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    • 3. 发明申请
    • SYSTEM FOR TRANSFERRING WAFER
    • 转移系统
    • WO1994014191A1
    • 1994-06-23
    • PCT/JP1993001804
    • 1993-12-13
    • EBARA CORPORATIONMATSUMURA, MasaoKAJIYAMA, MasaakiYOSHIOKA, Takeshi
    • EBARA CORPORATION
    • H01L21/68
    • H01L21/67772H01L21/67173H01L21/67757
    • This system can prevent contamination of the inside of a sealed box containing a wafer, and also, prevent contaminants from being brought into an apparatus for processing the wafer, which is connected to a clean tunnel. The system comprises a box where a wafer is placed gastightly in a clean atmosphere, and a transferring device which transfers the box on a carrier in order to transfer it through the sealed space of a clean tunnel. In the sealed space of the tunnel, there are provided a device for delivering the box to the carrier from outside the sealed space, and a device for delivering the wafer in the box to the processing apparatus. In the sealed space of the tunnel, a cleaning device is arranged to clean the outer surface of the box.
    • 该系统可以防止含有晶片的密封盒的内部的污染,并且还防止污染物进入用于处理连接到干净的隧道的晶片的设备。 该系统包括一个盒子,其中一个晶片被气密地放置在清洁的气氛中,以及一个传送装置,它将盒子转移到载体上,以便将其转移通过干净的隧道的密封空间。 在隧道的密封空间中,设置有用于将箱体从密封空间的外部输送到载体的装置,以及用于将箱中的晶片输送到处理装置的装置。 在隧道的密封空间中,设置清洁装置以清洁箱的外表面。
    • 4. 发明申请
    • COMBUSTION APPARATUS AND ITS COMBUSTION CONTROL METHOD
    • 燃烧装置及其燃烧控制方法
    • WO1990004741A1
    • 1990-05-03
    • PCT/JP1989001070
    • 1989-10-19
    • EBARA CORPORATIONISHIKAWA, RyuichiOSHITA, TakahiroGOKE, ChikaoASAI, Kiyoshi
    • EBARA CORPORATION
    • F23G05/00
    • F23L9/02F23G5/14F23G5/30F23G5/46F23L15/04Y02E20/348
    • In a combustion apparatus having a structure which includes a combustion furnace portion (1), a free board portion (2) continuing from the combustion furnace portion (1) and a post-combustion chamber (3) continuing from the free board portion (2) and wherein the post-combustion chamber (3) is disposed deviated from the position immediately above the free board portion (2), the combustion apparatus of this invention includes a plurality of pipes (4-2) disposed in parallel with a predetermined gap between them and near the boundary between the free board portion (2) and the post-combustion chamber (3) and gas blow means (4) equipped with gas jet holes (4-3) for blowing a gas such as air in a direction opposite to a combustion gas flowing to a discharge port, in each of the pipes (4-2). According to this structure, the gas blow means (4) blows the gas in such a manner as to counter the combustion gas so that a great swirl flow consisting of the mixture of the combustion gas and the blown gas occurs at the free board portion (2), an unburnt gas and the combustion air are mixed sufficiently inside the free board portion (2) and complete combustion is accomplished.
    • 在具有燃烧炉部分(1)的结构的燃烧装置中,从燃烧炉部分(1)继续的自由板部分(2)和从自由板部分(2)继续的后燃烧室(3) ),并且其中所述后燃烧室(3)设置为偏离所述自由板部(2)的正上方的位置,本发明的燃烧装置包括与预定间隙平行设置的多个管(4-2) 在它们之间并且在自由板部分(2)和后燃烧室(3)之间的边界附近,以及装有气体喷射孔(4-3)的气体吹出装置(4) 与流入排出口的燃烧气体相对,在每个管道(4-2)中。 根据该结构,气体吹出装置(4)以与燃烧气体相反的方式吹送气体,使得在自由板部分产生由燃烧气体和吹入气体的混合物组成的大的涡流 如图2所示,未燃烧气体和燃烧空气在自由板部分(2)的内部充分混合,完成燃烧。
    • 6. 发明申请
    • PRESSURE CONTROL VALVE AND OIL SUPPLY DEVICE USING SAID VALVE
    • 压力控制阀和使用该阀的油供应装置
    • WO1983002488A1
    • 1983-07-21
    • PCT/JP1983000014
    • 1983-01-17
    • EBARA CORPORATIONMIYAKAWA, ShinpeiKINBARA, Masaaki
    • EBARA CORPORATION
    • F16K17/02
    • G05D16/103F01M1/16F02C7/232Y10T137/2635Y10T137/7762
    • Soupape de commande de pression pouvant commander constamment la pression même si le débit du mazout sous pression varie, et dispositif d'alimentation en mazout adapté pour une machine turbo utilisant cette soupape de commande de pression. La soupape de commande de pression entraîne un régulateur du débit (V2) au moyen d'un cylindre hydraulique (32) en actionnant le piston (33) du cylindre (32) au moyen d'une soupape de guidage (V). Un orifice est formé pour permettre de régler le débit et l'échappement du mazout côté entrée pour commander la pression côté orifice d'admission de la soupape (V2), le mazout provenant du côté sortie pour la commande de la pression est guidé vers la soupape (V), et le cylindre (32) est en communication avec une source de pression de mazout au travers de la soupape (V). Un dispositif d'alimentation en mazout possédant cette commande de pression guide un tube pilote allant du collecteur qui alimente le côté charge à la soupape (V), et guide le mazout sous pression de la conduite entre la source d'alimentation en mazout sous pression et le collecteur à la soupape (V2), permettant ainsi l'échappement du mazout sous pression dans un réservoir de mazout. De cette manière, le décalage dans le circuit de commande de pression devient 0, avec une réaction extrêmement bonne, évitant ainsi le problème de coupure de la machine turbo, et permettant d'obtenir une propriété anti-explosion uniquement avec une commande hydraulique.
