专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

WO2008101713A3 HIGH THROUGHPUT SEM TOOL 审中-公开
公开(公告)号：WO2008101713A3
公开(公告)日：2008-08-28
申请号：PCT/EP2008/001413
申请日：2008-02-22
申请人： APPLIED MATERIALS ISRAEL LTD. , ALMOGY, Gilad , BARTOV, Avishai , FROSIEN, Jürgen , ADAMEC, Pavel , BANZHOF, Helmut
发明人： ALMOGY, Gilad , BARTOV, Avishai , FROSIEN, Jürgen , ADAMEC, Pavel , BANZHOF, Helmut
IPC分类号： H01J37/05 , H01J37/147 , H01J37/28 , H01L21/66 , H01J37/10
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.

2. 发明申请

WO2004044944A2 RASTER FRAME BEAM SYSTEM FOR ELECTRON BEAM LITHOGRAPHY 审中-公开
标题翻译：用于电子束光刻的RASTER FRAME BEAM系统
公开(公告)号：WO2004044944A2
公开(公告)日：2004-05-27
申请号：PCT/US2003/034785
申请日：2003-10-31
申请人： APPLIED MATERIALS ISRAEL, LTD. , APPLIED MATERIALS, INC. , TIROSH, Ehud , ALONI, Meir , FREIDMAN, Mula , VISHNIPOLSKY, Jimmy , ALMOGY, Gilad , LITMAN, Alon , LEHMAN, Yonatan , MESHULACH, Doron
发明人： ALONI, Meir , FREIDMAN, Mula , VISHNIPOLSKY, Jimmy , ALMOGY, Gilad , LITMAN, Alon , LEHMAN, Yonatan , MESHULACH, Doron
IPC分类号： H01J37/317
CPC分类号： G03F7/70375 , G03F7/70275
摘要： A method for writing a master image on a substrate includes dividing the master image into a matrix of frames, each frame including an array of pixels defining a respective frame image in a respective frame position within the master image. An electron beam is scanned in a raster pattern over the substrate, while shaping the electron beam responsively to the respective frame image of each of the frames as the electron beam is scanned over the respective frame position, so that in each frame, the electron beam simultaneously writes a multiplicity of the pixels onto the substrate.
摘要翻译：用于在基板上写入主图像的方法包括将主图像分割为帧矩阵，每个帧包括在主图像内的相应帧位置中限定相应帧图像的像素阵列。当电子束在相应的帧位置上被扫描时，电子束以光栅图案扫描在衬底上，同时响应于每个帧的各个帧图像而对电子束进行成形，使得在每个帧中，电子束同时将多个像素写入基板。

3. 发明申请

WO2006002150A1 WAFER INSPECTION SYSTEM 审中-公开
标题翻译：波浪检测系统
公开(公告)号：WO2006002150A1
公开(公告)日：2006-01-05
申请号：PCT/US2005/021900
申请日：2005-06-20
申请人： APPLIED MATERIALS ISRAEL, LTD. , REINHORN, Silviu , SOME, Daniel , ALMOGY, Gilad
发明人： REINHORN, Silviu , SOME, Daniel , ALMOGY, Gilad
IPC分类号： G01N21/17
CPC分类号： G01N21/9501 , G01N21/1717
摘要： Apparatus for inspecting a surface, including a plurality of pump sources having respective pump optical output ends and providing respective pump beams through the pump optical output ends, and a plurality of probe sources having respective probe optical output ends and providing respective probe beams through the probe optical output ends. There is an alignment mounting which holds the respective pump optical output ends and probe optical output ends in equal respective effective spatial offsets, and optics which convey the respective pump beams and probe beams to the surface, so as to generate returning radiation from a plurality of respective locations thereon, and which convey the returning radiation from the respective locations. The apparatus includes a receiving unit which is adapted to receive the returning radiation and which is adapted to determine a characteristic of the respective locations in response thereto.
摘要翻译：用于检查表面的装置，包括具有相应的泵浦光学输出端的多个泵浦源，并且通过泵浦光学输出端提供相应的泵浦光束，以及具有相应的探测光学输出端的多个探测源，并且通过探针提供相应的探测光束光输出端。存在对准安装，其将相应的泵浦光学输出端和探测光学输出端保持在相等的有效空间偏移中;以及光学器件，其将相应的泵浦光束和探测光束传送到表面，以便产生来自多个各自的位置，并且从各个位置传送返回的辐射。该装置包括接收单元，该接收单元适于接收返回的辐射并且适于响应于此确定相应位置的特性。

