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1. 发明申请

WO2005015193A1 FIELD-EFFECT TRANSISTOR, SENSOR USING IT, AND PRODUCTION METHOD THEREOF 审中-公开
标题翻译：现场效应晶体管，使用它的传感器及其生产方法
公开(公告)号：WO2005015193A1
公开(公告)日：2005-02-17
申请号：PCT/JP2004/011529
申请日：2004-08-04
申请人： CANON KABUSHIKI KAISHA , FUKUTANI, Kazuhiko , YONEHARA, Takao , MIYATA, Hirokatsu , ISHIDA, Yohei , DEN, Tohru
发明人： FUKUTANI, Kazuhiko , YONEHARA, Takao , MIYATA, Hirokatsu , ISHIDA, Yohei , DEN, Tohru
IPC分类号： G01N27/414
CPC分类号： G01N27/4146 , Y10S438/96 , Y10T436/11 , Y10T436/114165
摘要： A sensor which has high measuring sensitivity and is excellent in response is provided by forming a porous film (106) in a sensitive section of a field-effect transistor. It comprises a porous body, which is formed on a sensitive section (here, a gate insulating film (104)) of the field-effect transistor and has cylindrical pores (195) which are formed almost perpendicularly to a substrate, and the field-effect transistor. It uses as a porous film a porous film which is made of a semiconductor material whose main component (except oxygen) is silicon, germanium, or a composite of silicon and germaninum, or a porous film made of an insulation material whose main component is silicon oxide, which has pores perpendicular to the substrate.
摘要翻译：通过在场效应晶体管的敏感部分中形成多孔膜（106）来提供具有高测量灵敏度并且响应极好的传感器。它包括形成在场效应晶体管的敏感部分（这里是栅极绝缘膜（104））上并具有几乎垂直于基板形成的圆柱形孔（195）的多孔体，效应晶体管。作为多孔膜，使用由主要成分（氧除外）为硅，锗或硅与锗的复合体的半导体材料制成的多孔膜，或由主要成分为硅的绝缘材料制成的多孔膜氧化物，其具有垂直于衬底的孔。

2. 发明申请

WO2004055872A2 COLUMNAR STRUCTURED MATERIAL AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：柱结构材料及其制造方法
公开(公告)号：WO2004055872A2
公开(公告)日：2004-07-01
申请号：PCT/JP2003/015950
申请日：2003-12-12
申请人： CANON KABUSHIKI KAISHA , OGAWA, Miki , MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OKURA, Hiroshi , DEN, Tohru , FUKUTANI, Kazuhiko
发明人： OGAWA, Miki , MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OKURA, Hiroshi , DEN, Tohru , FUKUTANI, Kazuhiko
IPC分类号： H01L21/033
CPC分类号： C23C14/5873 , B82Y10/00 , B82Y30/00 , C23C14/165 , H01L21/0331 , H01L21/0337 , H01L21/3086 , H01L21/32051 , H01L29/0657
摘要： A method of forming, on a substrate, minute-sized columnar portions of a columnar structured material at minute intervals, and a columnar structured material formed by the manufacturing method. A columnar structured material is formed through an etching process in which a pattern of minute dots formed on the substrate is utilized as a mask. The pattern of the minute dots is obtained by introducing a mask material into columnar microholes of a porous film formed on the substrate and then removing the porous film. The porous film is formed by removing columnar substances from a structured material in which the columnar substances which are so formed as to contain a first component are dispersed in a matrix which is made of another component and is so formed as to contain a second component that can form a eutectic together with the first component.
摘要翻译：在基板上以微小的间隔在柱状结构材料的微小尺寸的柱状部分上形成通过该制造方法形成的柱状结构材料的方法。通过蚀刻工艺形成柱状结构材料，其中使用形成在基板上的微小点的图案作为掩模。通过将掩模材料引入形成在基板上的多孔膜的柱状微孔中，然后除去多孔膜，获得微小点的图案。通过从结构材料中除去柱状物质形成多孔膜，其中将形成为含有第一成分的柱状物质分散在由另一成分制成的基体中，并形成为含有第二成分可以与第一组分一起形成共晶体。

