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1. 发明申请

WO2013006768A3 TEST APPARATUS HAVING A PROBE CARD AND CONNECTOR MECHANISM 审中-公开
标题翻译：具有探针卡和连接器机构的测试装置
公开(公告)号：WO2013006768A3
公开(公告)日：2013-03-14
申请号：PCT/US2012045701
申请日：2012-07-06
申请人： CELADON SYSTEMS INC , INTEL CORP , ROOT BRYAN J , FUNK WILLIAM A , PALUMBO MICHAEL
发明人： ROOT BRYAN J , FUNK WILLIAM A , PALUMBO MICHAEL
IPC分类号： G01R31/26
CPC分类号： G01R1/07307 , G01R1/07364 , G01R31/2601 , G01R31/2889
摘要： A test apparatus for testing a semiconductor device includes a circuit board having a contact pattern on one side and an opening therethrough, and a probe card supporting a probe needle array. The probe needle array is insertable into the opening of the circuit board and is configured to probe a device under test. The probe needle array is in electrical contact with the contact pattern of the circuit board, to allow signals through the probe card and circuit board to a test equipment. A holder supports the probe card and other probe cards. The holder has multiple sides, each of which is supportable of a probe card having a probe needle array. The holder is rotatable to manipulate and position the probe needle arrays of the probe cards relative to a device under test. The holder allows disconnection and replacement of the probe needle arrays from the holder.
摘要翻译：用于测试半导体器件的测试装置包括：一侧具有接触图案的电路板和穿过其的开口;以及支撑探针针阵列的探针卡。探针针阵列可插入电路板的开口中，并配置成探测被测器件。探针针阵列与电路板的接触图形电接触，以允许通过探针卡和电路板的信号到测试设备。支架支持探针卡和其他探针卡。保持器具有多个侧面，每个侧面可支撑具有探针针阵列的探针卡。保持器可旋转以相对于被测设备操纵和定位探针卡的探针针阵列。支架允许从保持器断开和更换探针针阵列。

2. 发明申请

WO2013006770A3 TEST APPARATUS HAVING A PROBE CARD AND CONNECTOR MECHANISM 审中-公开
标题翻译：具有探针卡和连接器机构的测试装置
公开(公告)号：WO2013006770A3
公开(公告)日：2013-05-10
申请号：PCT/US2012045704
申请日：2012-07-06
申请人： CELADON SYSTEMS INC , ROOT BRYAN J , FUNK WILLIAM A
发明人： ROOT BRYAN J , FUNK WILLIAM A
IPC分类号： H01L21/66 , G01R1/073
CPC分类号： G01R1/07307 , G01R1/07364 , G01R31/2601 , G01R31/2889
摘要： A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.
摘要翻译：探针装置具有在一侧具有接触图案的探针线。接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。探针线具有探测需要测试的设备的尖端。信号通过探针线从探针卡传输，例如通过电路板传输到其他诊断设备。探针卡与电路板的接触允许通过探针线将信号传输到另一个诊断设备。在探针卡的另一侧是连接器结构。连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许探针卡与支架连接和断开。

3. 发明申请

WO2013006771A2 TEST SYSTEMS WITH A PROBE APPARATUS AND INDEX MECHANISM 审中-公开
标题翻译：带探针设备和索引机制的测试系统
公开(公告)号：WO2013006771A2
公开(公告)日：2013-01-10
申请号：PCT/US2012045705
申请日：2012-07-06
申请人： CELADON SYSTEMS INC , ROOT BRYAN J , FUNK WILLIAM A , DUNKLEE JOHN L
发明人： ROOT BRYAN J , FUNK WILLIAM A , DUNKLEE JOHN L
CPC分类号： G01R1/07364 , G01R1/0466 , G01R1/073 , G01R31/26 , G01R31/2889
摘要： A probe apparatus has probe wires with a contact pattern on one side. The contact pattern is for contacting a respective contact pattern on another test equipment or component, such as a circuit board. The probe wires have tips that probe a device desired for testing. Signals are transmitted through the probe wires from the probe card, for example, through a circuit board to other diagnostic equipment. The contact of the probe card with the circuit board allows signals to be transferred through the probe wires to the other diagnostic equipment. On another side of the probe card is a connector structure. The connector structure includes a retainer that can allow the probe card to be replaced from a test system, such as allowing it to be connected and disconnected from a holder.
摘要翻译：探针装置具有在一侧具有接触图案的探针导线。接触图案用于接触另一测试设备或组件（例如电路板）上的相应接触图案。探针导线具有探针，用于探测期望进行测试的设备。信号通过探针卡的探针传输，例如通过电路板传输到其他诊断设备。探针卡与电路板的接触允许信号通过探针传输到其他诊断设备。探针卡的另一侧是连接器结构。连接器结构包括保持器，其可以允许探针卡从测试系统更换，例如允许它与保持器连接和断开。

