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    • 1. 发明申请
      WO2006032485A1 WAVELENGTH AND INCIDENCE ANGLE RESOLVED ELLIPSOMETER OR REFLECTOMETER 审中-公开
    • WAVELENGTH AND INCIDENCE ANGLE RESOLVED ELLIPSOMETER OR REFLECTOMETER
    • 波长和角度角解析仪或反射计
    • WO2006032485A1
    • 2006-03-30
    • PCT/EP2005/010225
    • 2005-09-21
    • ELDIM SA , LEROUX, Thierry , BOHER, Pierre , LUET, Mathieu
    • LEROUX, Thierry , BOHER, Pierre , LUET, Mathieu
    • G01N21/21 , G01N21/55
    • G01N21/211 , G01N21/55
    • The invention is related to an apparatus for determining simultaneously wavelength and incidence angle resolved reflectivity and/or ellipsometric properties of a sample (3), comprising: an illumination device (5) comprising a Fourier lens (17) for illuminating a surface portion (7) of the sample (3) with a multi wavelength light beam under a plurality of incidence angles (a), a first optical system comprising the Fourier lens (17) configured to transform an angular light distribution of the multi wavelength light beam reflected from the surface portion of the sample (3) into a positional light distribution in the Fourier plane (15) of the Fourier lens (17), a second optical system comprising an imaging lens (13, 27) for imaging the positional light distribution onto an entrance slit (23) of an imaging spectrograph (25), wherein the imaging spectrograph (25) is configured to disperse the positional light distribution as a function of wavelength essentially perpendicular to its entrance slit (23), and a detector (29), positioned at the exit of the imaging spectrograph (25), with a predetermined amount of pixels arranged in a two dimensional matrix form wherein each pixel of the detector (29) produces an electric signal proportional to the reflectance of the surface portion (7) of the sample (3) for a given incidence angle and a given wavelength. The invention furthermore relates to a corresponding method.
    • 本发明涉及一种用于确定样品（3）的同时波长和入射角分辨反射率和/或椭偏特性的装置，包括：照明装置（5），包括用于照射表面部分（7）的傅立叶透镜（17） ）具有多个入射角（a）的多波长光束的第一光学系统，包括傅里叶透镜（17）的第一光学系统，其被配置为变换从所述多个波长光束反射的多个波长光束的角度光分布 将样品（3）的表面部分变换成傅里叶透镜（17）的傅立叶平面（15）中的位置光分布，第二光学系统包括成像透镜（13,27），用于将位置光分布成像到入口 成像光谱仪（25）的狭缝（23），其中所述成像光谱仪（25）被配置为将位置光分布作为基本上垂直于其入口的波长的函数 狭缝（23）和位于成像光谱仪（25）的出口处的检测器（29），其具有以二维矩阵形式排列的预定量的像素，其中检测器（29）的每个像素产生电信号 与给定入射角和给定波长的样品（3）的表面部分（7）的反射率成比例。 本发明还涉及一种相应的方法。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 2. 发明申请
      WO2005111557A1 INTERFEROMETER AND FOURIER TRANSFORM SPECTROMETER 审中-公开
    • INTERFEROMETER AND FOURIER TRANSFORM SPECTROMETER
    • 干涉仪和FOURIER变压器光谱仪
    • WO2005111557A1
    • 2005-11-24
    • PCT/EP2005/005450
    • 2005-05-19
    • ELDIM S.A. , LEROUX, Thierry , BOHER, Pierre , LUET, Mathieu
    • LEROUX, Thierry , BOHER, Pierre , LUET, Mathieu
    • G01J3/28
    • G01J3/45 , G01J3/4532
    • The invention relates to an interferometer comprising, arranged along an axis first n birefringent polarizing beam splitters, wherein n is a natural number larger than one, preferably two, second n birefringent polarizing beam spitters, which are placed on the axis following the first n birefringent polarizing beam spitters, and (50) a light sensitive detector for detecting light interference, andwherein at least one polarizing beam splitter is movably arranged such that its position perpendicular to the axis can be changed to thereby change the phase shifts between the ordinary and extraordinary beams, and wherein for at least one position (100) of the at least one movably arranged polarizing beam splitter the phase shifts created by the first half of the birefringent polarizing beam spitters and the corresponding phase shifts created by the second half of the birefringent polarizing beam spitters compensate each other at least partially. The invention furthermore relates (150) to a fourier transform spectrometer.
