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    • 5. 发明申请
    • WAFER CONTAINER CUSHION SYSTEM
    • WAFER CONTAINER CUSHION系统
    • WO2003072460A1
    • 2003-09-04
    • PCT/US2003/005282
    • 2003-02-21
    • ENTEGRIS, INC.BORES, GregoryZABKA, MichaelGREGERSON, Barry
    • BORES, GregoryZABKA, MichaelGREGERSON, Barry
    • B65D85/00
    • H01L21/67369
    • A wafer container having a container portion (20) with an open front (24) for receiving and removal of wafers includes a door (100) with a cushion system (140, 142) that utilizes a unique wafer restraint system (114) and structural features to provide maximum protection for the wafers and preventing rotation of said wafers. A feature of the door (100) is that the front of the door covers have a pair of latch cavities on the outwardly facing side of the door (100). The latch cavities for receiving two latch mechanisms (122, 124) with latch members (130) that extend out the upper and lower peripheral edge of the door (100). The latch mechanisms (122, 124) are covered by a pair of door panels (118, 120) that utilize hooks (186) that attach to the peripheral edge of the door (100) and further attach with posts near the vertical midsection.
    • 具有容纳部分(20)的晶片容器具有用于接收和去除晶片的开口前部(24),包括具有利用独特的晶片约束系统(114)和结构的结构的衬垫系统(140,142)的门(100) 特征是为晶片提供最大保护并防止所述晶片的旋转。 门(100)的特征在于门盖的前部在门(100)的向外侧上具有一对闩锁腔。 用于接收具有延伸出门(100)的上周边和下周边的闩锁构件(130)的两个闩锁机构(122,124)的闩锁腔。 闩锁机构(122,124)由一对门板(118,120)覆盖,所述门板利用连接到门(100)的周边边缘的钩(186)并进一步附接在靠近垂直中央部的柱上。
    • 6. 发明申请
    • WAFER CARRIER WITH REPLACEABLE GETTERS
    • 带可更换卡车的拖车
    • WO2016145338A1
    • 2016-09-15
    • PCT/US2016/022059
    • 2016-03-11
    • ENTEGRIS, INC.
    • FULLER, Matthew, A.BORES, Gregory
    • H01L21/673H01L21/677
    • H01L21/67393
    • A semiconductor wafer carrier assembly includes a carrier, the carrier defining a wafer storage area adapted to support one or more semiconductor wafers. The carrier has a door for access to the wafer storage area, the door defining an interior. The assembly also includes a getter module, the getter module including a housing, getter material disposed within the housing, the getter material adapted to decrease concentration of contaminants within the wafer storage area of the carrier, and at least one connection feature adapted to readily removably secure the getter module to the interior of the door.
    • 半导体晶片载体组件包括载体,载体限定适于支撑一个或多个半导体晶片的晶片存储区域。 载体具有用于进入晶片存储区域的门,门限定内部。 组件还包括吸气剂模块,吸气剂模块包括壳体,设置在壳体内的吸气剂材料,吸气剂材料适于减少载体晶片存储区域内的污染物的浓度,以及至少一个适于容易地可移除的连接特征 将吸气剂模块固定到门的内部。
    • 7. 发明申请
    • SUBSTRATE CONTAINMENT WITH ENHANCED SOLID GETTER
    • 具有增强固体吸收器的基板容纳
    • WO2015035240A1
    • 2015-03-12
    • PCT/US2014/054399
    • 2014-09-05
    • ENTEGRIS,INC.
    • BORES, Gregory
    • H01L21/673B65D85/38
    • H01L21/67393H01L21/67366H01L21/67389
    • A containment for one or more substrates has an enclosure that defines a contained volumetric area and included therein is a block or plate getter unit that has an enhanced performance provided by increased surface area formed on the plate or block by a series of grooves or other repeating surface structure pattern. Such patterning provides increased surface area on the block or plate and thus increased exposure of active elements to the contained volumetric region. In an embodiment, structure on one side of the block or plate has mirror image surface or a complementary surface on the opposing side. With such a structure, rigidity of the block or plate is preserved, weight is minimized, and exposed surface area is maximized. The enclosure may have specific pockets or may utilize a conventional substrate slot for the block or plate getter. The plate or block getter may be configured to fit within a conventional slot or a dedicated pocket in a wafer container or other substrate container.
    • 用于一个或多个基底的容纳物具有限定所包含的体积面积的外壳,并且其中包括的块或板吸气剂单元具有增强的性能,其通过一系列凹槽或其它重复形成的板或块上形成的增加的表面积而提供 表面结构图案。 这种图案化提供了块或板上的增加的表面积,从而增加了活性元素暴露于包含的体积区域。 在一个实施例中,块或板的一侧上的结构具有镜像表面或相对侧上的互补表面。 通过这样的结构,可以保持块体或板的刚度,减轻重量,使露出面积最大化。 外壳可以具有特定的口袋,或者可以利用用于块或板吸气剂的常规衬底槽。 板或块吸气剂可以被配置成装配在晶片容器或其他衬底容器中的常规槽或专用袋中。