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    • 5. 发明申请
    • APPARATUS AND METHOD FOR DIAMOND PRODUCTION
    • 钻石生产的装置和方法
    • WO2003040440A2
    • 2003-05-15
    • PCT/US2002/035659
    • 2002-11-07
    • CARNEGIE INSTITUTION OF WASHINGTONTHE UAB RESEARCH FOUNDATIONHEMLEY, Russell, J.MAO, Ho-kwangYAN, Chih-shiueVOHRA, Yogesh, K.
    • HEMLEY, Russell, J.MAO, Ho-kwangYAN, Chih-shiueVOHRA, Yogesh, K.
    • C30B
    • C30B25/105C30B25/12C30B29/04Y10T117/1004Y10T117/1008Y10T117/1016Y10T117/108
    • An apparatus for producing diamond in a deposition chamber including a heat/sinking holder for holding a diamond and for making thermal contact with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, a noncontact temperature measurement device positioned to measure temperature of the diamond across the growth surface of the diamond and a main process controller for receiving a temperature measurement from the noncontact temperature measurement device and controlling temperature of the growth surface such that all temperature gradients across the growth surface are less than 20° C. The method for producing diamond includes positioning diamond in a holder such that a thermal contact is made with a side surface of the diamond adjacent to an edge of a growth surface of the diamond, measuring temperature of the growth surface of the diamond to generate temperature measurements, controlling temperature of the growth surface based upon the temperature measurements, and growing single-crystal diamond by microwave plasma chemical vapor deposition on the growth surface, wherein a growth rate of the diamond is greater than 1 micrometer per hour.
    • 一种用于在沉积室中制造金刚石的装置,包括用于保持金刚石并用于与金刚石的生长表面的边缘相邻的菱形的侧表面进行热接触的加热/沉没支架,非接触式温度测量装置, 测量钻石在金刚石的生长表面上的温度,以及用于接收来自非接触式温度测量装置的温度测量并控制生长表面的温度的主过程控制器,使得生长表面上的所有温度梯度都小于20℃ 制造金刚石的方法包括将金刚石定位在保持器中,使得与钻石的生长表面的边缘相邻的金刚石的侧表面进行热接触,测量金刚石的生长表面的温度以产生温度 测量,基于温度测量控制生长表面的温度 杂质和通过微波等离子体化学气相沉积在生长表面上生长的单晶金刚石,其中金刚石的生长速率大于1微米/小时。