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1. 发明申请

WO2009123845A1 PROGRAMMABLE GAIN TRANS-IMPEDANCE AMPLIFIER OVERLOAD RECOVERY CIRCUIT 审中-公开
标题翻译：可编程增益变阻器放大器过载恢复电路
公开(公告)号：WO2009123845A1
公开(公告)日：2009-10-08
申请号：PCT/US2009/037062
申请日：2009-03-13
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , MCCURRY, Brandon , JOHANSEN, Brian
发明人： MCCURRY, Brandon , JOHANSEN, Brian
IPC分类号： G01R31/02 , G01R27/26 , G01R19/00
CPC分类号： G01R31/028 , G01R19/0092
摘要： Embodiments of an apparatus for measuring the leakage current of capacitive components is taught. One embodiment includes a first stage amplifier configured to receive an input from a serially-connected capacitive component at an inverting input and a feedback resistor in a feedback path of the first stage amplifier. A resistance value of the feedback resistor is programmable based on an expected value of the leakage current and a corresponding voltage output.
摘要翻译：教导了用于测量电容性部件的漏电流的装置的实施例。一个实施例包括第一级放大器，其被配置为在反相输入处接收来自串联连接的电容分量的输入和在第一级放大器的反馈路径中的反馈电阻。反馈电阻的电阻值可根据漏电流的期望值和相应的电压输出进行编程。

2. 发明申请

WO2006125217A3 SYNTHETIC PULSE REPETITION RATE PROCESSING FOR DUAL-HEADED LASER MICROMACHINING SYSTEMS 审中-公开
公开(公告)号：WO2006125217A3
公开(公告)日：2006-11-23
申请号：PCT/US2006/019780
申请日：2006-05-18
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , UNRATH, Mark A. , JOHANSEN, Brian , LO, Ho Wai
发明人： UNRATH, Mark A. , JOHANSEN, Brian , LO, Ho Wai
IPC分类号： B23K26/00
摘要： A method and system for increasing throughput of laser micromachining systems use more than one laser. Two or more pulsed laser beams (56, 58) are combined and then separated into multiple laser beams (80, 82) that enable the system to work simultaneously at multiple locations on the workpiece (20) with pulse rates greater than those achievable with independently operating lasers while maintaining pulse energy equal to or greater than the pulse energy of each of the original independent laser beams. Most laser micromachining applications required multiple sequential pulses to process a workpiece. Increasing the pulse rate while maintaining pulse energy effects more rapid material removal and thereby increases throughput for a laser micromachining system.

3. 发明申请

WO2010036669A2 POST-LENS STEERING OF A LASER BEAM FOR MICRO-MACHINING APPLICATIONS 审中-公开
标题翻译：用于微加工应用的激光束的后透镜转向
公开(公告)号：WO2010036669A2
公开(公告)日：2010-04-01
申请号：PCT/US2009/057947
申请日：2009-09-23
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , ALPAY, Mehmet E. , HOWERTON, Jeffrey , JOHANSEN, Brian
发明人： ALPAY, Mehmet E. , HOWERTON, Jeffrey , JOHANSEN, Brian
IPC分类号： B23K26/04 , B23K26/08
CPC分类号： B23K26/02 , B23K26/035 , B23K26/082
摘要： A laser micro-machining system includes a simple focusing lens located between a laser source and a beam steering mechanism along the path of a laser beam pulse. The focusing lens is a simple single-element spherical lens with an optical axis of the focusing lens located in line with a laser beam input from the laser source. The focusing lens is located further away from a work piece than the beam steering mechanism. An active beam path management system moves the simple focusing lens in concert with and relative to the beam steering mechanism to maintain a focal point coincident with a surface of the work piece at all deflection angles affected by the beam steering mechanism. The focusing lens is rapidly moveable in concert with the beam steering mechanism to maintain a constant beam path length from the lens output to the work piece.
摘要翻译：激光微加工系统包括沿着激光束脉冲的路径位于激光源和光束转向机构之间的简单聚焦透镜。聚焦透镜是一种简单的单元球面透镜，其聚焦透镜的光轴与从激光源输入的激光束一致。聚焦透镜远离工件而不是光束转向机构。主动光束路径管理系统使简单的聚焦透镜与光束转向机构相协调并相对于在由光束转向机构影响的所有偏转角度处保持与工件的表面一致的焦点。聚焦透镜可以与光束转向机构一起快速移动，以保持从透镜输出到工件的恒定的光束路径长度。