3. 发明申请

WO2004054924A1 COLUMNAR STRUCTURED MATERIAL, ELECTRODE HAVING COLUMNAR STRUCTURED MATERIAL, AND PRODUCTION METHOD THEREFOR 审中-公开
标题翻译：柱结构材料，具有柱结构材料的电极及其生产方法
公开(公告)号：WO2004054924A1
公开(公告)日：2004-07-01
申请号：PCT/JP2003/015949
申请日：2003-12-12
申请人： CANON KABUSHIKI KAISHA , MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OGAWA, Miki , OKURA, Hiroshi , FUKUTANI, Kazuhiko , DEN, Tohru
发明人： MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OGAWA, Miki , OKURA, Hiroshi , FUKUTANI, Kazuhiko , DEN, Tohru
IPC分类号： B82B3/00
CPC分类号： C30B7/00 , C30B7/005 , C30B29/605
摘要： To obtain a microcolumnar structured material having a desired material. The columnar structured material includes columnar members 15 obtained by introducing a filler into columnar holes formed in a porous material. The porous material has the columnar holes 14 formed by removing columnar substances from a structured material in which the columnar substances 12 containing a first component are dispersed in a matrix member 13 containing a second component capable of forming a eutectic with the first component. The matrix member 13 may be removed. In the columnar structured material, the filler is a conductive material, and an electrode can be structured by electrically connecting the conductive materials in at least a part of a plurality of holes to a conductor.
摘要翻译：获得具有所需材料的微柱结构材料。柱状结构材料包括通过将填料引入形成在多孔材料中的柱状孔中获得的柱状构件15。多孔材料具有通过从其中含有第一成分的柱状物质12分散在包含能够与第一成分形成共晶的第二成分的基质部件13中的结构材料除去柱状物质而形成的柱状孔14。矩阵构件13可以被移除。在柱状结构材料中，填料是导电材料，并且电极可以通过将多个孔的至少一部分中的导电材料电连接到导体来构造。

4. 发明申请

WO2004055912A1 THERMOELECTRIC CONVERSION MATERIAL, THERMOELECTRIC CONVERSION DEVICE AND MANUFACTURING METHOD THEREOF 审中-公开
标题翻译：热电转换材料，热电转换装置及其制造方法
公开(公告)号：WO2004055912A1
公开(公告)日：2004-07-01
申请号：PCT/JP2003/015951
申请日：2003-12-12
申请人： CANON KABUSHIKI KAISHA , FUKUTANI, Kazuhiko , MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OGAWA, Miki , OKURA, Hiroshi , DEN, Tohru
发明人： FUKUTANI, Kazuhiko , MIYATA, Hirokatsu , OTTO, Albrecht , KURIYAMA, Akira , OGAWA, Miki , OKURA, Hiroshi , DEN, Tohru
IPC分类号： H01L35/34
CPC分类号： C30B29/605 , H01L35/32 , H01L35/34 , Y10T428/249953
摘要： A thermoelectric conversion material and a thermoelectric conversion device having a novel structure of an increased figure of merit are provided by forming nano-wires of thermoelectric material in a smaller cross-sectional size. The thermoelectric conversion material comprises nano-wires obtained by introducing a thermoelectric material (semiconductor material) into columnar pores of a porous body. The porous body is formed by providing a structure in which columns of a column-forming material containing a first component (for example, aluminum) are distributed in a matrix containing a second component (for example, silicon or germanium or a mixture of them) being eutectic with the first component, and then removing the column-forming material from the structure. The average diameter of the nano-wires of the thermoelectric material is 0.5 nm or more and less than 15 nm, and the spacing of the nano-wires is 5 nm or more and less than 20 nm.
摘要翻译：通过以更小的横截面尺寸形成热电材料的纳米线，提供具有增加的品质因数的新颖结构的热电转换材料和热电转换装置。热电转换材料包括通过将热电材料（半导体材料）引入到多孔体的柱状孔中而获得的纳米线。多孔体通过提供一种结构形成，其中含有第一组分（例如铝）的成柱材料的塔分布在含有第二组分（例如硅或锗或它们的混合物）的基质中，与第一组分共晶，然后从结构中除去柱形成材料。热电材料的纳米线的平均直径为0.5nm以上且小于15nm，纳米线的间隔为5nm以上且小于20nm。