4. 发明申请

WO2004081980A3 PROBE CARD ASSEMBLY 审中-公开
标题翻译：探索卡大会
公开(公告)号：WO2004081980A3
公开(公告)日：2004-12-09
申请号：PCT/US2004006502
申请日：2004-03-04
申请人： CELADON SYSTEMS INC , ROOT BRYAN J , FUNK WILLIAM
发明人： ROOT BRYAN J , FUNK WILLIAM
IPC分类号： G01R1/073
CPC分类号： G01R1/07342 , G01R1/06772 , G01R1/44
摘要： A method and apparatus for terminating a probe that probes a semiconductor device with a signal cable from a tester is provided to connect layers of the probe to layers of the signal cable side by side. The probe and signal cable (102) can be a co-axial or tri-axial probe and signal cable (102), respectively. A center conductive probe needle of the probe is disposed side by side with and electrically connects to a center signal conductor of the signal cable (102). A dielectric layer of the probe is disposed side by side with and connects to a dielectric layer of the signal cable (102). A conductive guard layer of the probe is disposed side by side with and electrically connects to a conductive dispersion/guard layer of the signal cable, and a sleeve of the probe is disposed side by side with and connects to a sleeve of the signal cable (102). In a tri-axial embodiment, a second dielectric layer of the probe is disposed side by side with and connects to a second dielectric layer of the signal cable.
摘要翻译：提供一种用于终止使用来自测试器的信号电缆探测半导体器件的探针的方法和装置，以将探针的层连接到信号电缆的层。探头和信号电缆（102）可以分别是同轴或三轴探头和信号电缆（102）。探针的中心导电探针针与信号电缆（102）的中心信号导体并排设置并电连接。探针的电介质层并排设置并连接到信号电缆（102）的电介质层。探针的导电保护层并排设置并电连接到信号电缆的导电分散/保护层，并且探针的套管并排布置并连接到信号电缆的套筒（ 102）。在三轴实施例中，探针的第二电介质层并排设置并连接到信号电缆的第二电介质层。

5. 发明申请

WO9845674A3 PROBE TILE AND PLATFORM FOR LARGE AREA WAFER PROBING 审中-公开
标题翻译：探索大面积波浪探测器和平台
公开(公告)号：WO9845674A3
公开(公告)日：1998-12-30
申请号：PCT/US9806041
申请日：1998-03-25
申请人： CELADON SYSTEMS INC
发明人： ROOT BRYAN J
IPC分类号： G01R1/06 , G01R1/073 , G01R31/28 , H01L21/66 , G01K
CPC分类号： G01R31/2887 , G01R1/07342
摘要： A system and method for a probe tile and probe platform for electrically probing a semiconductor wafer over a broad area of the semiconductor wafer. Nine ceramic tiles (125) are configured in a flat three by three matrix, and are held in place by a probing platform. Each tile (125) may be moved independently in an X and Y direction. The probe platform has three control knobs on the side to move a tile in the X direction and three control knobs on the front to move a tile in the Y direction. The control knobs are attached to transmission shafts (109) which slide back and forth into three ball detent positions. The ball detent positions determine which tile is engaged and can be manipulated. The ceramic tiles hold self-aligning tungsten probe tips to permit semiconductor wafer testing over a wide temperature range.

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