4. 发明申请

WO2009155280A2 REDUCING BACK-REFLECTIONS IN LASER PROCESSING SYSTEMS 审中-公开
标题翻译：减少激光加工系统的反射
公开(公告)号：WO2009155280A2
公开(公告)日：2009-12-23
申请号：PCT/US2009/047490
申请日：2009-06-16
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , ALPAY, Mehmet, E. , JOHANSEN, Brian
发明人： ALPAY, Mehmet, E. , JOHANSEN, Brian
IPC分类号： H01S3/02 , H01S3/00
CPC分类号： B23K26/046
摘要： Systems and methods reduce or prevent back-reflections in a laser processing system. A laser processing system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface, and a lens to receive the incident laser beam along a first axis of propagation that is substantially perpendicular to the work surface. The lens includes a primary axis that is substantially parallel to, and offset from, the first axis of propagation. The lens is configured to focus the incident laser beam onto the work surface along a second axis of propagation that forms a non-perpendicular angle with the work surface such that at least a substantial portion of a reflected laser beam from the work surface does not return to the laser beam output.
摘要翻译：系统和方法减少或防止激光加工系统中的反射。一种激光处理系统，包括产生入射激光束的激光源，将入射激光束引向工作表面的激光束输出，以及沿第一传播轴接收入射激光束的透镜，该第一传播轴基本垂直于工作面。透镜包括基本上平行于第一传播轴线偏移的主轴线。透镜被配置成沿着与工作表面形成非垂直角的第二传播轴将入射的激光束聚焦到工作表面上，使得来自工作表面的反射激光束的至少大部分不会返回到激光束输出。

5. 发明申请

WO2009145978A1 ON-THE-FLY MANIPULATION OF SPOT SIZE AND CUTTING SPEED FOR REAL-TIME CONTROL OF TRENCH DEPTH AND WIDTH IN LASER OPERATIONS 审中-公开
标题翻译：实时控制雷射深度和宽度的光点大小和切割速度的飞行操纵
公开(公告)号：WO2009145978A1
公开(公告)日：2009-12-03
申请号：PCT/US2009/038080
申请日：2009-03-24
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , ALPAY, Mehmet, E. , JOHANSEN, Brian , CHILDERS, David
发明人： ALPAY, Mehmet, E. , JOHANSEN, Brian , CHILDERS, David
IPC分类号： B23K26/38 , B23K26/04
CPC分类号： B23K26/0734 , B23K26/0622 , B23K26/364
摘要： Systems and methods cut trenches of multiple widths in a material using a single pass of a laser beam. A first series of laser pulses cut a work surface of the material at a first cutting speed using a first spot size. In a transition region from a first trench width to a second trench width, a second series of laser pulses sequentially change spot sizes while gradually changing from the first cutting speed to a second cutting speed. Then, a third series of laser pulses continue to cut the work surface at the second cutting speed using a second spot size. The method provides for increased depth control in the transition region. A system uses a selectively adjustable optical component in the laser beam path to rapidly change spot size by adjusting a position of a focal plane with respect to the work surface.
摘要翻译：系统和方法使用单次激光束切割材料中多个宽度的沟槽。第一系列激光脉冲使用第一光斑尺寸以第一切割速度切割材料的工作表面。在从第一沟槽宽度到第二沟槽宽度的过渡区域中，第二系列激光脉冲顺序地改变光斑尺寸，同时从第一切割速度逐渐变化到第二切割速度。然后，第三系列激光脉冲使用第二光点尺寸继续以第二切割速度切割工作表面。该方法提供了在过渡区域中增加的深度控制。系统使用激光束路径中的选择性可调节的光学部件来通过调整焦平面相对于工作表面的位置来快速地改变光斑尺寸。

6. 发明申请

WO2009120585A2 METHOD AND APPARATUS FOR LASER DRILLING HOLES WITH GAUSSIAN PULSES 审中-公开
标题翻译：用于激光钻孔的方法和装置与高斯脉冲
公开(公告)号：WO2009120585A2
公开(公告)日：2009-10-01
申请号：PCT/US2009/037720
申请日：2009-03-19
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , HOWERTON, Jeff , CHILDERS, David , JOHANSEN, Brian , ALPAY, Mehmet, Emin
发明人： HOWERTON, Jeff , CHILDERS, David , JOHANSEN, Brian , ALPAY, Mehmet, Emin
IPC分类号： B23K26/38 , B23K26/42
CPC分类号： B23K26/38 , B23K26/0622 , B23K26/382 , B23K26/384 , B23K2203/05 , B23K2203/10
摘要： Method and apparatus for drilling tapered holes in workpieces with laser pulses use defocused laser pulses to machine the holes with specified tapers (72, 74) and surface finishes (76) while maintaining specified exit diameters (74) and improved system throughput. A system (100) is described which can also drill holes with the desired taper and surface finish without requiring defocused laser pulses.
摘要翻译：用于在具有激光脉冲的工件中钻出锥形孔的方法和装置使用散焦的激光脉冲以规定的锥度（72,74）和表面光洁度（76）加工孔，同时保持规定的出口直径（74）并提高系统生产量。描述了一种系统（100），其还可以钻出具有期望的锥形和表面光洁度的孔，而不需要散焦的激光脉冲。

7. 发明申请

WO2007127420A3 IMPROVING IMAGE QUALITY VIA MULTI-WAVELENGTH LIGHT 审中-公开
公开(公告)号：WO2007127420A3
公开(公告)日：2007-11-08
申请号：PCT/US2007/010323
申请日：2007-04-27
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , JOHANSEN, Brian , ALPAY, Mehmet, E.
发明人： JOHANSEN, Brian , ALPAY, Mehmet, E.
IPC分类号： H04N1/40 , H04N1/04 , G06K9/00
摘要： A method and apparatus to improve image quality in images captured via monochromatic cameras using multi-wavelength lighting. A contrast optimization algorithm determines which particular wavelength among those available is most suitable to maximize contrast. The quality of the image can be further improved through active noise cancellation by determining the lighting schemes that provide maximum and minimum contrast between a target and a background. The elimination of image texture data (i.e., noise) is then accomplished through pixel-by-pixel division of the maximum by the minimum contrast image. Alternatively, images obtained using at least two wavelengths can be algebraically combined for noise reduction. The resulting composite image can be fed into any known target identification algorithm.