5. 发明申请

WO2008072528A1 LIQUID CRYSTAL OPTICAL DEVICE MANUFACTURING PROCESS 审中-公开
标题翻译：液晶光学器件制造工艺
公开(公告)号：WO2008072528A1
公开(公告)日：2008-06-19
申请号：PCT/JP2007/073531
申请日：2007-11-29
申请人： CANON KABUSHIKI KAISHA , SAKAI, Akira , MIYATA, Hirokatsu , ASAO, Yasufumi , ISHIDA, Yohei , MARTIN, Philip J. , BENDAVID, Avi
发明人： SAKAI, Akira , MIYATA, Hirokatsu , ASAO, Yasufumi , ISHIDA, Yohei , MARTIN, Philip J. , BENDAVID, Avi
IPC分类号： G02F1/1337 , C23C14/24
CPC分类号： G02F1/133734
摘要： A manufacturing method of a liquid crystal optical device is provided including an alignment film forming step of forming an alignment film containing silicon oxide on a substrate, and a liquid crystal cell forming step of disposing a pair of substrates at least one of which the alignment film has been formed on, opposite to each other interposing a liquid crystal therebetween. In the alignment film forming step, the substrate surface is bombarded with a plasma beam generated by vacuum arc discharge using a cathode containing silicon, where the substrate is disposed on the course of the plasma beam obliquely with an angle. When the plasma beam bombards the substrate surface, plasma ions in the plasma beam have higher kinetic energy or higher flux density than plasma ions in a plasma beam which, if bombarding the substrate obliquely at the angle, form a film having a column structure.
摘要翻译：提供了一种液晶光学器件的制造方法，包括：在基板上形成含有氧化硅的取向膜的取向膜形成工序;以及液晶单元形成工序，配置一对基板，至少其中一个取向膜彼此相对地形成在其间插入液晶。在取向膜形成步骤中，使用包含硅的阴极通过真空电弧放电产生的等离子体束来轰击衬底表面，其中衬底以等角度倾斜地设置在角度上。当等离子体束轰击衬底表面时，等离子体束中的等离子体离子具有比等离子体束中的等离子体离子更高的动能或更高的通量密度，如果以倾斜方式以该角度轰击衬底，则其形成具有柱结构的膜。

6. 发明申请

WO2008150020A1 LIQUID CRYSTAL DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：液晶装置及其制造方法
公开(公告)号：WO2008150020A1
公开(公告)日：2008-12-11
申请号：PCT/JP2008/060722
申请日：2008-06-05
申请人： CANON KABUSHIKI KAISHA , SAKAI, Akira , ISHIDA, Yohei , ASAO, Yasufumi , MIYATA, Hirokatsu , MARTIN, Philip, J.
发明人： SAKAI, Akira , ISHIDA, Yohei , ASAO, Yasufumi , MIYATA, Hirokatsu , MARTIN, Philip, J.
IPC分类号： G02F1/1337 , H01J37/32
CPC分类号： G02F1/133734 , C23C14/0605 , C23C14/325 , G02F2001/133738 , H01J37/32055
摘要： A liquid crystal device has a pair of substrates (301), an alignment film (303) formed at least on one of the pair of substrates and liquid crystal (304) showing an orientation defined by the alignment film. The alignment film is a carbon film having a cross-sectional structure inclined relative to the direction of the film thickness by a constant angle. The carbon film is formed by filtered arc deposition.
摘要翻译：液晶装置具有一对基板（301），形成在一对基板中的至少一个基板上的取向膜（303）和表示取向膜所定义取向的液晶（304）。取向膜是具有相对于膜厚方向以一定角度倾斜的截面结构的碳膜。碳膜通过过滤电弧沉积形成。

