting a flexible sheet to a first element with improved lateral alignment. The method includes a step of measuring a first lateral misalignment after establishing a first contact between the flexible sheet and either of the first element and a sheet parking surface called anchor in the first stage. If the 5 misalignment exceeds a predetermined threshold the flexible sheet is parked at the anchor such that it is not in contact with the first element, and the relative position of the first element and the anchor is altered during the second stage for correcting the mismatch during a contact between the flexible sheet and the first element to be established within the next step of the method. During the steps of shifting the contact point to obtain the second stage 10 the contacting process is more accurate and reproducible than the process for establishing the init ial contact. The invention also relates to an apparatus for executing the method, and the use of the method and apparatus for the manufacture of devices.
    • 本发明涉及一种使柔性片与第一元件接触的方法,该方法具有改进的横向对准。 该方法包括在第一阶段中建立柔性片与第一元件中的任一个和称为锚的片材停车面之间的第一接触之后,测量第一侧向偏移的步骤。 如果5个未对准超过预定阈值,则柔性片材停放在锚固件处,使得其不与第一元件接触,并且在第二阶段期间改变第一元件和锚的相对位置以纠正不匹配 在该方法的下一步骤中在柔性片和要建立的第一元件之间的接触。 在移动接触点以获得第二阶段10的步骤期间,接触过程比建立初始接触的过程更准确和可重现。 本发明还涉及一种用于执行该方法的装置,以及用于制造装置的方法和装置的使用。