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1. 发明申请

WO2022135811A1 METHODS AND APPARATUS FOR CONTROLLING ELECTRON DENSITY DISTRIBUTIONS 审中-公开
公开(公告)号：WO2022135811A1
公开(公告)日：2022-06-30
申请号：PCT/EP2021/082663
申请日：2021-11-23
申请人： ASML NETHERLANDS B.V.
发明人： SMORENBURG, Petrus, Wilhelmus , LUITEN, Otger, Jan , SCHAAP, Brian, Herman , FRANSSEN, Jim, Gerardus, Hubertus
IPC分类号： H05G2/00 , H01J31/00 , H05H15/00
摘要： A method for controlling a density distribution of electrons provided by an electron source for use in hard X-ray, soft X-ray and/or extreme ultraviolet generation, the method comprising generating a plurality of electrons from a pattern of ultracold excited atoms using an ionization laser inside a cavity, wherein the electrons have a density distribution determined by at least one of the patterns of excited atoms and the ionization laser, and accelerating the electrons out of the cavity using a non-static acceleration profile, wherein the acceleration profile controls the density distribution of the electrons as they exit the cavity.

2. 发明申请

WO2017076696A1 ELECTRON BEAM CHOPPER 审中-公开
标题翻译：电子束斩波器
公开(公告)号：WO2017076696A1
公开(公告)日：2017-05-11
申请号：PCT/EP2016/075673
申请日：2016-10-25
申请人： ASML NETHERLANDS B.V.
发明人： BRUSSAARD, Gerrit, Jacobus, Hendrik , STRAGIER, Xavier, Frederiek, Dirk , LUITEN, Otger, Jan , BANINE, Vadim, Yevgenyevich
IPC分类号： H01S3/09 , H01J37/317
CPC分类号： H01S3/0903 , H01J37/045 , H05H2007/041 , H05H2007/046
摘要： An electron beam chopper for forming a bunched beam of electrons, the electron beam chopper comprises a deflector and a blocking member. The deflector is operable to receive an input beam of electrons propagating along a first axis and to alter the direction of the beam of electrons so as to form an output beam of electrons such that the direction of the output beam of electrons varies with time through a range of directions. The blocking member is arranged to block the output beam of electrons when it is in a first sub-range of the range of directions and to allow the output beam of electrons to pass it when it is in a second sub-range of the range of directions so as to form a bunched electron beam. The deflector and the blocking member are arranged such that a rate of change of the direction of the electron beam is at a local minimum when the electron beam is in the second sub-range.
摘要翻译：用于形成束状电子束的电子束斩波器，电子束斩波器包括偏转器和阻挡构件。偏转器可操作以接收沿第一轴传播的输入电子束并改变电子束的方向，以形成输出电子束，使得输出电子束的方向随着时间经过方向范围。阻挡构件被布置成当其处于该范围的方向的第一子范围内时阻挡电子的输出束并且当电子的输出束处于范围的第二子范围时允许电子的输出束通过方向以形成聚束电子束。偏转器和阻挡构件被布置为使得当电子束处于第二子范围时电子束的方向的变化率处于局部最小值。

3. 发明申请

WO2016139022A1 RADIATION SENSOR APPARATUS 审中-公开
标题翻译：辐射传感器设备
公开(公告)号：WO2016139022A1
公开(公告)日：2016-09-09
申请号：PCT/EP2016/052102
申请日：2016-02-02
申请人： ASML NETHERLANDS B.V.
发明人： BANINE, Vadim, Yevgenyevich , BRUSSAARD, Gerrit, Jacobus, Hendrik , KOPPERT, Willem, Jakobus, Cornelis , LUITEN, Otger, Jan , NIENHUYS, Han-Kwang , BECKERS, Job , VAN DER HORST, Ruud, Martinus
IPC分类号： G01J1/58 , G01J1/42 , G03F7/20 , H01S3/13
CPC分类号： G01J1/58 , G01J1/4257 , G01J1/429 , G01T1/2018 , G03F7/70558 , G03F7/7085 , H01S3/0903 , H01S3/1305
摘要： A radiation sensor apparatus for determining a position and/or power of a radiation beam comprises: a chamber for containing a gas; one or more sensors; and a processor. The chamber is provided with a first opening and a second opening such that a radiation beam can enter the chamber through the first opening, propagate through the chamber generally along an axis, and exit the chamber through the second opening. Each of the one or more sensors is arranged to receive and detect radiation emitted from a region of the chamber around the axis. The processor is operable to use the radiation detected by the one or more sensors to determine a position and/or power of a radiation beam propagating through the chamber generally along the axis.
摘要翻译：用于确定辐射束的位置和/或功率的辐射传感器装置包括：用于容纳气体的腔室; 一个或多个传感器; 和处理器。腔室设置有第一开口和第二开口，使得辐射束可以通过第一开口进入腔室，大致沿轴线传播通过腔室，并通过第二开口离开腔室。一个或多个传感器中的每一个被布置成接收和检测围绕轴线的腔室的区域发射的辐射。处理器可操作以使用由一个或多个传感器检测到的辐射来确定通常沿轴线传播通过腔室的辐射束的位置和/或功率。

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