4. 发明申请

WO2004031791A2 SYSTEM AND METHOD FOR DEFECT LOCALIZATION 审中-公开
标题翻译：缺陷定位的系统和方法
公开(公告)号：WO2004031791A2
公开(公告)日：2004-04-15
申请号：PCT/US2003/031398
申请日：2003-10-03
申请人： APPLIED MATERIALS ISRAEL, LTD. , APPLIED MATERIALS, INC. , ALMOGY, Gilad , TALBOT, Chris , LEVIN, Lior
发明人： ALMOGY, Gilad , TALBOT, Chris , LEVIN, Lior
IPC分类号： G01R31/308
CPC分类号： G01R31/2812 , G01N21/956
摘要： A method and system for defect localization includes: (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, such as charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.
摘要翻译：用于缺陷定位的方法和系统包括：（i）接收包括至少部分被电光活性材料覆盖的导体的测试结构; （ii）向导体提供电信号，例如对导体的至少一部分充电; 和（iii）对测试结构进行成像以定位缺陷。

5. 发明申请

WO2011149589A1 CONCENTRATING SOLAR ENERGY COLLECTOR 审中-公开
标题翻译：浓缩太阳能收集器
公开(公告)号：WO2011149589A1
公开(公告)日：2011-12-01
申请号：PCT/US2011/031117
申请日：2011-04-04
申请人： COGENRA SOLAR, INC. , ALMOGY, Gilad , MORAD, Ratson , RICKLIS, Ofer , BECKETT, Nathan Phillips , BAR, Amir , BOCHKARIOV, Andrey , WEISS, Amir A. , RADUTA, Radu , ATCHLEY, Brian Edward
发明人： ALMOGY, Gilad , MORAD, Ratson , RICKLIS, Ofer , BECKETT, Nathan Phillips , BAR, Amir , BOCHKARIOV, Andrey , WEISS, Amir A. , RADUTA, Radu , ATCHLEY, Brian Edward
IPC分类号： F24J2/38
CPC分类号： H01L31/0525 , F24S23/74 , F24S30/425 , F24S40/52 , F24S2030/134 , H01L31/0521 , H01L31/0547 , H02S40/44 , Y02B10/20 , Y02B10/70 , Y02E10/45 , Y02E10/47 , Y02E10/52 , Y02E10/60
摘要： Systems, methods, and apparatus by which solar energy may be collected to provide electricity, heat, or a combination of heat and electricity are disclosed herein.
摘要翻译：本文公开了可以收集太阳能以提供电，热或热和电力的组合的系统，方法和装置。

6. 发明申请

WO2005076081A3 RETICLE FABRICATION USING A REMOVABLE HARD MASK 审中-公开
公开(公告)号：WO2005076081A3
公开(公告)日：2005-08-18
申请号：PCT/US2005/002563
申请日：2005-01-27
申请人： APPLIED MATERIALS, INC. , BENCHER, Christopher, Dennis , MONTGOMERY, Melvin, Warren , BUXBAUM, Alexander , LEE, Yung-Hee, Yvette , DING, Jian , ALMOGY, Gilad , YEH, Wendy, H.
发明人： BENCHER, Christopher, Dennis , MONTGOMERY, Melvin, Warren , BUXBAUM, Alexander , LEE, Yung-Hee, Yvette , DING, Jian , ALMOGY, Gilad , YEH, Wendy, H.
IPC分类号： G03F7/09
摘要： We have reduced the critical dimension bias for reticle fabrication. Pattern transfer to the radiation-blocking layer of the reticle substrate essentially depends upon use of a hard mask to which the pattern is transferred from a photoresist. The photoresist pull back which occurs during pattern transfer to the hard mask is minimalized. In addition, a hard mask material having anti-reflective properties which are matched to the reflective characteristics of the radiation-blocking layer enables a reduction in critical dimension size and an improvement in the pattern feature integrity in the hard mask itself. An anti-reflective hard mask layer left on the radiation-blocking layer provides functionality when the reticle is used in a semiconductor device manufacturing process.

