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1. 发明申请

WO2014186768A1 METROLOGY SYSTEM CALIBRATION REFINEMENT 审中-公开
标题翻译：计量系统校准精炼
公开(公告)号：WO2014186768A1
公开(公告)日：2014-11-20
申请号：PCT/US2014/038495
申请日：2014-05-16
申请人： KLA-TENCOR CORPORATION
发明人： KWAK, Hidong , LESOINE, John , SADIQ, Malik , WEI, Lanhua , KRISHNAN, Shankar , POSLAVSKY, Leonid , SUSHCHIK, Mikhail
IPC分类号： H01L21/66
CPC分类号： G01N21/211 , G01B2210/56 , G01N21/274 , G01N21/9501 , G01N2021/213
摘要： Methods and systems for matching measurement spectra across one or more optical metrology systems are presented. The values of one or more system parameters used to determine the spectral response of a specimen to a measurement performed by a target metrology system are optimized. The system parameter values are optimized such that differences between measurement spectra generated by a reference system and the target system are minimized for measurements of the same metrology targets. Methods and systems for matching spectral errors across one or more optical metrology systems are also presented. A trusted metrology system measures the value of at least one specimen parameter to minimize model errors introduced by differing measurement conditions present at the time of measurement by the reference and target metrology systems. Methods and systems for parameter optimization based on low-order response surfaces are presented to reduce the compute time required to refine system calibration parameters.
摘要翻译：提出了用于匹配一个或多个光学测量系统的测量光谱的方法和系统。用于确定样本对目标计量系统执行的测量的光谱响应的一个或多个系统参数的值被优化。对系统参数值进行优化，使得由参考系统生成的测量光谱与目标系统之间的差异最小化，以测量相同的度量目标。还提出了用于在一个或多个光学测量系统上匹配光谱误差的方法和系统。可靠的计量系统测量至少一个样本参数的值，以最小化由参考和目标计量系统测量时存在的不同测量条件引入的模型误差。提出了基于低阶响应面的参数优化方法和系统，以减少改进系统校准参数所需的计算时间。

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