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    • 7. 发明申请
    • METHOD FOR WASHING AN OPTICAL LENS
    • 方法冲厕光学透镜
    • WO2004044656A3
    • 2004-09-23
    • PCT/DE0303720
    • 2003-11-10
    • INFINEON TECHNOLOGIES AGSCHEDEL THORSTENSCHMIDT SEBASTIANHRASCHAN GUENTER
    • SCHEDEL THORSTENSCHMIDT SEBASTIANHRASCHAN GUENTER
    • G03F7/20
    • G03F7/70883G03F7/70925G03F7/70933
    • A device (60) for determining the constituents of a substance in a gas or gas mixture performs measurements on the gas or gas mixture used for washing a lens (10) in a projection apparatus (41) for projecting structures onto a substrate (100). The results of a first measurement performed on the gas fed to the lens (10) and the results of a measurement performed on the gas led away from the lens are compared to one another. If a substance is involved that, in particular, is one that contaminates, whereby leading to the formation of deposits on the lens (10) under the influence of high-energy radiation emitted by a light source (14), photochemical reactions, which adversely lead to the formation of deposits on the surface of the lens (10) can be inferred from the difference ensuing from said comparison. A signal is generated as a result of the comparison and can be used to take preventive measures against a degradation of the lens (10). Measuring devices (60), which can be mass spectrometers, electric or optical sensors, and other known methods can be used for performing substance analysis.
    • 通过用于确定物质的比例在气体或气体混合物中的气体或气体混合物的测量在用于的图案的基板(100)上投影的投影装置(41),冲洗的透镜(10)的装置(60)的装置执行。 在透镜上的第一测量结果(10)供给的气体与从透镜移除(10)的气体的测量结果进行比较。 如果是在特定的一个污染物质,其通过照明源(14)产生高能量辐射的影响下,透镜(10)上的沉积,然后在不利地导致光化学反应的沉积在透镜的表面上的差 (10)是关闭的。 作为比较的结果可以用针对所述透镜(10)的降解的预防措施进行时产生的信号。 作为测量设备(60)质谱仪,电或光学传感器以及其它已知的方法可用于分析物质。