7. 发明申请

WO2003100404A1 SYSTEM AND METHOD FOR PROCESS VARIATION MONITOR 审中-公开
标题翻译：过程变异监测系统和方法
公开(公告)号：WO2003100404A1
公开(公告)日：2003-12-04
申请号：PCT/US2003/016569
申请日：2003-05-22
申请人： APPLIED MATERIALS, INC. , APPLIED MATERIALS ISRAEL, LTD.
发明人： LEVIN, Evgeni , ALMOGY, Gilad , ROZENMAN, Efrat
IPC分类号： G01N21/95
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/956 , G01N21/95607 , G01N2021/8896 , G06T2207/30148 , Y10S430/146
摘要： A method to extend the process monitoring capabilities of a semiconductor wafer optical inspection system so as to be able to detect low-resolution effects of process variations over the surface of a wafer at much higher sensitivity than heretofore possible. The method consists, in essence, of grouping sensed pixels by geometric blocks over the inspected surface and comparing each block with a corresponding one from another die on the same wager, from another wager of from a stored model image. In one embodiment of the invention, pixel values are compared directly and differences are thresholded at a considerably lower level than during a defects detection process. In another embodiment, there is calculated a signature for each block, based on the sensed light intensity values, and corresponding signatures are compared.
摘要翻译：扩展半导体晶片光学检查系统的过程监控能力的方法，以便能够以比以前更高的灵敏度检测晶片表面上的工艺变化的低分辨率效应。本方法基本上包括通过检查表面上的几何块对感测像素进行分组，并且从相同下注的另一个模具中将每个块与来自另一个管芯的对应的块相比较，从另一个来自存储的模型图像的冲量。在本发明的一个实施例中，像素值被直接比较，并且差异以比在缺陷检测处理期间低得多的阈值阈值化。在另一个实施例中，基于感测的光强度值计算每个块的签名，并对相应的签名进行比较。

8. 发明申请

WO2004057404A2 ELIMINATING COHERENCE EFFECTS IN BRIGHT-FIELD LASER IMAGING 审中-公开
标题翻译：消除亮场激光成像中的相干效应
公开(公告)号：WO2004057404A2
公开(公告)日：2004-07-08
申请号：PCT/US2003/040597
申请日：2003-12-19
申请人： APPLIED MATERIALS ISRAEL, LTD. , APPLIED MATERIALS, INC.
发明人： ALMOGY, Gilad , FELDMAN, Haim
IPC分类号： G02B26/00
CPC分类号： G01N21/8806 , G02B26/10
摘要： A method for imaging and an imaging system, the system includes the steps of: (i) scanning a beam of coherent radiation over a surface along a scan axis; (ii) focusing the beam to a spot on the surface, so that the spot has a predetermined dimension along the scan axis; (iii) spreading the beam laterally while scanning the beam, so that the beam covers an area substantially wider than the predetermined dimension in a direction transverse to the scan axis; and (iii) capturing the radiation scattered from the surface while scanning the beam, so as to form an image of the surface.
摘要翻译：一种用于成像和成像系统的方法，所述系统包括以下步骤：（i）沿着扫描轴在表面上扫描相干辐射束; （ii）将光束聚焦到表面上的光斑，使得光点沿着扫描轴具有预定尺寸; （iii）在扫描光束的同时横向扩散光束，使得光束在横向于扫描轴线的方向上覆盖基本上比预定尺寸宽的区域; 和（iii）在扫描光束时捕获从表面散射的辐射，以便形成表面的图像。