    • 本发明涉及一种干涉仪，其包括沿着轴线布置的n个双折射偏振光束分离器，其中n是大于1的自然数，优选为两个第二n个双折射偏振光束喷射器，它们放置在第一n个双折射后的轴上 偏振光束喷射器和（50）用于检测光干涉的光敏检测器，并且其中至少一个偏振分束器可移动地布置成使得其垂直于轴的位置可以改变，从而改变普通和非常光束之间的相移 ，并且其中对于所述至少一个可移动地布置的偏振分束器的至少一个位置（100），由双折射偏振光束喷射器的前半部分产生的相移以及由双折射偏振光束的后半部分产生的相应相移 喷溅器至少部分补偿。 本发明还涉及（150）至光纤转换光谱仪。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 3. 发明申请
      WO2007131771A1 DEVICE AND METHOD FOR DISCRIMINATING CERNKOV AND SCINTILLATION RADIATION 审中-公开
    • DEVICE AND METHOD FOR DISCRIMINATING CERNKOV AND SCINTILLATION RADIATION
    • 用于分辨CERNKOV和SCINTILLATION辐射的装置和方法
    • WO2007131771A1
    • 2007-11-22
    • PCT/EP2007/004310
    • 2007-05-15
    • ELDIM SA , LEROUX, Thierry , BOHER, Pierre
    • LEROUX, Thierry , BOHER, Pierre
    • G01T1/203 , G01T1/22 , G01T1/29
    • G01T1/169 , G01T1/20 , G01T1/22
    • The invention relates to a device for discriminating Cerenkov and scintillation radiation and a beam inspection device, comprising an inspection head comprising a scintillator (13) and at least one ionizing radiation diffuser block (15a, 15b), a device (1) for discriminating Cerenkov and scintillation radiation, and an imaging system (17) for forming an image from at least a part of the inspection head. The invention furthermore relates to a corresponding method. In order to suppress spurious Cerenkov radiation contributions to the scintillation radiation the device comprises periodically arranged first and second filters (3, 5), having different relative absorption properties with respect to scintillation radiation and ionizing radiation. The invention also relates to an imaging apparatus comprising means for reducing parasitic contributions to a signal of interest, wherein the apparatus comprises a modulation mask for modulating a signal of interest, wherein, in particular, the signal of interest is the signal illuminating the object or the signal emitted or reflected from the object, and an image analyzing means configured to remove - at least partially - parasitic contributions added to the modulated signal of interest based on the shift of the signal of interest towards higher frequencies due to the modulation.
    • 本发明涉及一种用于鉴别切伦科夫和闪烁辐射的装置和一个束检查装置，包括一个包括闪烁体（13）和至少一个电离辐射漫射块（15a，15b）的检查头，一个用于鉴别切伦科夫 和闪烁辐射，以及用于从所述检查头的至少一部分形成图像的成像系统（17）。 本发明还涉及一种相应的方法。 为了抑制对闪烁辐射的假科伦科夫辐射贡献，该装置包括周期性排列的第一和第二滤光器（3,5），其相对于闪烁辐射和电离辐射具有不同的相对吸收特性。 本发明还涉及一种成像设备，其包括用于减少对感兴趣信号的寄生贡献的装置，其中所述装置包括用于调制感兴趣信号的调制掩模，其中特别地，感兴趣的信号是照亮对象的信号或 从对象发射或反射的信号，以及图像分析装置，被配置为基于由于调制而对感兴趣的信号向较高频率的偏移，去除至少部分地添加到感兴趣的调制信号的寄生输入。
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
    • 4. 发明申请
      WO2006050978A3 OPTICAL DEVICE FOR DETERMINING THE IN-FOCUS POSITION OF A FOURIER OPTICS SET-UP 审中-公开
    • OPTICAL DEVICE FOR DETERMINING THE IN-FOCUS POSITION OF A FOURIER OPTICS SET-UP
    • WO2006050978A3
    • 2006-05-18
    • PCT/EP2005/012133
    • 2005-11-11
    • ELDIM SA , LEROUX, Thierry
    • LEROUX, Thierry
    • G02B21/24 , G02B27/32 , G01B11/00 , G01C3/00 , G02B21/00
    • The invention relates to an optical device (31) for determining the in-focus position of a Fourier optics set-up (3, 9, 13), comprising: a beamsplitter (33), a numerical aperture delimiting diaphragm (35), an imaging system (41, 43), and a one or two dimensional detector (45), which are arranged and configured such that the detector is at an optically conjugated position with respect to the in-focus position (37a) of the Fourier optics set-up and such that the field of view of the optical device is larger than an illumination spot size or light emission spot size on the surface of a sample to be positioned in the in-focus position of the Fourier optics set-up, wherein the beamsplitter has a predetermined angle (8) configured to select a light beam emitted from the surface (7) of the sample (5) under a predetermined emission angle (alpha) in conjunction with the numerical aperture delimiting diaphragm and the imaging system to direct the selected light beam onto the detector such that depending on the position of the sample (63, 65, 67) with respect to the in-focus position of the Fourier optics set-up the selected light beam is detected at different positions on the one or two dimensional detector. The invention further more relates to a corresponding method for determining the in-focus position. In addition an imaging device and a Fourier optics set-up comprising the optical device and/or at least two imaging devices are provided.
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Global Dossier Espacenet 法律信息 同族专利 专利引用
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