7. 发明申请

WO2008108477A1 FILM FORMING METHOD AND PRODUCTION PROCESS OF LIQUID CRYSTAL DISPLAY DEVICE 审中-公开
标题翻译：液晶显示装置的成膜方法和制备方法
公开(公告)号：WO2008108477A1
公开(公告)日：2008-09-12
申请号：PCT/JP2008/054229
申请日：2008-03-03
申请人： CANON KABUSHIKI KAISHA , ISHIDA, Yohei , MIYATA, Hirokatsu , SAKAI, Akira , ASAO, Yasufumi
发明人： ISHIDA, Yohei , MIYATA, Hirokatsu , SAKAI, Akira , ASAO, Yasufumi
IPC分类号： G02F1/1337 , C23C14/22
CPC分类号： C23C14/226 , C23C14/22 , C23C14/54 , C23C14/541 , G02F1/133734
摘要： A method of forming a film on a substrate is constituted by a step of depositing a material vaporized from an evaporation source onto a surface of a substrate while inclining the surface of the substrate with respect to a direction from the evaporation source to the substrate, and a step of providing the surface of the substrate with an energy depending on a deposition angle.
摘要翻译：在基板上形成膜的方法由以下步骤构成：将从蒸发源蒸发的材料沉积到基板的表面上，同时使基板的表面相对于从蒸发源到基板的方向倾斜，并且提供基板沉积角度的能量的步骤。

8. 发明申请

WO2011152437A1 X-RAY MIRROR, METHOD OF PRODUCING THE MIRROR, AND X-RAY APPARATUS 审中-公开
标题翻译： X射线镜，生产镜子的方法和X射线装置
公开(公告)号：WO2011152437A1
公开(公告)日：2011-12-08
申请号：PCT/JP2011/062559
申请日：2011-05-25
申请人： CANON KABUSHIKI KAISHA , KUBO, Wataru , OKAMOTO, Kohei , KOMOTO, Atsushi , MIYATA, Hirokatsu
发明人： KUBO, Wataru , OKAMOTO, Kohei , KOMOTO, Atsushi , MIYATA, Hirokatsu
IPC分类号： G21K1/06
CPC分类号： G21K1/062 , B05D5/00 , G21K1/06 , G21K2201/061 , H01J2235/168
摘要： Provided is an X-ray mirror, a method of producing the X-rat mirror, and an X-ray apparatus. The X-ray mirror comprises: a substrate; and an X-ray reflecting structure formed of multiple regions present on the substrate, in which the X-ray reflecting structure comprises a mesostructured film that has the multiple regions having different structural periods in a normal direction of the substrate. Thus, there can be reduced the absorption loss of an X-ray of the mirror that reflects X-rays having different energies.
摘要翻译：本发明提供一种X射线镜，X射线镜的制造方法以及X射线装置。 X射线镜包括：基片; 以及由存在于基板上的多个区域形成的X射线反射结构，其中，X射线反射结构包括具有在基板的法线方向上具有不同结构周期的多个区域的介孔结构膜。因此，可以减少反射具有不同能量的X射线的反射镜的X射线的吸收损失。

