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    • 1. 发明申请
    • METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
    • 制造半导体器件的方法
    • WO2004077498A2
    • 2004-09-10
    • PCT/IB2004/050113
    • 2004-02-13
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.VAN DUUREN, Michiel, J.VAN SCHAIJK, Robertus, T., F.PONOMAREV, YouriHOOKER, Jacob, C.
    • VAN DUUREN, Michiel, J.VAN SCHAIJK, Robertus, T., F.PONOMAREV, YouriHOOKER, Jacob, C.
    • H01L
    • H01L27/11521H01L21/28273H01L27/115H01L29/42328H01L29/66825
    • In the method for manufacturing a semiconductor device (100), which comprises a semiconducting body (1) having a surface (2) with a source region (3) and a drain region (4) defining a channel direction (102) and a channel region (101), a first stack (6) of layers on top of the channel region (101), the first stack (6) comprising, in this order, a tunnel dielectric layer (11), a charge storage layer (10) for storing an electric charge and a control gate layer (9), and a second stack (7) of layers on top of the channel region (101) directly adjacent to the first stack (6) in the channel direction (102), the second stack (7) comprising an access gate layer (14) electrically insulated from the semiconducting body (1) and from the first stack (6), initially a first sacrificial layer (90) is used, which is later replaced by the control gate layer (9). A second sacrificial layer (20) is used to protect the part (82) off the surface (2) adjacent to the second sidewall (81) and opposite to the position (83) of the second stack (7) when providing the access gate layer (14).
    • 在制造半导体器件(100)的方法中,其包括具有源极区(3)的表面(2)和限定沟道方向(102)的漏极区(4)的半导体(1)和通道 区域(101),在沟道区域(101)的顶部上的第一层叠层(6),第一堆叠(6)依次包括隧道介电层(11),电荷存储层(10) 用于在通道方向(102)上直接与第一堆叠(6)相邻的通道区域(101)的顶部上存储电荷和控制栅极层(9)以及第二堆叠(7), 第二堆叠(7)包括与半导电体(1)和第一堆叠(6)电绝缘的存取栅极层(14),最初使用第一牺牲层(90),其随后由控制栅极 层(9)。 当提供接入门(20)时,第二牺牲层(20)用于保护邻近第二侧壁(81)的表面(2)并且与第二堆叠(7)的位置(83)相对的部分(82) 层(14)。
    • 5. 发明申请
    • PLANAR DUAL GATE SEMICONDUCTOR DEVICE
    • 平面双栅半导体器件
    • WO2005117132A1
    • 2005-12-08
    • PCT/IB2005/051681
    • 2005-05-24
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.LOO, JosinePONOMAREV, Youri
    • LOO, JosinePONOMAREV, Youri
    • H01L29/786
    • H01L29/42384H01L29/665H01L29/66553H01L29/66613H01L29/66621H01L29/66772H01L29/78648
    • A method of fabricating a dual-gate semiconductor device is provided in which silicidation of the source and drain contact regions (34, 36) is carried out after the first gate (12) is formed on part of a first surface (14) of a silicon body (16) but before forming a second gate (52) on a second surface (44) of the silicon body which is opposite the first surface. The first gate (12) serves as a mask to ensure that the silicided source and drain contact regions are aligned with the silicon channel (18). Moreover, by carrying out the silicidation at an early stage in the fabrication, the choice of material for the second gate is not limited by any high-temperature processes. Advantageously, the difference in material properties at the second surface of the silicon body resulting from silicidation enables the second gate to be aligned laterally between the silicide source and drain contact regions.
    • 提供一种制造双栅极半导体器件的方法,其中在第一栅极(12)形成在第一栅极(12)的第一表面(14)的一部分上之后,进行源极和漏极接触区域(34,36)的硅化, 硅体(16)之前,但是在与第一表面相对的硅体的第二表面(44)上形成第二栅极(52)之前。 第一栅极(12)用作掩模以确保硅化源极和漏极接触区域与硅沟道(18)对准。 此外,通过在制造的早期进行硅化,第二栅极的材料的选择不受任何高温工艺的限制。 有利的是,由硅化产生的硅体第二表面的材料特性的差异使得第二栅极能够在硅化物源极和漏极接触区域之间横向排列。
    • 10. 发明申请
    • SEMICONDUCTOR DEVICE HAVING SUBSTRATE COMPRISING LAYER WITH DIFFERENT THICKNESSES AND METHOD OF MANUFACTURING THE SAME
    • 具有包含不同厚度的层的基板的半导体器件及其制造方法
    • WO2006038164A1
    • 2006-04-13
    • PCT/IB2005/053215
    • 2005-09-29
    • KONINKLIJKE PHILIPS ELECTRONICS N.V.PONOMAREV, Youri
    • PONOMAREV, Youri
    • H01L29/786H01L21/336H01L29/06H01L27/12H01L21/84
    • H01L29/0684H01L21/26533H01L21/266H01L21/84H01L27/1203H01L27/1255H01L29/66772H01L29/78603H01L29/78645H01L29/78657H01L29/78696
    • This invention relates to a semiconductor device and a method of manufacturing this device. An embodiment of the semiconductor device (100) according to the invention comprises a semiconductor body (102) with a surface (107), the semiconductor body (102) further comprising an active part (130) positioned at the surface (107), a substrate part (210) and an insulating layer (220) located between the active part (130) and the substrate part (210). The active part (130) comprises three parts (A1,A2,A3), each part having a thickness (Tl,T2,T3), the thickness (TI,T2,T3) being measured at right angles to the surface (107), and the thickness within each area (A1,A2,A3) being substantially uniform. In each area (A1,A2,A3) a transistor (Nl,N2,N3) is present. Each transistor (N1,N2,N3) comprises a source (Sl,S2,S3), a drain (Dl,D2,D3) and a channel region which extends between the source (Sl,S2,S3) and the drain (Dl,D2,D3), wherein the source (S1,S2,S3), the drain (D,D2,D3) and the channel region (CH1,CH2,CH3) are located under the surface (107) of the semiconductor body (102). Each transistor (N1,N2,N3) further comprises a gate (G1,G2,G3) located above the surface (107) of the semiconductor body (102).
    • 本发明涉及一种半导体器件及其制造方法。 根据本发明的半导体器件(100)的实施例包括具有表面(107)的半导体本体(102),所述半导体本体(102)还包括位于所述表面(107)处的有源部分(130), 衬底部分(210)和位于有源部分(130)和衬底部分(210)之间的绝缘层(220)。 活动部分(130)包括三个部分(A1,A2,A3),每个部分具有厚度(T1,T2,T3),与表面(107)成直角测量的厚度(TI,T2,T3) ,并且每个区域(A1,A2,A3)内的厚度基本上均匀。 在每个区域(A1,A2,A3)中存在晶体管(N1,N2,N3)。 每个晶体管(N1,N2,N3)包括源(S1,S2,S3),漏极(D1,D2,D3)和在源极(S1,S2,S3)和漏极(D1)之间延伸的沟道区 ,D2,D3),其中源(S1,S2,S3),漏极(D,D2,D3)和沟道区(CH1,CH2,CH3)位于半导体主体的表面(107) 102)。 每个晶体管(N1,N2,N3)还包括位于半导体本体(102)的表面(107)上方的栅极(G1,G2,G3)。