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    • 2. 发明申请
    • PROCESS FOR FABRICATING AN ELECTRONIC COMPONENT COMBINING AN ELECTROMECHANICAL SYSTEM AND AN ELECTRONIC CIRCUIT
    • 制造电子元件组合电子系统和电子电路的方法
    • WO2011080409A3
    • 2011-09-09
    • PCT/FR2010000828
    • 2010-12-09
    • COMMISSARIAT ENERGIE ATOMIQUEPERRUCHOT FRANCOISDIEM BERNARDMOUREY BRUNOSILLON NICOLAS
    • PERRUCHOT FRANCOISDIEM BERNARDMOUREY BRUNOSILLON NICOLAS
    • B81C1/00
    • B81C1/00238B81C2201/019B81C2203/036
    • The invention relates to a process for fabricating an electronic component combining, starting from two different substrates, an electromechanical system and an electronic circuit, characterized in that it comprises: a) the production of a stack comprising first and second substrates separated by an intermediate layer (4), the first substrate comprising a mechanical layer (1, 3), the second substrate comprising an electronic circuit (10) consisting of localized (6) electrical contact regions (11) that are covered by the intermediate layer (4), the intermediate layer comprising a sacrificial layer (4) and a bonding layer (7), the sacrificial layer (4) being in contact with the first substrate (1, 3) and the intermediate layer being bonded to the second substrate via the bonding layer (7); b) the production through the mechanical layer (1), on the one hand, of first trenches (20), for structuring the mechanical layer (1), and, on the other hand, of second trenches (21) passing through the mechanical layer and the intermediate layer so as to define vias (25) extending as far as the electrical contact regions (1, 1) of the electronic circuit (10), the wall (23) and the bottom of each via (25), on the one hand, and a contact region (29) for each via on the surface of the mechanical layer (1), on the other hand, comprising an electrically conductive layer (26, 29); and c) the liberation of the electromechanical structure by etching all or part of the intermediate layer (4).
    • 本发明涉及一种用于制造电子部件的方法,该电子部件从两个不同的基板开始组合机电系统和电子电路,其特征在于,其包括:a)制造包括由中间层分隔的第一和第二基板的堆叠 (4),所述第一基板包括机械层(1,3),所述第二基板包括由中间层(4)覆盖的局部(6)电接触区域(11)组成的电子电路(10) 所述中间层包括牺牲层(4)和接合层(7),所述牺牲层(4)与所述第一衬底(1,3)接触,并且所述中间层经由所述接合层接合到所述第二衬底 (7); b)一方面通过第一沟槽(20)的机械层(1)的生产,用于构造机械层(1),另一方面通过穿过机械层(1)的第二沟槽(21) 层和中间层,以便限定延伸到电子电路(10)的电接触区域(1),壁(23)和每个通孔(25)的底部的通孔(25), 一方面,另一方面,在机械层(1)的表面上的每个通孔的接触区域(29)包括导电层(26,29); 以及c)通过蚀刻中间层(4)的全部或部分来解除机电结构。
    • 3. 发明申请
    • LIGHT EMISSION DEVICE WITH CHROMATIC CONTROL
    • 具有色度控制的光发射装置
    • WO2007088267A3
    • 2008-01-31
    • PCT/FR2007000166
    • 2007-01-29
    • COMMISSARIAT ENERGIE ATOMIQUEKOPP CHRISTOPHEHUGON XAVIERMOUREY BRUNOTCHELNOKOV ALEXEI
    • KOPP CHRISTOPHEHUGON XAVIERMOUREY BRUNOTCHELNOKOV ALEXEI
    • H01L25/16
    • H05B33/0869H01L25/167H01L2224/16225
    • The light emission device (1) comprises a base substrate (2) and, preferably, three light-emitting diodes (3a, 3b, 3c), respectively associated with three primary colours and emitting a portion of their signal in the direction of the base substrate (2). The device (1) includes three chromatic photodetectors (7a, 7b, 7c) formed in the base substrate (2), constituting a semiconductor substrate, each chromatic photodetector being placed beneath an associated light-emitting diode (3a, 3b, 3c). Each chromatic photodetector (7a, 7b, 7c) comprises superposed first layers (9a, 9b, 9c), second layers (10a, 10b, 10c) and third layers (11a, 11b, 11c). The first layers (9a, 9b, 9c) and third layers (11a, 11b, 11c) have a first type of conductivity and the second layers (10a, 10b, 10c) have a second type of conductivity. The device (1) includes a control component (6), connected to the chromatic photodetectors (7a, 7b, 7c) and to the light-emitting diodes (3a, 3b, 3c), in order to control the overall colour of the light emitted by the device (1).
    • 发光装置(1)包括基底(2),优选地包括分别与三原色相结合的三个发光二极管(3a,3b,3c),并且在基底的方向上发射它们的一部分信号 基板(2)。 器件(1)包括形成在基底(2)中的三个彩色光电探测器(7a,7b,7c),构成半导体衬底,每个彩色光电探测器放置在相关联的发光二极管(3a,3b,3c)的下方。 每个彩色光电检测器(7a,7b,7c)包括叠置的第一层(9a,9b,9c),第二层(10a,10b,10c)和第三层(11a,11b,11c)。 第一层(9a,9b,9c)和第三层(11a,11b,11c)具有第一类型的导电性,第二层(10a,10b,10c)具有第二类导电性。 装置(1)包括连接到彩色光电检测器(7a,7b,7c)和发光二极管(3a,3b,3c)的控制部件(6),以便控制光的整体颜色 由设备(1)发射。