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1. 发明申请

WO2006046998A1 VAPOR DEPOSITION SOURCE WITH PLUAL APERTURES 审中-公开
标题翻译：蒸气沉积源具有较强的孔径
公开(公告)号：WO2006046998A1
公开(公告)日：2006-05-04
申请号：PCT/US2005/029040
申请日：2005-08-15
申请人： EASTMAN KODAK COMPANY , FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , VAN, SLYKE, Steven, Arland
发明人： FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , VAN, SLYKE, Steven, Arland
IPC分类号： C23C14/24
CPC分类号： C23C14/243 , H01L51/001 , H01L51/0081 , H01L51/56
摘要： A container (30) for vaporizing a solid material includes a housing having side walls, a bottom wall, and a cover (40) enclosing an interior volume. The cover includes at least one aperture to permit egress of vapor efflux from the housing. A heater heats at least a portion of the housing to vaporize the solid material. A baffle (50) disposed between the cover and the solid material prevents a direct line of sight between the solid material and the aperture(s) and is spaced from the cover to control the flow of vaporized material into a region between the baffle and the cover to promote uniformity of vapor efflux from the aperture(s). The ratio of the interior volume to a volume of the region between the baffle and the cover is at least approximately 20:1. The solid material can be an organic material used to form a layer of an organic light-emitting device.
摘要翻译：用于汽化固体材料的容器（30）包括具有侧壁，底壁和封闭内部容积的盖（40）的壳体。该盖包括至少一个孔，以允许从壳体排出蒸气。加热器加热壳体的至少一部分以使固体材料蒸发。设置在盖和固体材料之间的挡板（50）防止固体材料和孔之间的直接视线，并与盖隔开，以控制蒸发的材料流入挡板和覆盖以促进来自孔的蒸汽流出的均匀性。挡板和盖板之间的内部体积与容积之比至少为20：1。固体材料可以是用于形成有机发光装置的层的有机材料。

2. 发明申请

WO2006076176A1 CUSTOMIZED ONE TIME USE VAPOR DEPOSITION SOURCE 审中-公开
标题翻译：定制一次使用蒸气沉积源
公开(公告)号：WO2006076176A1
公开(公告)日：2006-07-20
申请号：PCT/US2006/000002
申请日：2006-01-03
申请人： EASTMAN KODAK COMPANY , FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , O'TOOLE, Terrence, Robert
发明人： FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , O'TOOLE, Terrence, Robert
IPC分类号： G06Q10/00 , C23C14/24 , C23C14/12 , H01L51/40
CPC分类号： G06Q30/00 , C23C14/12 , C23C14/243 , G06Q10/0832 , G06Q30/0601
摘要： A method of providing a customized one time use vapor deposition source to a user includes a supplier receiving an order from the user; the supplier providing the one time use vapor deposition source to the user, wherein the one time use vapor deposition source includes at least a boat containing the organic material, a heating element, and an aperture plate; and the supplier receiving payment for the one time use vapor deposition source.
摘要翻译：向用户提供定制的一次性气相沉积源的方法包括供应商从用户接收订单; 供应商向用户提供一次性气相沉积源，其中一次性气相沉积源至少包括含有有机材料的船，加热元件和孔板; 并且供应商一次性使用气相沉积源。

3. 发明申请

WO2005098079A1 HIGH THICKNESS UNIFORMITY VAPORIZATION SOURCE 审中-公开
标题翻译：高浓度均匀蒸发源
公开(公告)号：WO2005098079A1
公开(公告)日：2005-10-20
申请号：PCT/US2005/008252
申请日：2005-03-11
申请人： EASTMAN KODAK COMPANY , LONG, Michael , GRACE, Jeremy, Matthew , KOPPE, Bruce, Edward , FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , ZWAAP, Robert, Ferdinand
发明人： LONG, Michael , GRACE, Jeremy, Matthew , KOPPE, Bruce, Edward , FREEMAN, Dennis, Ray , REDDEN, Neil, Peter , ZWAAP, Robert, Ferdinand
IPC分类号： C23C14/24
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , C23C14/26
摘要： A vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifold(60) including side and bo ttom walls defining a chamber for receiving organic material, and an aperture pl ate(40) disposed between the side walls, the aperture plate having a plurality of spaced apart apertures(90) for emitting vaporized organic material; the apertu re plate including conductive material which in response to an electrical current produces heat; means for heating the organic material to a temperature which c auses its vaporization, and heating the side walls of the manifold; and an elect rical insulator(120) coupling the aperture plate to the side walls for concentra ting heat in the unsupported region of the aperture plate adjacent to the apertu res, whereby the distance between the aperture plate and the substrate can be re duced to provide high coatA vapor deposition source for use in vacuum chamber for coating an organic layer on a substrate of an OLED device, includes a manifoldincluding side and bottom walls defining a chamber for receiving organic materi al, and an aperture plate disposed between the side walls, the aperture plate ving a plurality of spaced apart apertures for emitting vaporized organic materi al; the aperture plate including conductive material which in response to an ele ctrical current produces heat; means for heating the organic material to a tempe rature which causes its vaporization, and heating the side walls of the manifold and an electrical insulator coupling the aperture plate to the side walls for concentrating heat in the unsupported region of the aperture plate adjacent to t he apertures, whereby the distance between the aperture plate and the substrate can be reduced to provide high coating thickness uniformity on the substrate.
摘要翻译：一种用于在OLED器件的衬底上涂覆有机层的真空室中的气相沉积源，包括歧管（60），其包括限定用于接收有机材料的室的侧壁和底壁，以及孔（40）设置在所述侧壁之间，所述孔板具有用于发射蒸发的有机材料的多个间隔开的孔（90）包括响应于电流的导电材料的印模板产生热量; 用于将有机材料加热到使其蒸发的温度并加热歧管的侧壁的装置; 以及将孔板连接到侧壁上的电绝缘体（120），用于在孔板的邻近孔径区域的未支撑区域内集中热量，由此可以减小孔板和衬底之间的距离以提供高涂层用于在OLED器件的衬底上涂覆有机层的真空室中的气相沉积源包括限定用于接收有机物的室的侧面和底壁以及设置在侧壁之间的孔板，孔板，其具有多个间隔开的孔，用于发射蒸发的有机物质; 包括响应于电流电流的导电材料的孔板产生热量; 用于将有机材料加热到导致其蒸发的温度的装置，以及加热歧管的侧壁和将孔板耦合到侧壁的电绝缘体，用于将热量集中在邻近的孔板的未支撑区域孔，从而可以减小孔板和基底之间的距离，以在基底上提供高的涂层厚度均匀性。

