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1. 发明申请

WO2010011403A3 LINEAR DRIVE CRYOGENIC REFRIGERATOR 审中-公开
标题翻译：线性驱动低温制冷机
公开(公告)号：WO2010011403A3
公开(公告)日：2010-03-18
申请号：PCT/US2009044632
申请日：2009-05-20
申请人： BROOKS AUTOMATION INC , MORRIS RONALD N , ANDEEN BRUCE R , BARTLETT ALLEN J
发明人： MORRIS RONALD N , ANDEEN BRUCE R , BARTLETT ALLEN J
IPC分类号： F25B9/00 , F04B37/08
CPC分类号： F04B37/08 , F25B9/10 , F25B9/14 , F25B2400/073
摘要： A cryogenic refrigerator has a refrigeration cylinder and at least two displacers. Each displacer reciprocates in the refrigeration cylinder and moves refrigeration gas through the refrigeration cylinder. A regenerator cools the refrigeration gas, and gas control valves admit high pressure gas into the refrigeration cylinder and exhaust gas from the refrigeration cylinder. The refrigerator also has linear motors operatively connected to displacers, and the linear motors drive the displacers in reciprocating movement. A position sensor is provided to determine a parameter of the displacers during reciprocation. A controller is operatively connected to the linear motors to control the linear motors. The controller controls a parameter of the two displacers during reciprocation. The parameter can be stroke length, stroke speed, stroke phase or another parameter of the displacer for temperature control of the cryogenic refrigerator. The cryogenic refrigerator may also include a device to remove vibration.
摘要翻译：低温制冷机具有制冷缸和至少两个置换器。每个置换器在冷藏缸内往复运动，并使冷藏气体通过冷藏缸。再生器冷却制冷气体，气体控制阀允许高压气体进入制冷气缸并从制冷气缸排出废气。冰箱还具有可操作地连接到置换器的线性马达，并且线性马达驱动置换器往复运动。提供位置传感器以确定往复运动期间置换器的参数。控制器可操作地连接到线性电机以控制线性电机。控制器在往复运动期间控制两个置换器的参数。该参数可以是行程长度，行程速度，行程阶段或置换器的其他参数以用于低温制冷机的温度控制。低温制冷机还可以包括用于消除振动的装置。

2. 发明申请

WO2012016192A2 MULTI-REFRIGERATOR HIGH SPEED CRYOPUMP 审中-公开
标题翻译：多冰箱高速冷冻机
公开(公告)号：WO2012016192A2
公开(公告)日：2012-02-02
申请号：PCT/US2011045977
申请日：2011-07-29
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , EACOBACCI MICHAEL J JR , SYSSOEV SERGEI
发明人： BARTLETT ALLEN J , EACOBACCI MICHAEL J JR , SYSSOEV SERGEI
IPC分类号： F25D13/02
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14 , F25B7/00 , F25B9/10 , F25D19/006
摘要： A refrigeration system includes a first refrigerator having a first cooling load at a first temperature and a second refrigerator having a second cooling load at a second temperature. Also included is a thermal coupling between the two refrigerators to share thermal load, e.g., cooling load, between the refrigerators, the coupling being restricted to maintain a difference between the first and second temperatures. A cryopump includes a first refrigerator having at least first and second stages, and a second refrigerator. A thermal coupling between the first stage of the first refrigerator and a cold end of the second refrigerator is restricted to maintain a temperature difference between the cold end of the second refrigerator and the first stage of the first refrigerator. The cryopump also includes a radiation shield in thermal contact with the cold end of the second refrigerator, and a condensing surface, spaced from and surrounded by the radiation shield, and in thermal contact with a second stage, e.g., coldest stage, of the first refrigerator. The restricted thermal coupling can be configured to balance the cooling load on the two refrigerators. The thermal coupling can be formed in a base plate of the radiation shield, the base plate having varying cross-sectional area to maintain a substantially uniform temperature at a periphery of the base plate.
摘要翻译：一种制冷系统包括具有处于第一温度的第一冷却负载的第一冰箱和具有处于第二温度的第二冷却负载的第二冰箱。还包括两个制冷机之间的热耦合以在冰箱之间共享热负载（例如，冷却负载），耦合被限制为保持第一和第二温度之间的差异。低温泵包括具有至少第一和第二级的第一冰箱和第二冰箱。第一冰箱的第一级与第二冰箱的冷端之间的热耦合被限制以维持第二冰箱的冷端与第一冰箱的第一级之间的温差。低温泵还包括与第二冰箱的冷端热接触的辐射护罩以及与辐射护罩隔开并由辐射护罩围绕并且与第一冷却器的第二级（例如最冷级）热接触的冷凝表面冰箱。受限的热耦合可以配置为平衡两个冰箱的冷负荷。热耦合可形成在辐射屏蔽件的基板中，基板具有变化的横截面面积以在基板的周边处维持基本上均匀的温度。

