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    • 3. 发明申请
    • PHOTOSENSOR
    • 光传感器
    • WO2008084650A3
    • 2008-09-18
    • PCT/JP2007074587
    • 2007-12-14
    • CASIO COMPUTER CO LTDMATSUMOTO HIROSHIYAMAGUCHI IKUHIROKOBAYASHI HIROKAZU
    • MATSUMOTO HIROSHIYAMAGUCHI IKUHIROKOBAYASHI HIROKAZU
    • H01L31/0224H01L29/417H01L29/786H01L31/0392H01L31/113
    • H01L31/022408H01L27/14678H01L31/03921H01L31/1136Y02E10/50
    • A photosensor includes a semiconductor thin film (5) for photoelectric conversion having a first side portion and a second side portion. A source electrode (9) extends in the longitudinal direction of the semiconductor thin film (5) and has a side edge portion (9b, 9c) that overlaps the first side portion of the semiconductor thin film (5), and a drain electrode (10) extends in the longitudinal direction and has a side edge portion (10b, 10c) that overlaps the second side portion of the semiconductor thin film (5). At least one of the side edge portions (9b, 9c, 10b, 10c) of the source and drain electrodes (9, 10) has protruding portions (9b, 10b) which are arranged along the longitudinal direction and which overlap the semiconductor thin film (5), and notched portions (9c, 10c) formed between the protruding portions (9b, 10b). An ohmic contact layer (7, 8) is formed between the semiconductor thin film (5) and the protruding portions (9b, 10b) of the at least one of the side edge portions (9b, 9c, 10b, 10c) of the source and drain electrodes (9, 10).
    • 光电传感器包括具有第一侧部和第二侧部的用于光电转换的半导体薄膜(5)。 源电极(9)在半导体薄膜(5)的长度方向上延伸,具有与半导体薄膜(5)的第一侧面重叠的侧缘部(9b,9c)和漏电极 10)在长度方向上延伸并且具有与半导体薄膜(5)的第二侧部重叠的侧边缘部分(10b,10c)。 源电极和漏电极(9,10)的侧边缘部分(9b,9c,10b,10c)中的至少一个具有突出部分(9b,10b),沿着纵向方向布置并与半导体薄膜 (5),以及形成在突出部(9b,10b)之间的切口部(9c,10c)。 在半导体薄膜(5)和源极的至少一个侧边缘部分(9b,9c,10b,10c)的突出部分(9b,10b)之间形成欧姆接触层(7,8) 和漏电极(9,10)。