8. 发明申请

WO2009120542A2 METHOD AND APPARATUS FOR LASER DRILLING HOLES WITH TAILORED LASER PULSES 审中-公开
标题翻译：具有定制激光脉冲的激光钻孔的方法和装置
公开(公告)号：WO2009120542A2
公开(公告)日：2009-10-01
申请号：PCT/US2009/037440
申请日：2009-03-17
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , SUN, Yunlong , LEI, Weisheng , MATSUMOTO, Hisashi , JOHANSEN, Brian , HARDY, Greg , BAIRD, Brian
发明人： SUN, Yunlong , LEI, Weisheng , MATSUMOTO, Hisashi , JOHANSEN, Brian , HARDY, Greg , BAIRD, Brian
IPC分类号： H01S3/10 , H01S3/13 , B23K26/38
CPC分类号： B23K26/0622 , B23K26/382 , B23K26/389 , B23K26/40 , B23K2203/10 , B23K2203/12 , B23K2203/172 , B23K2203/42 , B23K2203/50 , B23K2203/52 , B23K2203/54 , H05K3/0035
摘要： Improved method and apparatus for drilling vias (30) in an electronic substrate with laser pulses (160, 170, 172, 180, 190, 192) use one or more tailored pulses (160, 180) to reduce debris remaining in the via while maintaining system throughput and avoiding damage to the substrate. A tailored pulse is a laser pulse that features a power spike (166, 186) having a peak power 10% higher than the average power of the pulse and lasting less than 50% of the duration of the pulse. Methods and apparatuses for creating tailored pulses by slicing longer duration pulses are shown.
摘要翻译：用于在具有激光脉冲（160,170,172,180,190,192）的电子衬底中钻通孔（30）的改进的方法和装置使用一个或多个定制脉冲（160,180）来减少残留在通孔中的碎屑，同时保持系统吞吐量并避免损坏基板。定制脉冲是具有功率尖峰（166,186）的激光脉冲，其具有比脉冲的平均功率高10％的峰值功率并且持续小于脉冲持续时间的50％。示出了通过切片较长持续时间脉冲来创建裁剪脉冲的方法和装置。

9. 发明申请

WO2022146566A1 APPARATUS AND METHOD FOR OPERATING ACOUSTO-OPTICAL DEFLECTORS 审中-公开
公开(公告)号：WO2022146566A1
公开(公告)日：2022-07-07
申请号：PCT/US2021/058985
申请日：2021-11-11
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： JOHANSEN, Brian , HOWE, Tyler , ALPAY, Mehmet , BROOKHYSER, James , RICHTER, Jered
IPC分类号： G02F1/33 , G02F1/11
摘要： An apparatus includes an acousto-optical deflector (AOD) system operative to deflect a beam of laser energy within a two-dimensional scan field. The AOD system includes a first AOD operative to deflect the beam of laser energy along a first axis of the two-dimensional scan field; a second AOD arranged optically downstream of the first AOD, wherein the second AOD is operative to deflect the beam of laser energy along a second axis of the two-dimensional scan field; and a controller operatively coupled to the AOD system. The controller is configured to drive each of the first AOD and the second AOD to deflect the beam of laser energy within the two-dimensional scan field and is further configured to drive the first AOD and the second AOD at at least substantially the same diffraction efficiency.

10. 发明申请

WO2018204241A1 MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRANGEMENTS 审中-公开
公开(公告)号：WO2018204241A1
公开(公告)日：2018-11-08
申请号：PCT/US2018/030152
申请日：2018-04-30
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LU, Guang , JOHANSEN, Brian , KOSMOWSKI, Mark , LO, Ho, Wai , LI, Guangyu
IPC分类号： B23K26/08 , B23K26/06 , B23K26/70
摘要： Varied embodiments of a laser-based machine tool, and techniques for controlling the same are provided. Some embodiments relate to techniques to facilitate uniform and reproducible processing of workpieces. Other embodiments relate to a zoom lens having a quickly-variable focal length. Still other embodiments relate to various features of a laser-based multi-axis machine tool that can facilitate efficient delivery of laser energy to a scan head, that can address thermomechanical issues that may arise during workpiece processing, etc. Another embodiment relates to techniques for minimizing or preventing undesired accumulation of particulate matter on workpiece surfaces during processing. A number of other embodiments and arrangements are also detailed.

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