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1. 发明申请

WO2009043040A1 SILICON SENSING STRUCTURE TO DETECT THROUGH-PLANE MOTION A PLANE OF MATERIAL WITH THERMAL EXPANSION SUBSTANTIALLY DIFFERENT FROM THAT OF SILICON 审中-公开
标题翻译：硅传感结构检测平板运动一种材料平板，具有与硅不同的热膨胀特性
公开(公告)号：WO2009043040A1
公开(公告)日：2009-04-02
申请号：PCT/US2008/078179
申请日：2008-09-29
申请人： ENDEVCO CORPORATION , SUMINTO, James, Tjan-meng , WILNER, Leslie, Bruce
发明人： SUMINTO, James, Tjan-meng , WILNER, Leslie, Bruce
IPC分类号： G01L9/02
CPC分类号： G01L9/0055 , G01L19/04
摘要： A pressure transducer is provided that has a transducer body with a rim, a diaphragm that deflects in response to pressure and a sensor bonded to the diaphragm at the rim and at a center of the diaphragm The sensor detects deflection of the metal diaphragm The sensor and diaphragm are made of different materials A thermal expansion difference between the sensor and the diaphragm is accommodated by flexures in the sensor that accept relative motion in a radial direction of the metal diaphragm with little effect on a sensitivity of the silicon structure to motion in an axial direction of the diaphragm
摘要翻译：提供一种压力传感器，其具有带轮缘的换能器主体，响应于压力而偏转的隔膜和在隔膜的边缘和隔膜的中心处接合到隔膜的传感器。传感器检测金属隔膜的偏转传感器和隔膜由不同的材料制成传感器和隔膜之间的热膨胀差异由传感器中的弯曲容纳，该传感器在金属隔膜的径向方向上接受相对运动，几乎不影响硅结构在轴向上的运动的灵敏度隔膜方向

2. 发明申请

WO2011019879A1 PROOF MASS FOR MAXIMIZED, BI-DIRECTIONAL AND SYMMETRIC DAMPING IN HIGH G-RANGE ACCELERATION SENSORS 审中-公开
标题翻译：用于最大化，高方向加速度传感器中的双向和对称阻尼的质量证明
公开(公告)号：WO2011019879A1
公开(公告)日：2011-02-17
申请号：PCT/US2010/045275
申请日：2010-08-12
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce , KWA, Tom
发明人： WILNER, Leslie, Bruce , KWA, Tom
IPC分类号： G01P15/09
CPC分类号： G01P15/123 , B81B3/0078 , B81B2201/0235 , G01P1/023 , G01P15/08 , G01P15/0802 , G01P2015/0882
摘要： A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G- range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies.
摘要翻译：提出了一种新的高G范围阻尼加速度传感器，其具有针对最大化，双向和对称阻尼优化的检测质量，以适应超过数千G的加速度范围。为了实现最大的双向和对称阻尼，高G范围加速度传感器被设计为在最大化其表面积的同时在检验质量中具有最小量的质量。这种高G范围阻尼加速度传感器可以应用于在相当高的频率下需要阻尼（或抑制振铃）的任何应用。

3. 发明申请

WO2009043032A1 FLEXURAL PIVOT FOR MICRO-SENSORS 审中-公开
标题翻译：用于微型传感器的柔性传感器
公开(公告)号：WO2009043032A1
公开(公告)日：2009-04-02
申请号：PCT/US2008/078168
申请日：2008-09-29
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
发明人： WILNER, Leslie, Bruce
IPC分类号： G01P3/00
CPC分类号： G01L1/2218 , G01P15/0888 , G01P15/123 , G01P2015/0831
摘要： A micro-sensor is provided with a fixed reference frame and an elastic pivot. The elastic pivot has at least two co-axial segments of pivot and is coupled to the fixed reference frame. The elastic pivot has a neutral axis that is a central line of the pivot. A moveable body is coupled to the elastic pivot and the reference frame. The moveable body and the reference frame share a reference surface. The moveable body extends between the two co-axial segments to provide that for a rotation of the moveable body about the pivot the moveable body approaches the reference surface at a first side, and recedes from the reference surface from an opposite side to provide an opening gap and a closing gap. The neutral axis is below the reference surface.
摘要翻译：微传感器设置有固定的参考框架和弹性枢轴。弹性枢轴具有至少两个枢轴的同轴段，并且连接到固定的参考系。弹性枢轴具有作为枢轴的中心线的中性轴线。可移动主体联接到弹性枢轴和参考框架。可移动体和参考框架共享参考面。可移动体在两个同轴段之间延伸以提供可移动体围绕枢轴旋转的可动体在第一侧接近参考表面，并从参考表面从相对侧后退以提供开口差距和缩小差距。中性轴低于参考面。

