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1. 发明申请

WO2005124989A1 DRIVING APPARATUS FOR VIBRATION TYPE ACTUATOR AND DRIVING METHOD FOR VIBRATION TYPE ACTUATOR 审中-公开
标题翻译：用于振动式执行器的驱动装置和用于振动式执行器的驱动方法
公开(公告)号：WO2005124989A1
公开(公告)日：2005-12-29
申请号：PCT/JP2005/011175
申请日：2005-06-10
申请人： CANON KABUSHIKI KAISHA , KATAOKA, Kenichi
发明人： KATAOKA, Kenichi
IPC分类号： H02N2/00
CPC分类号： H01L41/042 , H02N2/145
摘要： A driving apparatus for a vibration type actuator is disclosed, which can boost the power source voltage and can reduce the cost and the size of the apparatus. The driving apparatus comprises an inductor being connected to a power source, a pulse generation circuit generating a first and second pulse signals that have a phase difference; a first switching element switching a supply operation for supplying the energy accumulated in the inductor to the electro-mechanical energy conversion element according to the first pulse signal; and a second switching element switching a discharge operation for discharging the energy accumulated in the electro-mechanical energy conversion element according to the second pulse signal.
摘要翻译：公开了一种用于振动型致动器的驱动装置，其可以提高电源电压并且可以降低装置的成本和尺寸。所述驱动装置包括连接到电源的电感器，产生具有相位差的第一和第二脉冲信号的脉冲发生电路; 第一开关元件根据第一脉冲信号切换供应操作以将累积在电感器中的能量提供给机电能量转换元件; 以及第二开关元件，用于根据第二脉冲信号切换放电操作，用于对蓄电在机电能转换元件中的能量进行放电。

2. 发明申请

WO2012086562A1 CONTROL APPARATUS FOR VIBRATION TYPE ACTUATOR 审中-公开
标题翻译：振动式执行机构的控制装置
公开(公告)号：WO2012086562A1
公开(公告)日：2012-06-28
申请号：PCT/JP2011/079281
申请日：2011-12-13
申请人： CANON KABUSHIKI KAISHA , KATAOKA, Kenichi
发明人： KATAOKA, Kenichi
IPC分类号： H02N2/14
CPC分类号： H02P25/032 , H02N2/142
摘要： A control apparatus for a vibration type actuator using a vibration wave excited by a vibrating member, a movable member in contact with or indirectly connected to the vibrating member, including a command unit which gives a command indicating at least one parameter, an AC voltage generator (5) which generates the AC voltage for applying the excitation force to the vibrating member, a variable adding unit (10, 11) which adds a predetermined variable to each of one or more parameters, a frequency response characteristic measuring unit (12) which receives as an input a variable output and outputs a physical quantity and obtains a frequency response characteristic at one or more predetermined frequencies, a resonance frequency estimation unit (13) which estimates a resonance frequency of the vibrating member, and a frequency range limiter (9) which determines a frequency range for the AC voltage output by the AC voltage generator.
摘要翻译：一种用于振动型致动器的控制装置，其使用由振动构件激励的振动波，与振动构件接触或间接连接的可动构件，包括给出指示至少一个参数的指令的指令单元，AC电压发生器（5），其产生用于向振动部件施加激励力的交流电压;对于一个或多个参数中的每一个增加预定变量的可变加法单元（10,11）;频率响应特性测量单元（12），其接收可变输出作为输入并输出物理量并获得一个或多个预定频率的频率响应特性，估计振动元件的共振频率的谐振频率估计单元（13）和频率范围限制器（9 ），其确定由AC电压发生器输出的AC电压的频率范围。

3. 发明申请

WO2012081378A1 CONTROLLING DEVICE FOR VIBRATION TYPE ACTUATOR 审中-公开
标题翻译：用于振动式执行机构的控制装置
公开(公告)号：WO2012081378A1
公开(公告)日：2012-06-21
申请号：PCT/JP2011/077270
申请日：2011-11-18
申请人： CANON KABUSHIKI KAISHA , KATAOKA, Kenichi
发明人： KATAOKA, Kenichi
IPC分类号： H02N2/14
CPC分类号： H01L41/09 , H02N2/106 , H02N2/142
摘要： A controlling device for a vibration type actuator including: an AC voltage generating unit in which at least one of parameters, namely a frequency, an amplitude, and a phase of an AC voltage for use in applying an excitation force to a vibrating member is settable; a measuring unit which measures some physical quantities caused by a vibration of the vibrating member; a variation imparting unit which imparts a predetermined variation to at least one of the parameters of the AC voltage; a frequency-response characteristic measuring unit which finds a frequency-response characteristic of at least one predetermined frequency between a first signal according to the variation and a second signal according to the measured physical quantity; and a frequency controlling unit which controls the frequency of the AC voltage according to the frequency-response characteristic.
摘要翻译：一种用于振动型致动器的控制装置，包括：交流电压产生单元，其中至少一个参数，即用于向振动部件施加激励力的交流电压的频率，振幅和相位可以被设定 ; 测量单元，其测量由所述振动构件的振动引起的一些物理量; 变化赋予单元，其向所述AC电压的至少一个参数赋予预定的变化; 频率响应特性测量单元，根据所测量的物理量，根据变化找到第一信号和第二信号之间的至少一个预定频率的频率响应特性; 以及频率控制单元，其根据频率响应特性来控制AC电压的频率。