3. 发明申请

WO2012071540A3 CRYOPUMP WITH CONTROLLED HYDROGEN GAS RELEASE 审中-公开
标题翻译：具有受控氢气释放的CRYOPUMP
公开(公告)号：WO2012071540A3
公开(公告)日：2012-07-19
申请号：PCT/US2011062098
申请日：2011-11-23
申请人： BROOKS AUTOMATION INC , EACOBACCI MICHAEL J , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A
发明人： EACOBACCI MICHAEL J , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A
IPC分类号： F04B37/08 , F04B37/14
CPC分类号： B01D8/00 , F04B37/08 , F04B37/14
摘要： A cryopump system includes a cryopump having a first cooling stage and a second cooling stage connected to the first cooling stage, the second cooling stage including a gas adsorber having a hydrogen adsorbing capacity of at least about 2 standard liters. The thermal storage capacity of the second cooling stage is sufficient to enable control of hydrogen pressure within the cryopump to satisfy ignition safety limits and limits on hydrogen flow rate in an exhaust line to be within limits of an abatement system to be coupled to the cryopump, upon warming of the second cooling stage during regeneration of up to a fully loaded cryopump.
摘要翻译：一种低温泵系统包括具有第一冷却阶段和连接到第一冷却阶段的第二冷却阶段的低温泵，第二冷却阶段包括具有至少约2标准升的氢气吸附能力的气体吸附器。第二冷却阶段的热存储容量足以实现低温泵内的氢气压力的控制以满足点火安全限制并且排气管线中的氢气流量限制在与低温泵连接的减排系统的限制内，在第二冷却阶段升温期间再生至满负荷低温泵。

4. 发明申请

WO2009117693A3 METHOD OF RECLAIMING AND STORING A VALUABLE PROCESS GAS 审中-公开
标题翻译：回收和储存有价值工艺气体的方法
公开(公告)号：WO2009117693A3
公开(公告)日：2010-01-07
申请号：PCT/US2009037862
申请日：2009-03-20
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , BALL-DIFAZIO DOREEN J
发明人： BARTLETT ALLEN J , BALL-DIFAZIO DOREEN J
IPC分类号： H01L21/203 , H01L21/205
CPC分类号： B01D8/00
摘要： Cryogenic vacuum pump method for pumping a process chamber and reclaiming process gas. The valuable process gas may include a valuable gas, such as Xenon, Krypton or other rare gases, that is too expensive to be used in a once through loop of a semiconductor processing operation. The cryogenic vacuum pump has a refrigerator and a cryogenic panel in thermal contact with the refrigerator. The cryogenic vacuum pump also has a circuit. The circuit control heating to a first temperature in which a first process gas changes from a condensed phase while at least a second process gas remains in the condensed phase. The circuit also controls heating to a second temperature to reclaim the second process gas remaining in the condensed phase once the first process gas is removed.
摘要翻译：用于泵送处理室和回收工艺气体的低温真空泵方法。有价值的工艺气体可以包括贵重的气体，例如氙气，氪气或其他稀有气体，其太贵，不能用于半导体处理操作的一次循环。低温真空泵具有冰箱和与冰箱热接触的低温面板。低温真空泵也有电路。电路控制加热到第一温度，其中第一处理气体从凝聚相变化，而至少第二处理气体保留在冷凝相中。一旦除去第一处理气体，电路也将加热控制到第二温度以回收剩余在冷凝相中的第二工艺气体。

5. 发明申请

WO2008143766A3 ADAPTOR FOR CLUSTER TOOL CHAMBERS 审中-公开
标题翻译：适用于集群工具的适配器
公开(公告)号：WO2008143766A3
公开(公告)日：2009-04-09
申请号：PCT/US2008005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
发明人： BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

