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1. 发明申请

WO2009085165A2 IONIZATION GAUGE HAVING ELECTRON MULTIPLIER COLD EMMISSION SOURCE 审中-公开
标题翻译：具有电子倍乘冷源的电离规
公开(公告)号：WO2009085165A2
公开(公告)日：2009-07-09
申请号：PCT/US2008/013790
申请日：2008-12-17
申请人： BROOKS AUTOMATION, INC. , BRUCKER, Gerardo, A.
发明人： BRUCKER, Gerardo, A.
IPC分类号： G01L21/34 , G01N27/62 , H01J37/05 , H01J41/04 , G01L21/30
CPC分类号： G01L21/34 , G01N27/64 , H01J41/06
摘要： An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
摘要翻译：电离计包括电子发生器阵列，该电子发生器阵列包括微通道板，微通道板包括微通道板的电子发生部分，微通道板的电子发生部分包括用于产生种子电子的源和微通道板的电子倍增器部分，由电子发生部分产生的种子电子使电子倍增。电离计包括其中电子撞击气态物质的电离体积和用于收集由电子和气体物质之间的碰撞形成的离子的收集电极。集电极可以被阳极包围，或者电离规可以形成有多个集电极。电子的来源可以提供电子的自发发射，其中电子级联成倍数。

2. 发明申请

WO2011057201A2 VACUUM QUALITY MEASUREMENT SYSTEM 审中-公开
标题翻译：真空质量测量系统
公开(公告)号：WO2011057201A2
公开(公告)日：2011-05-12
申请号：PCT/US2010/055852
申请日：2010-11-08
申请人： BROOKS AUTOMATION, INC. , BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D., Jr.
发明人： BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D., Jr.
IPC分类号： G01L21/00 , G01J3/28 , G01N21/25 , H01L21/66
CPC分类号： G01M3/226 , G01M3/205 , G01M3/229 , G01M3/34
摘要： A gas analyzer for a vacuum chamber includes processing electronics configured to receive mass spectral data, receive input of total pressure in the vacuum chamber, receive external input from at least one sensor, and employ the mass spectral data, the total pressure in the vacuum chamber, and the external input from the at least one sensor to calculate a vacuum quality index based on at least one criteria of quality.
摘要翻译：用于真空室的气体分析器包括处理电子器件，其被配置为接收质谱数据，接收真空室中的总压力的输入，从至少一个传感器接收外部输入，并使用质谱数据，真空室中的总压力以及来自至少一个传感器的外部输入，以基于至少一个质量标准来计算真空质量指数。

3. 发明申请

WO2010033427A1 IONIZATION GAUGE WITH EMISSION CURRENT AND BIAS POTENTIAL CONTROL 审中-公开
标题翻译：具有排放电流和偏置电位控制的离子化测量
公开(公告)号：WO2010033427A1
公开(公告)日：2010-03-25
申请号：PCT/US2009/056612
申请日：2009-09-11
申请人： BROOKS AUTOMATION, INC. , CARMICHAEL, Larry, K. , WEBER, Jesse, A. , HENRY, John, H. , SCHOTT, Michael, N. , BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D.
发明人： CARMICHAEL, Larry, K. , WEBER, Jesse, A. , HENRY, John, H. , SCHOTT, Michael, N. , BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D.
IPC分类号： G01L21/30
CPC分类号： G01L21/30 , G01L21/32 , G01N27/60 , G01N27/62 , H01J41/02
摘要： An ionization gauge that measures pressure has an electron source that emits electrons, and an anode that defines an ionization space. The gauge also includes a collector electrode to collect ions formed by an impact between the electrons and a gas and to measure pressure based on the collected ions. The electron source is dynamically varied in emission current between a plurality of emission levels dependent on pressure and a second parameter other than pressure. The ionization gauge may also vary various operating parameters of the gauge components according to parameters stored in a non-volatile memory and selected by a user.
摘要翻译：测量压力的电离计具有发射电子的电子源和限定电离空间的阳极。该量规还包括收集电极以收集由电子和气体之间的冲击形成的离子，并且基于收集的离子来测量压力。电子源在取决于压力的多个排放水平和除压力之外的第二参数的发射电流之间动态变化。电离计还可以根据存储在非易失性存储器中并由用户选择的参数来改变量规组件的各种操作参数。

4. 发明申请

WO2009105506A1 IONIZATION GAUGE WITH OPERATIONAL PARAMETERS AND GEOMETRY DESIGNED FOR HIGH PRESSURE OPERATION 审中-公开
标题翻译：具有运行参数和几何设计用于高压运行的离子化测量
公开(公告)号：WO2009105506A1
公开(公告)日：2009-08-27
申请号：PCT/US2009/034460
申请日：2009-02-19
申请人： BROOKS AUTOMATION, INC. , BRUCKER, Gerardo, A.
发明人： BRUCKER, Gerardo, A.
IPC分类号： G01L21/32 , G01L21/34 , G01N27/62 , H01J37/05 , H01J41/04
CPC分类号： G01L21/30 , G01L21/32 , G01L21/34 , H01J41/02
摘要： An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.
摘要翻译：用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。电离计还包括阳极。相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