4. 发明申请

WO2010140642A1 PROBE CARD 审中-公开
标题翻译：探针卡
公开(公告)号：WO2010140642A1
公开(公告)日：2010-12-09
申请号：PCT/JP2010/059399
申请日：2010-05-27
申请人： TOKYO ELECTRON LIMITED , KATAOKA, Kenichi
发明人： KATAOKA, Kenichi
IPC分类号： H01L21/66 , G01R1/073
CPC分类号： G01R31/2887 , G01R31/3025
摘要： A probe card to be used with a tester that tests an electrical characteristic of an electronic circuit formed in a wafer is disclosed. The probe card includes a first transmitter/receiver component that is mounted on a lower surface of a tester board and electrically connected to the tester; a second transmitter/receiver component that is provided to oppose the first transmitter/receiver component and carries out contactless transmission/reception of signals with the first transmitter/receiver component; plural probes that are configured to come in contact with corresponding electrode pads of the electronic circuit and electrically connect the corresponding electrode pads and the second transmitter/receiver component; an expandable chamber having flexibility so that the expandable chamber may be inflated by introducing gas thereinto, thereby moving the plural probes away from the tester board.
摘要翻译：公开了一种与测试晶片中形成的电子电路的电气特性的测试仪一起使用的探针卡。探针卡包括安装在测试器板的下表面上并电连接到测试器的第一发射器/接收器部件; 第二发射机/接收机组件，其被提供以与所述第一发射机/接收机组件相对，并且执行与所述第一发射机/接收机组件的信号的非接触式发射/接收; 多个探针被配置为与电子电路的相应电极焊盘接触并且电连接相应的电极焊盘和第二发射器/接收器部件; 具有柔性的可膨胀室，使得可膨胀室可以通过将气体引入其中而膨胀，从而将多个探针移离测试器板。

5. 发明申请

WO2010140643A1 TEST UNIT AND TEST SYSTEM 审中-公开
标题翻译：测试单元和测试系统
公开(公告)号：WO2010140643A1
公开(公告)日：2010-12-09
申请号：PCT/JP2010/059400
申请日：2010-05-27
申请人： TOKYO ELECTRON LIMITED , SATO, Yohei , KATAOKA, Kenichi
发明人： SATO, Yohei , KATAOKA, Kenichi
IPC分类号： H01L21/66 , G01R31/28
CPC分类号： G01R31/2887 , G01R31/3025 , H01L2924/0002 , H01L2924/00
摘要： A test unit to be used with a tester that tests an electrical characteristic of a circuit formed in a wafer includes a tester board electrically connected to the tester; a first wireless port mounted on a lower surface of the tester board and electrically connected to the tester; a probe board that includes a probe to be in contact with an electrode pad of the electronic circuit, and is configured so that the probe board may be transferred along with the wafer into the system box while the probe and the electrode pad are in contact with each other; a second wireless port that is mounted on an upper surface of the probe board and electrically connected to the probe, and carries out contactless transmission/reception with the first wireless port; a chuck plate that is away from the tester board, and holds the probe board and the wafer; and a flexible expandable chamber that may be inflated by introducing gas thereinto.
摘要翻译：与测试晶片中形成的电路的电特性的测试器一起使用的测试单元包括电连接到测试器的测试器板; 安装在测试器板的下表面上并电连接到测试器的第一无线端口; 探针板，其包括与电子电路的电极焊盘接触的探针，并且被构造成使得探针板可以与晶片一起转移到系统箱中，同时探针和电极焊盘与彼此; 第二无线端口，其安装在所述探针板的上表面上并电连接到所述探针，并且与所述第一无线端口执行非接触式发送/接收; 离开测试器板的夹盘，并保持探针板和晶片; 以及可以通过将气体引入其而膨胀的柔性可膨胀室。

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