4. 发明申请

WO2006076287A1 VAPORIZATION SOURCE WITH BAFFLE 审中-公开
标题翻译：蒸汽源与BAFFLE
公开(公告)号：WO2006076287A1
公开(公告)日：2006-07-20
申请号：PCT/US2006/000665
申请日：2006-01-06
申请人： EASTMAN KODAK COMPANY , FREEMAN, Dennis, Ray , REDDEN, Neil, Peter
发明人： FREEMAN, Dennis, Ray , REDDEN, Neil, Peter
IPC分类号： C23C14/24 , C23C14/12
CPC分类号： C23C14/243 , C23C14/12
摘要： A vapor deposition (10) source for depositing organic material (25) includes a boat (30) having a cavity (15) for holding organic material and an aperture plate (40) , having a plurality of spaced apertures (45) , for enclosing the boat. The vapor deposition source also includes a heating element (50) provided in the cavity between the aperture plate and the organic material, and a baffle member (70) in contact with the heating element and having at least three surfaces (75, 80, 85, 120, 125) which absorb energy from the heating element, the first surface redirecting energy to the aperture plate and the second and third surfaces (80, 85) redirecting energy to the boat walls and the organic material.
摘要翻译：用于沉积有机材料（25）的气相沉积（10）源包括具有用于保持有机材料的空腔（15）的船（30）和具有多个间隔开的孔（45）的孔板（40），用于封闭小舟。气相沉积源还包括设置在孔板和有机材料之间的空腔中的加热元件（50）和与加热元件接触并具有至少三个表面（75,80,85）的挡板构件，120,125），其从所述加热元件吸收能量，所述第一表面将能量重定向到所述孔板，并且所述第二和第三表面（80,85）将能量重定向到所述舟壁和所述有机材料。

5. 发明申请

WO2005083145A2 VAPOR DEPOSITION SOURCE WITH MINIMIZED CONDENSATION EFFECTS 审中-公开
标题翻译：具有最小凝聚效应的蒸气沉积源
公开(公告)号：WO2005083145A2
公开(公告)日：2005-09-09
申请号：PCT/US2005/004394
申请日：2005-02-11
申请人： EASTMAN KODAK COMPANY , GRACE, Jeremy, Matthew , FREEMAN, Dennis, Ray , KLUG, Justin, Hager , REDDEN, Neil, Patrick
发明人： GRACE, Jeremy, Matthew , FREEMAN, Dennis, Ray , KLUG, Justin, Hager , REDDEN, Neil, Patrick
IPC分类号： C23C14/00
CPC分类号： C23C14/24 , C23C14/12 , C23C14/243 , H01L51/001
摘要： A thermal physical vapor deposition source for depositing material onto a substrate includes an elongated container for receiving the material, the container having a conductance C B in the elongated direction, and a heater for heating the material in the container to vaporize the material to a partial pressure P m . The container has at least one member defining a plurality of apertures arranged along the length of the member, the apertures having a total conductance C A , wherein Formula (I) and end heaters for heating each side of the container to reduce condensation of material onto the container.
摘要翻译：用于将材料沉积到衬底上的热物理气相沉积源包括用于容纳材料的细长容器，容器在细长方向上具有导电体CB，以及加热器，用于加热容器中的材料以使材料蒸发至分压下午。容器具有限定沿着构件长度布置的多个孔的至少一个构件，孔具有总导电性CA，其中式（I）和端部加热器用于加热容器的每一侧以减少材料在容器。

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