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    • 2. 发明申请
    • SILICON MICROPHONE WITH ENHANCED IMPACT PROOF STRUCTURE USING BONDING WIRES
    • 硅胶麦克风使用连接线增强防撞结构
    • WO2009045170A1
    • 2009-04-09
    • PCT/SG2008/000369
    • 2008-09-29
    • SILICON MATRIX PTE. LTD.WANG, ZheCHONG, Ser, Choong
    • WANG, ZheCHONG, Ser, Choong
    • H04R17/02H04R19/00
    • H04R19/04
    • A backplateless silicon microphone and a wire protection method for improved impact resistance are disclosed. A circular diaphragm (11) is surrounded by a circular spring (12) having a plurality of slots and perforations to facilitate air damping reduction, release of in- plane stress, and improve out-plane flexibility. Anchored at a substrate (8), the circular spring (12) holds the silicon microphone suspended over a backside hole in the substrate (8) but allows the diaphragm (11 ) to vibrate perpendicular to the substrate. A microphone variable capacitor is formed between the perforated spring and substrate. Slot size is minimized to prevent particles from entering an underlying air gap. A plurality of "n" bonding pads (16a, 16b) near the outer edge of the circular spring (12) are connected by "n/2" bonding wires that serve as a stopper to restrict an upward motion of the diaphragm. The bonding wires may cross each other to enable lower loop height for more effective resistance to impact.
    • 公开了一种无刷硅传声器和用于提高耐冲击性的线保护方法。 圆形隔膜(11)由具有多个槽和穿孔的圆形弹簧(12)围绕,以便于减少空气阻尼,释放面内应力,并提高平面外的柔性。 固定在基板(8)上的圆形弹簧(12)将硅麦克风保持在基板(8)的背面孔上,但允许隔膜(11)垂直于基板振动。 在多孔弹簧和基板之间形成麦克风可变电容器。 槽口尺寸被最小化以防止颗粒进入下面的气隙。 在圆形弹簧(12)的外边缘附近的多个“n”个接合焊盘(16a,16b)通过用作限制器的“n / 2”接合线连接,以限制隔膜的向上运动。 接合线可以彼此交叉以实现较低的回路高度,以更有效地抵抗冲击。