9. 发明申请

WO2012039338A1 X-RAY WAVEGUIDE 审中-公开
标题翻译： X射线波形
公开(公告)号：WO2012039338A1
公开(公告)日：2012-03-29
申请号：PCT/JP2011/071064
申请日：2011-09-08
申请人： CANON KABUSHIKI KAISHA , KOMOTO, Atsushi , OKAMOTO, Kohei , MIYATA, Hirokatsu
发明人： KOMOTO, Atsushi , OKAMOTO, Kohei , MIYATA, Hirokatsu
IPC分类号： G21K1/06
CPC分类号： G21K1/062 , G21K1/067 , G21K2201/061
摘要： An X-ray waveguide includes a core (101) to guide X-rays in a wavelength band where the real part of the refractive index of a material is 1 or less, and a cladding (102) to confine the X-rays to the core, in which the core includes a periodic structure having basic structures that contain materials having different real parts of refractive indices, the basic structures being periodically arranged, a low electron density layer (103) is arranged between the core and the cladding and has a lower electron density than that of a material having the highest electron density of all the materials constituting the core, and the critical angle for total reflection of the X-rays at the boundary between the cladding and the low electron density layer is larger than the Bragg angle attributed to the periodicity of the basic structures in the periodic structure of the core.
摘要翻译： X射线波导包括用于引导材料的折射率的实部的1个以下的波长带的X射线的芯部（101）以及将X射线限制到芯，其中芯包括具有包含具有不同实际折射率部分的材料的基本结构的周期性结构，基本结构周期性地布置，低电子密度层（103）布置在芯和包层之间，并且具有比构成芯的全部材料的电子密度最高的材料的电子密度低，并且包层和低电子密度层之间的边界处的X射线的全反射的临界角大于布拉格角度归因于核心周期性结构中基本结构的周期性。

10. 发明申请

WO2005014480A1 MESOSTRUCTURED FILM, MESPOROUS MATERIAL FILM, AND PRODUCTION METHODS FOR THE SAME 审中-公开
标题翻译：组合膜，多孔材料薄膜及其生产方法
公开(公告)号：WO2005014480A1
公开(公告)日：2005-02-17
申请号：PCT/JP2004/011582
申请日：2004-08-05
申请人： CANON KABUSHIKI KAISHA , MIYATA, Hirokatsu , KAWASHIMA, Yasuhiro , KURODA, Kazuyuki
发明人： MIYATA, Hirokatsu , KAWASHIMA, Yasuhiro , KURODA, Kazuyuki
IPC分类号： C01B37/02
CPC分类号： G21K1/06 , C01B37/02 , Y10T428/24322 , Y10T428/24496 , Y10T428/249967 , Y10T428/249969 , Y10T428/31504
摘要： A mesostructured film is provided having a structure in which surfactant molecular assemblies are regularly arranged three-dimensionally. A polymer compound thin film is formed on the substrate surface through spin coating or the like, and a rotating roller wrapped with a cloth is pressed against the polymer film for rubbing in one direction. The polymer material includes polyimide, polyamide, and polystyrene. The substrate includes a silica glass substrate and a silicon substrate. The mesostructured film can be formed by retaining the substrate in an aqueous solution containing a surfactant, silicon alkoxide, and acid. After being retained in the solution, the substrate is heated at about 60 to 120 ° C for several hours to several days for reaction. The surfactant includes C 18 H 37 (OCH 2 CH 2 ) 20 0H and C 16 H 33 (OCH 2 CH 2 ) 20 0H . The alkoxide included tetraethoxysilane, tetramethoxysilane, and tetrapropoxysilane. Hydrochloric acid, nitric acid, or sulfuric acid'is used as a catalyst.
摘要翻译：提供了具有其中表面活性剂分子组件被三维规则地排列的结构的介孔结构膜。通过旋涂等在基材表面上形成高分子化合物薄膜，将用布覆盖的旋转辊按压在聚合物膜上以在一个方向上摩擦。聚合物材料包括聚酰亚胺，聚酰胺和聚苯乙烯。基板包括石英玻璃基板和硅基板。可以通过将基材保持在含有表面活性剂，硅醇盐和酸的水溶液中来形成介孔结构膜。在保留在溶液中之后，将基底在约60至120℃下加热数小时至数天以进行反应。表面活性剂包括C18H37（OCH2CH2）200H和C16H33（OCH2CH2）200H。醇盐包括四乙氧基硅烷，四甲氧基硅烷和四丙氧基硅烷。将盐酸，硝酸或硫酸用作催化剂。

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