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    • 5. 发明申请
    • METHOD OF FORMING NON-VOLATILE MEMORY CELL USING SACRIFICIAL PILLAR SPACERS AND NON-VOLATILE MEMORY CELL FORMED ACCORDING TO THE METHOD
    • 根据方法形成非挥发性记忆细胞的非挥发性记忆细胞的形成方法
    • WO2007059239A1
    • 2007-05-24
    • PCT/US2006/044397
    • 2006-11-14
    • INTEL CORPORATIONSOSS, Steven, R.PARAT, Krishna
    • SOSS, Steven, R.PARAT, Krishna
    • H01L21/336H01L29/788H01L21/28H01L29/423H01L21/762H01L21/8247
    • H01L21/28273H01L27/11521H01L29/66825H01L29/7881
    • A method of forming a icroelectronic non-volatile memory cell (200) , a memory-cell formed according to the method, and a system including the memory cell. The method comprises: providing a substrate (206) , providing a pair of spaced apart isolation bodies (201) on the substrate, the isolation bodies including respective raised isolation portions (222) , providing the pair comprising providing a buffer layer (221) on the substrate; providing pillar spacers (224) on side walls of the raised isolation portions; removing the buffer layer after providing the pillar spacers; removing the pillar spacers during removing the buffer layer; providing a tunnel dielectric (204) on the surface of the substrate after removing the buffer layer; providing a floating gate (202) on the tunnel dielectric; a reducing a height of the isolation bodies to yield corresponding isolation regions; providing source and drain regions on opposite sides of the floating gate,- providing an interpoly dielectric (208) on the floating gate; and providing a control gate (210) on the interpoly dielectric to yield the memory cell.
    • 一种形成微电子非易失性存储单元(200)的方法,根据该方法形成的存储单元和包括存储单元的系统。 该方法包括:提供衬底(206),在衬底上提供一对间隔开的隔离体(201),所述隔离体包括相应的凸起隔离部分(222),提供该对包括提供缓冲层 基材; 在凸起的隔离部分的侧壁上设置支柱间隔物(224); 在提供柱间隔物之后去除缓冲层; 在移除缓冲层期间移除柱状间隔物; 在去除所述缓冲层之后,在所述衬底的表面上提供隧道电介质(204); 在所述隧道电介质上提供浮动栅极(202); 降低隔离体的高度以产生相应的隔离区域; 在所述浮动栅极的相对侧上提供源极和漏极区域; - 在所述浮动栅极上提供互补电介质(208); 以及在所述互聚电介质上提供控制栅极(210)以产生所述存储器单元。