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    • 1. 发明申请
    • LASER-BASED MODIFICATION OF TRANSPARENT MATERIALS
    • 基于激光的透明材料改性
    • WO2015108991A3
    • 2015-10-15
    • PCT/US2015011420
    • 2015-01-14
    • IMRA AMERICA INC
    • OTA MICHIHARUARAI ALAN YLIU ZHENLIN
    • B23K26/36B23K26/06B23K26/08B23K26/38B23K26/40
    • B23K26/0624B23K26/0604B23K26/082B23K26/36B23K26/364B23K26/38B23K26/382B23K26/40B23K26/402B23K2203/50B23K2203/54C03B33/102
    • In certain embodiments a method and system for laser-based material processing of a material is disclosed. In at least one preferred implementation temporally overlapping pulse series are generated with separate pulsed laser sources, for example nanosecond (NS) and ultrashort pulse (USP) sources (NS-USP). Pulses are delivered to the material as a series of spatially and temporally overlapping pulse pairs. The material can, but need not, be a transparent material. In some applications of transparent material processing, it was found the combination of pulses both substantially more material modification and high machining quality than obtainable with either individual pulse series taken alone. Other micromachining methods and arrangement are disclosed for formation of fine features on or within a substrate. Such methods and arrangements may generally be applied with a NS-USP combination, or with other sources.
    • 在某些实施例中,公开了用于材料的基于激光的材料处理的方法和系统。 在至少一个优选实施方式中,利用分离的脉冲激光源,例如纳秒(NS)和超短脉冲(USP)源(NS-USP)产生时间重叠的脉冲序列。 脉冲作为一系列空间和时间重叠的脉冲对被传送到材料。 材料可以但不必是透明材料。 在透明材料加工的一些应用中,发现脉冲组合可以实现更多的材料修改和高的加工质量,而不是单独采用单个脉冲序列可获得的。 公开了其他微加工方法和装置,用于在衬底上或衬底内形成精细特征。 这些方法和装置通常可以与NS-USP组合或与其他来源一起应用。