    • 7. 发明申请
    • FILTER CIRCUIT
    • 滤波电路
    • WO1998025341A1
    • 1998-06-11
    • PCT/JP1997004435
    • 1997-12-04
    • EBARA CORPORATIONMURAKAMI, ChikaraSATOH, Ichiju
    • EBARA CORPORATION
    • H03H11/04
    • H03H11/04H03H17/02
    • A filter circuit for a biaxial signal, etc. which has an excellent sharp filtering characteristic in a narrow band, without performing conversion/inverse conversion from a coordinate system at rest to a rotatory coordinate system. Input signals related to two axes orthogonal to each other are expressed by one complex variable ( u = Ux + jUy: where Ux and Uy are Laplace transformation values of the respective signals). A complex coefficient transfer function F (s - j omega ) which is obtained by replacing the Laplacian s of F(s) is used as the transfer function of real number coefficient of a low- or high-pass filter. Output signals related to two axes orthogonal to each other and passing the input complex variable u through a complex coefficient transfer function F (s - j omega ) are expressed by one complex variable ( V = Vx + jVy: where Vx and Vy are Laplace transformation values of the respective signals). The connection is made with transfer elements of real number coefficient so that the real part and the imaginary part of a transfer expression equation which is obtained by multiplying both sides of a transfer expression equation U . F (s - j omega ) = V of U , F and V as defined above by the denominator of F (s - omega ) may be equal to each other.
    • 用于双轴信号的滤波器电路等,其在窄带中具有优异的尖锐滤波特性,而不进行从坐标系静止到旋转坐标系的转换/逆变换。 与两个彼此正交的轴相关的输入信号由一个复变量(u u = U x + j U y:其中U x和U y是相应信号的拉普拉斯变换值)来表示。 将通过替换F(s)的拉普拉斯算子获得的复系数传递函数F(s-jω)用作低通或高通的实数系数的传递函数 过滤。 与两个彼此正交的轴相关并且使输入的复数变量u通过复系数传递函数F(s-jω)的输出信号由一个复变量 (uV = Vx + jVy:其中Vx和Vy是各个信号的拉普拉斯变换值)。 连接是用实数系数的传递元素进行的,从而通过将转移表达式u的两边相乘获得的转移表达式的实部和虚部。 如上所定义的(s-jω)= uu,u,u和v> V F(s-ω)的分母可以彼此相等。
    • 8. 发明申请
    • ROTATING MACHINE INTEGRATED WITH CONTROLLER, AND INVERTER
    • 旋转机与控制器和逆变器集成
    • WO1998019389A1
    • 1998-05-07
    • PCT/JP1997003965
    • 1997-10-30
    • EBARA CORPORATIONEBARA DENSAN LTD.NAKAJIMA, KaoruTADOKORO, Yasuki
    • EBARA CORPORATIONEBARA DENSAN LTD.
    • H02P07/63
    • H02P23/0077H02K11/33
    • A rotating machine integrated with a controller, which can reduce the manufacturing cost of a variable speed pump, fan, etc., and can easily set a control program at the site of installation, and an inverter suitable for the rotating machine. The rotating machine is a pump, fan, or the like and has a controller (10) incorporated in the rotating machine and provided with an inverter (20) which drives the rotating machine, a memory (11) in which a program (11A) for controlling the inverter (20) and a program (11B) for controlling the operation of the rotating machine are stored, a CPU (12) which operates in accordance with a program stored in the memory (11), an input/output section (15) which is connected to sensors and switches installed in the rotating machine, one or a plurality of serial ports (14) for communication with the CPU (12), and a means which rewrites the stored contents of the memory (11). A plurality of control programs are stored in the memory (11), and a means which switches the control program in use from the outside is provided. In the inverter (20), a circuit board mounted with circuit parts is integrally molded with molding resin and only input/output wires and interface terminals are led out from the molding resin.
    • 与控制器集成的旋转机器,可以降低变速泵,风扇等的制造成本,并且可以容易地在安装现场安装控制程序,以及适用于旋转机器的变频器。 旋转机是泵,风扇等,并具有并入旋转机器中的控制器(10),并具有驱动旋转机器的变频器(20),存储器(11),程序(11A) 用于控制逆变器(20)的控制器和用于控制旋转机器的操作的程序(11B)被存储在根据存储在存储器(11)中的程序进行操作的CPU(12),输入/输出部分 15),其连接到安装在旋转机器中的传感器和开关,用于与CPU(12)通信的一个或多个串行端口(14),以及重写存储器(11)的存储内容的装置。 多个控制程序被存储在存储器(11)中,并且提供了一种从外部切换使用中的控制程序的装置。 在逆变器(20)中,安装有电路部件的电路板与模制树脂一体地模制,并且只有输入/输出线和接口端子从模塑树脂引出。