4. 发明申请

WO2008043061A2 HIGHLY SENSITIVE PIEZORESISTIVE ELEMENT 审中-公开
标题翻译：高灵敏度的PIEZORESISTIVE元素
公开(公告)号：WO2008043061A2
公开(公告)日：2008-04-10
申请号：PCT/US2007/080547
申请日：2007-10-05
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
发明人： WILNER, Leslie, Bruce
IPC分类号： G01L1/22 , H01C17/00
CPC分类号： G01L1/2293 , G01L1/18 , Y10T29/49103
摘要： A mechanical-to-electrical sensing structure has first and second movable blocks formed in a handle layer. A first hinge is coupled to the first and second movable blocks and configured to resist loads other than flexing of the first hinge. The first hinge is formed in the handle layer. A first gauge is separated from the first hinge and aligned to provide that a moment tending to rotate one of the first or second blocks relative to the other about the first hinge applies a tensile or compressive force along a length of the first gauge. The first gauge is formed from a device layer with an oxide between the device and handle layers. The sensing structure is made from an SOI wafer, and the first gauge is protected during an etching away of handle material beneath the first gauge by an oxide between the device and handle layers and an etch-resistant oxide or nitride on exterior surfaces of the first gauge.
摘要翻译：机械到电感测结构具有形成在手柄层中的第一和第二可移动块。第一铰链联接到第一和第二可移动块并且构造成抵抗除了第一铰链的弯曲之外的载荷。第一铰链形成在手柄层中。第一仪表与第一铰链分离并对齐以提供趋向于使第一或第二块之一相对于第一铰链围绕第一铰链旋转的力矩沿着第一量规的长度施加拉伸或压缩力。第一规格由装置层和手柄层之间的氧化物的器件层形成。感测结构由SOI晶片制成，并且在第一规格下方的手柄材料的蚀刻之前，第一规格由器件和手柄层之间的氧化物和第一表面的外表面上的抗蚀刻氧化物或氮化物进行保护测量。

5. 发明申请

WO2009120900A4 INTERCONNECTION SYSTEM ON A PLANE ADJACENT TO A SOLID-STATE DEVICE STRUCTURE 审中-公开
公开(公告)号：WO2009120900A4
公开(公告)日：2009-10-01
申请号：PCT/US2009/038456
申请日：2009-03-26
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
发明人： WILNER, Leslie, Bruce
IPC分类号： G01L9/12
摘要： An interconnection system is provided for a solid-state device. The solid-state that includes, a first layer, multiple devices and a first face. A second layer is bonded to the first face at a bonded face of the second layer that faces the first face. Electrically conductive bonds are between the fist and second faces. Conductive paths are on the bonded face of the second layer and connect two or more of the conductive bonds.

6. 发明申请

WO2009120807A2 COUPLED PIVOTED ACCELERATION SENSORS 审中-公开
标题翻译：耦合的辅助加速度传感器
公开(公告)号：WO2009120807A2
公开(公告)日：2009-10-01
申请号：PCT/US2009/038303
申请日：2009-03-25
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
发明人： WILNER, Leslie, Bruce
IPC分类号： G01P15/12
CPC分类号： G01P15/0888 , G01P15/123
摘要： A pivoted acceleration sensor has a substrate that is substantially parallel to first and second surfaces. A reference frame is provided. A first unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through first and second strain gauges. The first and second strain gauges are located along a pivot axis of the first unbalanced seismic mass. The first and second strain gauges are first and second piezoresistors on the first surface of the substrate. A second unbalanced seismic mass is flexibly coupled with the first unbalanced seismic mass. The second unbalanced seismic mass is suspended within the reference frame and is coupled with the reference frame through third and fourth strain gauges. The third and fourth strain gauges are located along a pivot axis of the second unbalanced seismic mass. The third and fourth strain gauges are third and fourth piezoresistors on the first surface of the substrate. Metallization on the first surface of the substrate is configured to connect the first, second, third and fourth piezoresistors in a bridge configuration without crossovers.
摘要翻译：枢转式加速度传感器具有基本平行于第一和第二表面的基板。提供了一个参考框架。第一不平衡震动质量块悬挂在参考框架内并通过第一和第二应变仪与参考框架耦合。第一和第二应变仪沿着第一不平衡质量块的枢轴定位。第一和第二应变仪是基板第一表面上的第一和第二压电电阻器。第二个不平衡震动块与第一个不平衡震动块灵活耦合。第二不平衡质量块悬挂在参考框架内，并通过第三和第四应变仪与参考框架耦合。第三和第四应变仪沿着第二不平衡质量块的枢转轴线定位。第三和第四应变片是基片第一表面上的第三和第四压电电阻器。衬底的第一表面上的金属化被配置为在没有交叉的桥配置中连接第一，第二，第三和第四压电电阻。