6. 发明申请

WO2012109304A2 CRYOPUMP 审中-公开
标题翻译：低温泵
公开(公告)号：WO2012109304A2
公开(公告)日：2012-08-16
申请号：PCT/US2012024243
申请日：2012-02-08
申请人： BROOKS AUTOMATION INC , SYSSOEV SERGEI , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A , EACOBACCI MICAHEL J
发明人： SYSSOEV SERGEI , BARTLETT ALLEN J , CASELLO JOHN J , WELLS JEFFREY A , EACOBACCI MICAHEL J
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , B01D8/00 , Y10T29/49236
摘要： A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array.
摘要翻译：低温泵具有易于制造的具有改进的气体分布的前部挡板和具有用于捕获II型气体的大面积第二级阵列板。低温泵具有第一级正面挡板，该第一级正面挡板具有从孔口弯曲并连接到孔口的孔口和翼片。低温泵具有面积大于第二级阵列的冷却挡板的第二级顶板。

7. 发明申请

WO2012122114A2 HELIUM MANAGEMENT CONTROL SYSTEM 审中-公开
标题翻译： HELIUM管理控制系统
公开(公告)号：WO2012122114A2
公开(公告)日：2012-09-13
申请号：PCT/US2012027755
申请日：2012-03-05
申请人： BROOKS AUTOMATION INC , DUMAS OLIVER J , BUONPANE MAUREEN C , BALL-DIFAZIO DOREEN J , MORRIS N RONALD , BARTLETT ALLEN J , LORANGER LEONARD A , CHOPY JOSEPH JR , SULLIVAN ROBERT P , VARONE JOHN J , AMUNDSEN PAUL E
发明人： DUMAS OLIVER J , BUONPANE MAUREEN C , BALL-DIFAZIO DOREEN J , MORRIS N RONALD , BARTLETT ALLEN J , LORANGER LEONARD A , CHOPY JOSEPH JR , SULLIVAN ROBERT P , VARONE JOHN J , AMUNDSEN PAUL E
IPC分类号： F25J1/00
CPC分类号： F25B9/00 , F25J1/0065 , F25J1/0245 , F25J1/0269 , F25J1/0294 , F25J1/0298 , F25J2270/912
摘要： A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.
摘要翻译：制冷剂管理系统控制从两个或多个可变速度和固定速度的压缩机向多个低温冰箱供应制冷剂。该系统采用多个传感器来监测和调节整个制冷剂供应，以向每个低温冰箱输送适当的制冷剂供应。供应的制冷剂量是基于来自多个低温冰箱的制冷剂的总需求和制冷剂校正度量。通过调节可变速度压缩机的速度或者选择性地使压缩机打开或关闭来分配适当的制冷剂供应给每个低温冰箱。通过确定向多个低温冰箱供应的制冷剂的量来调节变速压缩机的速度。如果对制冷剂的总需求超过压缩机的容量，则调节多个冰箱内的冰箱的速度。

8. 发明申请

WO2009117693A8 METHOD OF RECLAIMING AND STORING A VALUABLE PROCESS GAS 审中-公开
标题翻译：回收和储存有价值工艺气体的方法
公开(公告)号：WO2009117693A8
公开(公告)日：2009-11-19
申请号：PCT/US2009037862
申请日：2009-03-20
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , BALL-DIFAZIO DOREEN J
发明人： BARTLETT ALLEN J , BALL-DIFAZIO DOREEN J
IPC分类号： H01L21/203 , H01L21/205
CPC分类号： B01D8/00
摘要： Cryogenic vacuum pump method for pumping a process chamber and reclaiming process gas. The valuable process gas may include a valuable gas, such as Xenon, Krypton or other rare gases, that is too expensive to be used in a once through loop of a semiconductor processing operation. The cryogenic vacuum pump has a refrigerator and a cryogenic panel in thermal contact with the refrigerator. The cryogenic vacuum pump also has a circuit. The circuit control heating to a first temperature in which a first process gas changes from a condensed phase while at least a second process gas remains in the condensed phase. The circuit also controls heating to a second temperature to reclaim the second process gas remaining in the condensed phase once the first process gas is removed.
摘要翻译：低温真空泵方法用于泵送处理室和回收处理气体。有价值的工艺气体可能包括昂贵的气体，如氙气，氪气或其他稀有气体，这些气体的价格太贵，不适用于半导体加工操作的直通循环。低温真空泵具有与冰箱热接触的冰箱和低温面板。低温真空泵也有一个回路。该电路控制加热到第一温度，在该第一温度中，第一处理气体从冷凝相变为至少第二处理气体保持在冷凝相中。该回路还控制加热至第二温度，以回收一旦第一处理气体被移除后保留在冷凝相中的第二处理气体。

