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1. 发明申请

WO2009012605A2 METHOD FOR CALIBRATING AND OPERATING A MEASURING CELL ARRANGEMENT 审中-公开
标题翻译：方法校准和用于操作测量单元安排
公开(公告)号：WO2009012605A2
公开(公告)日：2009-01-29
申请号：PCT/CH2008000256
申请日：2008-06-09
申请人： INFICON GMBH , BERG CHRISTIAN , STRIETZEL CARSTEN
发明人： BERG CHRISTIAN , STRIETZEL CARSTEN
IPC分类号： G01L27/00 , G01L21/00
CPC分类号： G01L27/005 , G01L21/00
摘要： The following method sequence is proposed for calibrating a vacuum measuring cell arrangement: a) the measuring cell arrangement (1) is connected to a calibrating device (10), with the measuring connection (5) being connected to a vacuum volume (58) and the measuring cell interface (8) being connected to a calibrating sequence controller (11) by means of a signal line (20); b) a first heating temperature in the measuring cell arrangement is set to a predefined constant value; c) a first step for calibrating the measuring cell arrangement (1) is carried out by generating at least one predefined pressure in the vacuum volume (58) while simultaneously detecting the vacuum signals from the measuring cell arrangement (1) and at least one reference measuring cell (6), and the pressure values detected are stored in a calibrating data memory (13); d) a calibrating processor (14) is used to determine compensation values from the determined differential values of the measuring cell arrangement (1) and the reference measuring cell (6), and these differential values are buffered in a calibrating data memory (13) of the calibrating sequence controller (11); e) the measuring cell arrangement (1) is adjusted by transmitting the determined compensation values to the measuring cell data memory (6) for the differing values for pressures and temperature, which are determined at the different predefined operating points, with respect to the reference measuring cell (60).
摘要翻译：为了校准，一个真空测量电池装置，提出了以下的方法萨伯运行：a）具有一个校准装置（10），连接所述测量（5）连接到一个真空容积（58测量单元阵列（1）的连接）和连接测量单元接口（8），通过信号线（20）一个Kalibrierablaufsteuerung（11）; b）中设置在测量单元阵列到预定的恒定值的第1加热温度; c）进行通过产生在真空容积（58同时检测Vakuummessignale的测量单元阵列（1）和至少一个参考测量单元（6），以及所检测到的压力值的存储（在校准数据存储器中的至少一个预定的压力）测量电池装置（1）的第一校准步骤 13）中，d）确定与从测量单元阵列（1）和参考测量单元（6），以及存储在Kalibrierablaufsteuerung的校准数据存储器（13）（11）这个差值的所确定的差值校准处理器（14）的补偿值。 e）通过将来自所述测量单元的数据存储器（6），用于在对所述参考测量单元（60）的压力和温度相对于不同值的不同的预定工作点所确定的确定的补偿值调节所述测量池装置（1）。

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