7. 发明申请

WO2006060452A2 PIEZORESISTIVE STRAIN CONCENTRATOR 审中-公开
标题翻译： PIEZORESISTIVE应变浓缩器
公开(公告)号：WO2006060452A2
公开(公告)日：2006-06-08
申请号：PCT/US2005/043259
申请日：2005-11-29
申请人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
发明人： WILNER, Leslie, Bruce
IPC分类号： G01L1/22
CPC分类号： G01L1/2231 , G01L9/0042 , G01L9/0054 , G01L19/141
摘要： A piezoresistive strain concentrator that converts mechanical movement into electrical output and a process for fabricating the concentrator are provided. The device includes a strain sensing structure composed of a piezoresistive strain sensitive element that spans a gap in a substrate. The strain sensing structure is supported on a strain concentrating structure also spanning the gap that has vertical walls extending to a cross-section at the base of the gap, both structures being etched from the substrate. The structure of the strain-concentrating support for the strain sensitive element is fabricated by deep reactive ion etch (DRIE). The strain sensing structure has an increased sensitivity, a low gage factor and an increased resistance to buckling and fracture compared to previous strain gage structures. Several of the strain sensing structures can be connected in a sequence in a bridge circuit.
摘要翻译：提供了将机械运动转换成电输出的压阻应变集中器和用于制造集中器的工艺。该装置包括应变感测结构，其由跨越衬底中的间隙的压阻应变敏感元件组成。应变感测结构支撑在应变集中结构上，该应变集中结构也跨越间隙，该间隙具有延伸到间隙底部横截面的垂直壁，两个结构都从基板上蚀刻。通过深反应离子蚀刻（DRIE）制造应变敏感元件的应变集中支撑体的结构。与以前的应变计结构相比，应变感测结构具有增加的灵敏度，低的量规因子和增加的抵抗和断裂的抗性。应变感测结构中的几个可以以桥式电路中的顺序连接。

8. 发明申请

WO1989008847A1 DIFFERENTIAL CAPACITIVE TRANSDUCER AND METHOD 审中-公开
标题翻译：差分电容式传感器和方法
公开(公告)号：WO1989008847A1
公开(公告)日：1989-09-21
申请号：PCT/US1989000988
申请日：1989-03-13
申请人： ENDEVCO CORPORATION
发明人： ENDEVCO CORPORATION , WILNER, Leslie, Bruce
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , Y10T29/435
摘要： A differential variable capacitance acceleration sensor includes a sandwich structure having three stacked plates (10, 40, 60) of silicon with the center plate (10) mounted such that its center portion (12) is enabled to move in a sealed cavity with each side thereof moving toward and away from a fixed cooperating plate forming the opposite side of a capacitive circuit. The center portion (12) or mass of the center plate (10) is suspended from its rim (14) by means of a large number of integral fingers (18, 20) extending from the rim (14) to the top and bottom surfaces of the center portion (12). This center mass (12) includes a number of through holes (16) to permit the passage of air from one side to the other and may also include grooves to aid in the flow of air. The fixed top plate or lid (40) and the base (60) also have, or may have, grooves (46, 66) to assist in the passage of air. An alternative embodiment includes a smaller number of more compliant fingers (108) to provide a more compliant structure. A number of spaced stops (48, 68) are provided in the lid and based to overcome electrostatic and pneumatic latch up. The method of forming the individual parts is also taught.

9. 发明申请

WO2003064317A3 TERMINALS FOR MULTI-LAYER DEVICES 审中-公开
公开(公告)号：WO2003064317A3
公开(公告)日：2003-08-07
申请号：PCT/US2003/002664
申请日：2003-01-28
申请人： ENDEVCO CORPORATION
发明人： WILNER, Leslie, Bruce
IPC分类号： B81B7/00
摘要： A multi-layer device with a lid, a core, and a base. The lid has a first terminal and a second terminal, and an inner surface with a first insulator. The core has a first surface bonded to the first insulator and a second surface bonded to a second insulator, and includes a pillar electrically connected to the second terminal. The base has an inner surface bonded to the second insulator and a portion being electrically connected to the pillar. The first terminal of the lid and the base are adapted for electrically connecting to an interior electrical unit positioned within the core so that there are conductive paths from the electrical unit to the first and second terminals. The lid can include a third terminal in electrical contact with a portion of the core, and the portion of the core can be adapted for electrically connecting to the electrical unit.

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