5. 发明申请

WO2010129690A3 ELECTROSTATIC ION TRAP 审中-公开
标题翻译：静电离子阱
公开(公告)号：WO2010129690A3
公开(公告)日：2010-11-11
申请号：PCT/US2010/033750
申请日：2010-05-05
申请人： BROOK AUTOMATION, INC. , BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D. , RATHBONE, G., Jeffery , HEINBUCH, Scott, C. , SCHOTT, Michael, N.
发明人： BRUCKER, Gerardo, A. , VAN ANTWERP, Kenneth, D. , RATHBONE, G., Jeffery , HEINBUCH, Scott, C. , SCHOTT, Michael, N.
IPC分类号： H01J49/42 , H01J49/26 , G01N27/62
摘要： An ion trap includes an electrode structure, including a first and a second opposed mirror electrodes and a central lens therebetween, that produces an electrostatic potential in which ions are confined to trajectories at natural oscillation frequencies, the confining potential being anharmonic. The ion trap also includes an AC excitation source having an excitation frequency f that excites confined ions at a frequency of about twice the natural oscillation frequency of the ions, the AC excitation frequency source preferably being connected to the central lens. In one embodiment, the ion trap includes a scan control that mass selectively reduces a frequency difference between the AC excitation frequency and about twice the natural oscillation frequency of the ions.
摘要翻译：离子阱包括电极结构，该电极结构包括第一和第二相对的镜电极以及其间的中心透镜，其产生静电势，其中离子被限制在自然振荡频率处的轨迹处，潜在的不和谐。该离子阱还包括具有激励频率f f的AC激励源，激励频率约为离子自然振荡频率的两倍，AC激励频率源优选连接到中心镜片。在一个实施例中，离子阱包括扫描控制，该质量选择性地减小AC激励频率和大约两倍离子的固有振荡频率之间的频率差。

6. 发明申请

WO2013119851A1 IONIZATION GAUGE FOR HIGH PRESSURE OPERATION 审中-公开
标题翻译：用于高压运行的离子化仪
公开(公告)号：WO2013119851A1
公开(公告)日：2013-08-15
申请号：PCT/US2013/025198
申请日：2013-02-07
申请人： BROOKS AUTOMATION, INC.
发明人： BRUCKER, Gerardo, A.
IPC分类号： G01L21/32
CPC分类号： G01L21/32 , G01L19/0627 , G01L21/30 , H01J1/52 , H01J41/02 , H01J41/04
摘要： An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.
摘要翻译：用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射该封套被禁止沉积在电子源上。

7. 发明申请

WO2013066881A2 METHOD AND APPARATUS FOR TUNING AN ELECTROSTATIC ION TRAP 审中-公开
标题翻译：用于调谐静电离子阱的方法和设备
公开(公告)号：WO2013066881A2
公开(公告)日：2013-05-10
申请号：PCT/US2012/062599
申请日：2012-10-30
申请人： BROOKS AUTOMATION, INC.
发明人： BRUCKER, Gerardo, A. , RATHBONE, G., Jeffery , HORVATH, Brian, J. , SWINNEY, Timothy, C. , BLOUCH, Stephen, C. , MCCARTHY, Jeffrey, G. , PIWONKA-CORLE, Timothy, R.
IPC分类号： H01J49/42
CPC分类号： H01J49/4245 , H01J27/205 , H01J49/0009 , H01J49/0031 , H01J49/147
摘要： An apparatus includes an electrostatic ion trap and electronics configured to measure parameters of the ion trap and configured to adjust ion trap settings based on the measured parameters. A method of tuning the electrostatic ion trap includes, under automatic electronic control, measuring parameters of the ion trap and adjusting ion trap settings based on the measured parameters.
摘要翻译：一种装置包括静电离子阱和被配置为测量离子阱的参数并且被配置为基于测量的参数调整离子阱设置的电子器件。调谐静电离子阱的方法包括在自动电子控制下根据所测量的参数测量离子阱的参数和调整离子阱设置。

8. 发明申请

WO2013138446A1 TRACE GAS CONCENTRATION IN ART MS TRAPS 审中-公开
标题翻译：跟踪气候浓度在艺术MS TRAPS
公开(公告)号：WO2013138446A1
公开(公告)日：2013-09-19
申请号：PCT/US2013/030801
申请日：2013-03-13
申请人： BROOKS AUTOMATION, INC.
发明人： BRUCKER, Gerardo, A. , SWINNEY, TIMOTHY C. , RATHBONE, G. JEFFERY
IPC分类号： G01N27/64
CPC分类号： G01N27/64 , G01N1/405 , G01N27/60 , H01J49/06 , H01J49/162 , H01J49/4245
摘要： A method of detecting specific gas species in an ion trap, the specific gas species initially being a trace component of a first low concentration in the volume of gas, includes ionizing the gas including the specific gas species, thereby creating specific ion species. The method further includes producing an electrostatic potential in which the specific ion species are confined in the ion trap to trajectories. The method also includes exciting confined specific ion species with an AC excitation source having an excitation frequency, scanning the excitation frequency of the AC excitation source to eject the specific ion species from the ion trap, and detecting the ejected specific ion species. The method further includes increasing the concentration of the specific ion species within the ion trap relative to the first low concentration prior to scanning the excitation frequency that ejects the ions of the specific gas species.
摘要翻译：一种检测离子阱中的特定气体种类的方法，特定气体种类最初是气体体积中第一低浓度的微量成分，包括电离包括特定气体种类的气体，从而产生特定的离子物质。该方法还包括产生静电电位，其中特定离子种类被限制在离子阱中的轨迹。该方法还包括具有激发频率的AC激发源的激发约束特定离子种类，扫描AC激发源的激发频率以从离子阱中排出特定离子种类，并检测喷出的特定离子种类。该方法还包括在扫描喷射特定气体物质的离子的激发频率之前相对于第一低浓度增加离子阱内的特定离子种类的浓度。

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