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1. 发明申请

WO2018204241A1 MULTI-AXIS MACHINE TOOL, METHODS OF CONTROLLING THE SAME AND RELATED ARRANGEMENTS 审中-公开
公开(公告)号：WO2018204241A1
公开(公告)日：2018-11-08
申请号：PCT/US2018/030152
申请日：2018-04-30
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LU, Guang , JOHANSEN, Brian , KOSMOWSKI, Mark , LO, Ho, Wai , LI, Guangyu
IPC分类号： B23K26/08 , B23K26/06 , B23K26/70
摘要： Varied embodiments of a laser-based machine tool, and techniques for controlling the same are provided. Some embodiments relate to techniques to facilitate uniform and reproducible processing of workpieces. Other embodiments relate to a zoom lens having a quickly-variable focal length. Still other embodiments relate to various features of a laser-based multi-axis machine tool that can facilitate efficient delivery of laser energy to a scan head, that can address thermomechanical issues that may arise during workpiece processing, etc. Another embodiment relates to techniques for minimizing or preventing undesired accumulation of particulate matter on workpiece surfaces during processing. A number of other embodiments and arrangements are also detailed.

2. 发明申请

WO2008016832A1 REDUCING COHERENT CROSSTALK IN DUAL-BEAM LASER PROCESSING SYSTEM 审中-公开
标题翻译：在双光束激光加工系统中减少相关的CROSSTALK
公开(公告)号：WO2008016832A1
公开(公告)日：2008-02-07
申请号：PCT/US2007/074506
申请日：2007-07-26
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC. , HOLMGREN, Douglas, Earl , LO, Ho, Wai , CONKLIN, Philip, Mitchell
发明人： HOLMGREN, Douglas, Earl , LO, Ho, Wai , CONKLIN, Philip, Mitchell
IPC分类号： G02B26/08
CPC分类号： B23K26/067 , B23K26/04 , B23K26/043 , B23K26/0608 , B23K2201/40
摘要： A method of and system for forming two laser processing beams with controlled stability at a target specimen work surface includes first and second mutually coherent laser beams (130, 140) propagating along separate first and second beam paths that are combined (170) to perform an optical property adjustment. The combined laser beams are separated (190) into third and fourth laser beams (192, 194) propagating along separate beam paths and including respective third and fourth main beam components (192l), and one of the third and fourth laser beams contributes a leakage component that copropagates in mutual temporal coherence with the main beam component (192m) of the other of the third and fourth laser beams. An effect of mutual temporal coherence of the leakage component and the other main beam component with which the leakage component copropagates is reduced through acousto-optic modulation (150, 160) frequency shifts or through incorporation of an optical path length difference (404, 504) in the two beams.
摘要翻译：用于在目标样品工作表面处形成具有受控稳定性的两个激光加工光束的方法和系统包括沿着分离的第一和第二光束路径传播的第一和第二相互相干的激光束（130,140），所述第一和第二光束路径被组合（170）光学性能调整。组合的激光束被分离（190）到沿着分离的光束路径传播并且包括相应的第三和第四主光束分量（192l）的第三和第四激光束（192,194），并且第三和第四激光束中的一个激励有助于泄漏与第三和第四激光束中的另一个的主光束分量（192m）相互时间相干地共同传播的部件。通过声光调制（150,160）频移或通过并入光程长度差（404,504）来减少泄漏分量和泄漏分量共同传播的其它主波束分量的相互时间相干性的影响，在两个梁。

3. 发明申请

WO2016209818A1 MULTI-AXIS MACHINE TOOL AND METHODS OF CONTROLLING THE SAME 审中-公开
标题翻译：多轴机床及其控制方法
公开(公告)号：WO2016209818A1
公开(公告)日：2016-12-29
申请号：PCT/US2016/038535
申请日：2016-06-21
申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.
发明人： LU, Guang , ALPAY, Mehmet , TYLER, Mike , XU, Qian , KLEINERT, Jan , LIN, Zhibin , BROOKHYSER, Jim , LO, Ho, Wai , EATON, Kurt, M.
IPC分类号： B23Q1/25 , B23Q1/44 , B23Q5/54 , B23Q15/00
CPC分类号： B23Q15/14 , G05B19/402 , G05B2219/34015 , G05B2219/50218
摘要： One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.
摘要翻译：本发明的一个实施例可以被表征为一种用于控制多轴机床的方法，包括获得初步旋转致动器命令（其中旋转致动器指令的频率含量超过旋转致动器的带宽），产生处理旋转至少部分地基于初步旋转致动器命令，所述处理的旋转致动器命令具有在旋转致动器的带宽内的频率含量，并且至少部分地基于第一线性致动器命令和第二线性致动器命令产生第二线性致动器命令在加工的旋转执行器命令上。经处理的旋转致动器命令可以被输出到旋转致动器，第一线性致动器命令可被输出到第一线性致动器，并且第二线性致动器命令可被输出到第二线性致动器。

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