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    • 9. 发明申请
    • CONTROLLING MAKING MICROCAVITY OLED DEVICES
    • 控制制造微型OLED器件
    • WO2005101506A3
    • 2005-11-17
    • PCT/US2005010425
    • 2005-03-29
    • EASTMAN KODAK COTYAN YUAN-SHENG
    • TYAN YUAN-SHENG
    • H01L51/52H01L27/00
    • H01L51/5265
    • A method for controlling the fabrication of microcavity OLED device includes providing a substrate (711, 712, 713), forming a microcavity OLED device including two mirror layers and one or more organic layers disposed between the two mirror layers (730), and illuminating the microcavity OLED device (760) and measuring the reflectivity spectrum to determine the wavelength of the reflectivity minimum (770). The method also includes comparing the wavelength of the reflectivity minimum to a target value to produce an difference signal, and making adjustments in accordance with the difference signal to the deposition rate or deposition time (750) of at least one of the organic layers in a subsequent OLED device (720) to reduce the difference signal in the subsequent microcavity OLED device.
    • 用于控制微腔OLED器件制造的方法包括提供衬底(711,712,713),形成包括两个镜面层和设置在两个镜层(730)之间的一个或多个有机层的微腔OLED器件,并照亮 微腔OLED器件(760)并测量反射光谱以确定反射率最小值的波长(770)。 该方法还包括将反射率最小值的波长与目标值进行比较以产生差分信号,并且根据差分信号进行调节,使其相对于至少一个有机层的沉积速率或沉积时间(750)在 随后的OLED器件(720)以减少随后的微腔OLED器件中的差信号。