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2. 发明申请

WO0019187A2 APPARATUS FOR X-RAY ANALYSIS IN GRAZING EXIT CONDITIONS 审中-公开
标题翻译：装备退火条件下的X射线分析
公开(公告)号：WO0019187A2
公开(公告)日：2000-04-06
申请号：PCT/EP9906645
申请日：1999-09-08
申请人： KONINKL PHILIPS ELECTRONICS NV
发明人： DEN HARTOG SANDER G , DE BOKX PIETER K
IPC分类号： G01N23/223 , G01N23/04 , G01N23/201 , G01N23/207 , G01N23/225 , G21K1/06 , H01L21/66 , G01N23/00
CPC分类号： G01N23/046 , G01N2223/419
摘要： In order to achieve suitable positional resolution for an angular scan in Grazing Exit X-ray Fluorescence (GEXRF), the sample (2) should be irradiated with a small spot (14). Consequently, the fluorescent radiation yield is low so that the duration of a measurement is comparatively long. In order to mitigate this drawback, the invention proposes the use of an analyzing X-ray mirror (16) having a line focus (22) extending perpendicularly to the sample surface (4). The line focus (22) coincides with a line-shaped PSD (24), so that every position on the PSD corresponds to a given height on the mirror, which height itself corresponds to a given take-off angle of the fluorescent radiation relative to the sample surface. Excellent positional resolution and an attractive fluorescent radiation yield are obtained by irradiating the sample by means of a focused electron beam.
摘要翻译：为了在放牧出口X射线荧光（GEXRF）中实现角度扫描的适当位置分辨率，样品（2）应用小斑点（14）照射。因此，荧光辐射产量低，使得测量的持续时间相对较长。为了减轻这种缺点，本发明提出了使用具有垂直于样品表面（4）延伸的线对焦（22）的分析X射线镜（16）。线对焦（22）与线形PSD（24）重合，使得PSD上的每个位置对应于反射镜上的给定高度，该高度本身对应于相对于荧光辐射的给定起飞角度样品表面。通过聚焦电子束照射样品，获得优异的位置分辨率和有吸引力的荧光辐射产率。

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