9. 发明申请

WO2008088794A3 PRESSURE BURST FREE HIGH CAPACITY CRYOPUMP 审中-公开
标题翻译：压力冲击自由高容量CRYOPUMP
公开(公告)号：WO2008088794A3
公开(公告)日：2009-03-26
申请号：PCT/US2008000497
申请日：2008-01-15
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , DRISCOLL MICHAEL A , EACOBACCI MICHAEL J JR , JOHNSON WILLIAM L , SULLIVAN ROBERT P , SYSSOEV SERGEI , STIRA MARK A , CASELLO JOHN J
发明人： BARTLETT ALLEN J , DRISCOLL MICHAEL A , EACOBACCI MICHAEL J JR , JOHNSON WILLIAM L , SULLIVAN ROBERT P , SYSSOEV SERGEI , STIRA MARK A , CASELLO JOHN J
IPC分类号： F04B37/08
CPC分类号： F04B37/08
摘要： A cryopump includes a refrigerator with at least first and second stages. A radiation shield surrounds the second stage and is in thermal contact with the first stage. The radiation shield includes a drain hole to permit cryogenic fluid to traverse through the drain hole during regeneration. The cryopump also includes a primary pumping surface supporting adsorbent in thermal contact with the second stage. The second stage array assembly includes a primary condensing surface, protected surfaces having adsorbent, and non-primary condensing surfaces. A baffle is disposed over the drain hole. The baffle redirects gas from an annular space disposed between the radiation shield and the vacuum vessel that attempts to traverse through the drain hole to prevent the gas from condensing on a non-primary condensing surface. The baffle directs gas to condense on the primary condensing surface.
摘要翻译：低温泵包括至少具有第一和第二阶段的冰箱。辐射屏蔽围绕第二级并与第一级热接触。辐射屏蔽包括排水孔，以允许低温流体在再生期间穿过排水孔。低温泵还包括支撑与第二级热接触的吸附剂的初级泵送表面。第二级阵列组件包括主冷凝表面，具有吸附剂的保护表面和非初级冷凝表面。挡板设置在排水孔的上方。挡板将气体从设置在辐射屏蔽和真空容器之间的环形空间重新引导，试图穿过排水孔，以防止气体在非主冷凝表面上冷凝。挡板引导气体冷凝在主冷凝表面上。

10. 发明申请

WO2008143766A8 INTEGRAL FACET CRYOPUMP, WATER VAPOR PUMP, OR HIGH VACUUM PUMP 审中-公开
标题翻译：整体面积CRYOPUMP，水蒸气泵或高真空泵
公开(公告)号：WO2008143766A8
公开(公告)日：2009-02-19
申请号：PCT/US2008005567
申请日：2008-04-30
申请人： BROOKS AUTOMATION INC , BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
发明人： BARTLETT ALLEN J , KRAUS JOSEPH A , EACOBACCI MICHAEL J JR
IPC分类号： H01L21/00
CPC分类号： H01L21/67173 , H01L21/6719
摘要： A cluster tool has a transfer chamber, and a load lock chamber. An adaptor is configured to be coupled between the transfer chamber and the load lock chamber. The adaptor has an adaptor housing with an interior space including an entrance with a first valve and an exit with a second valve. The adaptor housing forms a substrate path through the interior space. The first valve connects the interior space and the load lock chamber. The second valve connects the interior space and the transfer chamber. A cryogenic surface is associated with the adaptor. Other pumps can be associated with the adaptor, such as, for example, a turbo pump, or water vapor pump. The cryogenic surface is configured to selectively evacuate the interior space. A wafer is adapted to be moved through the first valve and through the adaptor housing along the path. The wafer is moved through the exit and into the transfer chamber once the second valve is opened. This adaptor can be applied to the process chamber as well as the load lock.
摘要翻译：集群工具具有传送室和负载锁定室。适配器被配置为联接在传送室和装载锁定室之间。适配器具有适配器壳体，其具有包括具有第一阀的入口和具有第二阀的出口的内部空间。适配器外壳形成通过内部空间的基板路径。第一个阀连接内部空间和负载锁定室。第二个阀连接内部空间和传送室。低温表面与适配器相关联。其他泵可以与适配器相关联，例如涡轮泵或水蒸气泵。低温表面构造成有选择地排空内部空间。晶片适于沿着路径移动通过第一阀并通过适配器壳体。一旦第二个阀打开，晶片就会通过出口移动到传送室中。该适配器可以应用于处理室以及加载锁定。

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