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1. 发明申请

WO2011141024A3 GENERATION OF SHORT-WAVE ULTRASHORT LIGHT PULSES AND USE THEREOF 审中-公开
标题翻译：生产短波超短光脉冲及其用途
公开(公告)号：WO2011141024A3
公开(公告)日：2012-04-19
申请号：PCT/DE2011075111
申请日：2011-05-16
申请人： HELMHOLTZ ZENTRUM DRESDEN , DEBUS ALEXANDER , BUSSMANN MICHAEL
发明人： DEBUS ALEXANDER , BUSSMANN MICHAEL
IPC分类号： H01S3/09 , H01S3/094 , H01S3/102 , H01S4/00 , H05G2/00
CPC分类号： G02B27/44 , G02B27/00 , G02B27/4233 , H01S3/0057 , H01S3/0903 , H01S3/094 , H01S3/1024 , H01S4/00 , H05G2/00
摘要： The invention relates to an arrangement for generating extremely ultrashort and short-wave light pulses with the aid of the traveling-wave Thomson scattering process, wherein dispersive elements are arranged between an electron, particle, or radiation source, which is synchronized with a laser system, and an optical element that focuses in a direction, and to the use of said arrangement to superpose a pulse-front tilted light pulse of high power with an ultrashort pulse of relativistic electrons in a laser-line focus. By varying the laser pulse-front tilt, narrow-band radiation pulses in a wide wavelength range from EUV to X-ray wavelengths and having a high number of protons are obtained, and the bandwidth and coherence properties can also be modified. Said arrangement can be used, among other things, in EUV lithography, in the planning and optimal design of laser systems and electron sources, in material analysis by means of phase contrast imaging, and in superconductor research. The proposed arrangement can be produced to be smaller and cheaper than current comparable arrangements.
摘要翻译：本发明涉及一种装置，用于由所述行波汤姆逊散射方法来产生极端超短和短波光脉冲，所述电子束，颗粒或辐射源，其与激光系统同步之间色散元件，并且在一个方向上的光学元件的聚焦被布置，以及用于叠加pulsfrontverkippten光脉冲的高功率与线聚焦的超短脉冲激光的相对论电子使用这种布置。通过改变Laserpulsfrontverkippung得到高光子数的窄带辐射脉冲在宽波长范围内的EUV到X波长和还可以调节带宽和相干特性。这样的安排可以ü。一。在EUV光刻技术中，规划和最佳激光系统和电子源的设计，其中，由相位对比成像（相位constrast成像）的材料分析，超导体研究中使用。建议安排更小，比同类安排今天实现更便宜。

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