9. 发明申请

WO2004011917A1 APPARATUS AND METHOD FOR NON-DESTRUCTIVE INSPECTION ON A PATTERNED SURFACE 审中-公开
标题翻译：用于在图案表面上进行非破坏性检查的装置和方法
公开(公告)号：WO2004011917A1
公开(公告)日：2004-02-05
申请号：PCT/US2003/022786
申请日：2003-07-21
申请人： APPLIED MATERIALS, INC. , APPLIED MATERIALS ISRAEL, LTD.
发明人： ALMOGY, Gilad , NAFTALI, Ron , GUETTA, Avishay , SHOHAM, Doron
IPC分类号： G01N21/95
CPC分类号： G01N21/956 , G01N21/9501
摘要： An optical system for detecting defects on a wafer (135) that includes a device for producing a beam and directing the beam onto the wafer surface, producing an illuminated spot on the wafer's surface. The system further includes a detector (121) detecting light, and a mirrored assembly (127) having together with the detector an axis of symmetry about a linen perpendicular to the wafer surface. The assembly is configured to receive scattered light from the surface, where the scattered light including a first scattered light part being scattered from the pattern. The assembly is further configured to reflect and focus rotationally symmetrically about the axis of symmetry the scattered light to the detector. The system further includes a device operating with the detector for facilitating detection of a scattered light other than the specified scattered light due to pattern.
摘要翻译：一种用于检测晶片（135）上的缺陷的光学系统，其包括用于产生光束并将光束引导到晶片表面上的装置，在晶片的表面上产生照明光斑。该系统还包括检测光的检测器（121）以及与检测器一起围绕垂直于晶片表面的亚麻的对称轴的镜像组件（127）。组件被配置为从表面接收散射光，其中包括从图案散射的第一散射光部分的散射光。该组件进一步构造成将散射光的对称轴向旋转对称地反射和聚焦到检测器。该系统还包括用于检测器的装置，用于便于检测由于图案而导致的特定散射光之外的散射光。

10. 发明申请

WO2011139494A1 RECEIVER FOR CONCENTRATING PHOTOVOLTAIC-THERMAL SYSTEM 审中-公开
标题翻译：接收光伏 - 热系统的接收器
公开(公告)号：WO2011139494A1
公开(公告)日：2011-11-10
申请号：PCT/US2011/032163
申请日：2011-04-12
申请人： COGENRA SOLAR, INC. , ALMOGY, Gilad , MORAD, Ratson , RADUTA, Radu C. , ATCHLEY, Brian Edward , LICHY, Joseph Isaac , WEISS, Amir A.
发明人： ALMOGY, Gilad , MORAD, Ratson , RADUTA, Radu C. , ATCHLEY, Brian Edward , LICHY, Joseph Isaac , WEISS, Amir A.
IPC分类号： H01L31/052
CPC分类号： F24S70/20 , F24S10/502 , F24S20/20 , F24S23/80 , F24S50/20 , F24S80/30 , F24S80/60 , F24S2020/17 , F24S2025/6006 , H01L31/02013 , H01L31/042 , H01L31/044 , H01L31/0521 , H01L31/0525 , H01L31/0547 , H02S40/34 , Y02E10/41 , Y02E10/44 , Y02E10/52
摘要： Systems, methods, and apparatus by which solar energy may be collected to provide electricity or a combination of heat and electricity are disclosed herein. Examples of solar energy receivers are disclosed that may be used to collect concentrated solar radiation.
摘要翻译：本文公开了通过其可收集太阳能以提供电力或热和电的组合的系统，方法和设备。公开了可用于收集集中太阳辐射的太阳能接收器的示例。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式