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1. 发明申请

WO0190761A3 METHODS OF SAMPLING SPECIMENS FOR MICROANALYSIS 审中-公开
标题翻译：采样样品微量分析方法
公开(公告)号：WO0190761A3
公开(公告)日：2002-05-30
申请号：PCT/US0116185
申请日：2001-05-18
申请人： IMAGO SCIENT INSTR , KELLY THOMAS F , MARTENS RICHARD L , GOODMAN STEVEN L
发明人： KELLY THOMAS F , MARTENS RICHARD L , GOODMAN STEVEN L
IPC分类号： B81B1/00 , B81C1/00 , G01N1/32 , G01Q30/20 , G01Q60/26 , G01Q60/28 , G01Q70/00 , G12B21/00
CPC分类号： G01N1/32 , Y10T436/25
摘要： Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process. The study specimen may have study regions formed thereon which are particularly suitable for study by atom probes, e.g., regions bearing raised protrusions, at virtually any point during the process, thereby greatly enhancing the speed and efficiency of specimen preparation.
摘要翻译：用于微量分析的样品取样方法，特别是通过原子探针显微镜进行微量分析的方法包括在第一研究对象中（如通过使用聚焦离子束研磨）形成研究样品的步骤; 从研究对象中取出研究标本; 将研究样本置于第二个研究对象上; 并微观分析研究样本。如果第一研究对象对于研究特别感兴趣，则研究样本可以从第一研究对象的功能部分获取，使得微量分析将提供关于该功能部分的信息。在第二研究对象特别感兴趣的研究中，第二研究对象可以在研究样本位于其上之后进行制造过程（例如，材料层的沉积），使得研究样本将提供关于制造过程。研究样本可以具有在其上形成的研究区域，其特别适合于在原子探针（例如，具有凸起突起的区域）的研究中，在该过程中的几乎任何点，从而大大提高了样品制备的速度和效率。

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