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    • 7. 发明申请
    • SUBSTRATE HEATING APPARATUS
    • 基板加热装置
    • WO2009008673A2
    • 2009-01-15
    • PCT/KR2008/004060
    • 2008-07-10
    • JUSUNG ENGINEERING CO., LTD.PARK, Won SeokKIM, Ki DuckLEE, Yong HyunCHOI, Seung Dae
    • PARK, Won SeokKIM, Ki DuckLEE, Yong HyunCHOI, Seung Dae
    • H01L21/324
    • H01L21/67115
    • A substrate heating apparatus is provided. The substrate heating apparatus includes a chamber, a substrate supporting unit configured to support at least one substrate where a thin film is formed on the top surface thereof, and at least one heating unit disposed in a region adjacent to the rear surface of the substrate. The heating unit includes a plurality of reflecting units arranged under the substrate, at least one lamp heating unit disposed inside the plurality of reflecting units, and a short- wavelength blocking layer disposed on the lamp heating unit. By providing the lamp heating unit under the substrate where the thin film or pattern is formed on the top surface, and supplying heat energy to the rear surface of the substrate, it is possible to prevent the degradation in efficiency of the thin film, such as degradation of the thin film formed on the top surface of the substrate due to the heat source or the peeling of the thin film due to the temperature deviation between the substrate and the thin film. Furthermore, the heat energy is widely spread out at the central region of the rear surface of the substrate, and the heat energy is focused at the edge region of the substrate, thereby heating the large-sized substrate uniformly.
    • 提供了一种基板加热装置。 该基板加热设备包括腔室,基板支撑单元和至少一个加热单元,基板支撑单元被构造为支撑至少一个基板,其中,在基板的顶表面上形成有薄膜,并且至少一个加热单元设置在与基板的后表面相邻的区域中。 加热单元包括布置在基板下方的多个反射单元,布置在多个反射单元内的至少一个灯加热单元以及布置在灯加热单元上的短波长阻挡层。 通过将灯加热单元设置在顶表面上形成有薄膜或图案的基板下,并且将热能供应到基板的背表面,可以防止薄膜的效率降低,例如 由于热源或由于衬底和薄膜之间的温度偏差导致的薄膜剥离而在衬底的顶表面上形成的薄膜退化。 此外,热能广泛散布在基板后表面的中央区域,并且热能集中在基板的边缘区域,从而均匀地加热大尺寸基板。
    • 8. 发明申请
    • THIN FILM TYPE SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME
    • 薄膜型太阳能电池及其制造方法
    • WO2009084888A2
    • 2009-07-09
    • PCT/KR2008/007737
    • 2008-12-29
    • JUSUNG ENGINEERING CO., LTD.PARK, Won SeokSHIN, Yong WooHWANG, Seong Ryong
    • PARK, Won SeokSHIN, Yong WooHWANG, Seong Ryong
    • H01L31/042
    • H01L31/18H01L31/046Y02E10/50
    • A thin film type solar cell and a method for manufacturing the same is disclosed, the thin film type solar cell comprising a substrate; a plurality of front electrodes on the substrate at fixed intervals by each first separating part interposed in-between; a plurality of semiconductor layers on the front electrodes at fixed intervals by each contact part interposed in-between; and a plurality of rear electrodes connected with the front electrodes through the contact part, provided at fixed intervals by each second separating part interposed in-between, wherein a main isolating part is formed in the outermost front electrode, the outermost semiconductor layer, and the outermost rear electrode, wherein an auxiliary isolating part is formed in at least one of the outermost front electrode and the outermost rear electrode, wherein the auxiliary isolating part is positioned on the inside of the main isolating part.
    • 公开了一种薄膜型太阳能电池及其制造方法,所述薄膜型太阳能电池包括基板; 通过每个第一分隔部分以固定的间隔在所述衬底上设置多个前电极; 在所述前电极上的多个半导体层,每个所述接触部分夹在所述前电极之间; 以及多个后电极,所述多个后电极通过所述接触部分与所述前电极连接,所述多个后电极以隔着每个第二分隔部分的方式设置在所述前电极之间,其中,在所述最外前电极,所述最外半导体层和所述第二分隔部分中形成主隔离部分 最外侧的后电极,其中辅助隔离部分形成在最外侧前电极和最外侧后电极中的至少一个中,其中辅助隔离部分位于主隔离部分的内侧上。