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1. 发明申请

WO2010090604A1 A LIGHT DETECTION ARRANGEMENT AND A METHOD FOR DETECTING LIGHT IN A LIGHT DETECTION ARRANGEMENT 审中-公开
标题翻译：光检测装置和检测光检测装置中的光的方法
公开(公告)号：WO2010090604A1
公开(公告)日：2010-08-12
申请号：PCT/SG2010/000041
申请日：2010-02-08
申请人： AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH , COMPONENT TECHNOLOGY PTE LTD , LIU, Tong , LAM, Chew Junn , FANG, Zhong Ping , XU, Jian , CHEOW, Yoon Foo , YU Jiaqi
发明人： LIU, Tong , LAM, Chew Junn , FANG, Zhong Ping , XU, Jian , CHEOW, Yoon Foo , YU Jiaqi
IPC分类号： H01L21/66 , G01B11/24 , G01N21/956
CPC分类号： G01B11/24 , G01B11/245 , G01N21/8806 , G02B5/02 , G02B27/1006 , G02B27/14 , G02B27/141 , G02B27/143 , G02B27/144
摘要： In an embodiment, a light detection arrangement may be provided. The light detection arrangement may include a body structure configured to provide light, the body structure including a first light-transmissive portion and a second light-transmissive portion disposed at a distance from the first light-transmissive portion; an object receiving region arranged such that light provided by the body structure may be illuminating at least a portion of the object receiving region; a first camera having a first main optical axis; a second camera having a second main optical axis; wherein the body structure may be arranged between the first camera and the second camera on its one side and the object receiving region on its other side; wherein the first camera may be arranged such that its first main optical axis may be directed to the object receiving region via the first light-transmissive portion; wherein the second camera may be arranged such that its second main optical axis may be directed to the object receiving region via the second light-transmissive portion; an arrangement configured to provide light reflected from the object receiving region such that a first reflected light portion may be provided as a first co-axial light portion aligned to the first main optical axis, and such that a second reflected light portion may be provided as a second co-axial light portion aligned to the second main optical axis. A method for detecting light in a light detection arrangement may also be provided.
摘要翻译：在一个实施例中，可以提供光检测装置。光检测装置可以包括构造成提供光的主体结构，所述主体结构包括设置在距离所述第一透光部分一定距离处的第一透光部分和第二透光部分; 被配置为使得由所述主体结构提供的光可以照射所述物体接收区域的至少一部分的物体接收区域; 具有第一主光轴的第一相机; 具有第二主光轴的第二相机; 其中所述身体结构可以在其一侧上布置在所述第一照相机和所述第二照相机之间，并且所述物体接收区域在其另一侧上; 其中第一相机可以被布置成使得其第一主光轴可经由第一光透射部分被引导到物体接收区域; 其中所述第二相机可以被布置成使得其第二主光轴可以经由所述第二透光部分被引导到所述物体接收区域; 配置成提供从物体接收区域反射的光，使得可以将第一反射光部分设置为与第一主光轴对准的第一同轴光部分，并且使得第二反射光部分可以设置为与第二主光轴对准的第二同轴光部分。还可以提供一种用于检测光检测装置中的光的方法。

2. 发明申请

WO2010090605A1 METHODS FOR EXAMINING A BONDING STRUCTURE OF A SUBSTRATE AND BONDING STRUCTURE INSPECTION DEVICES 审中-公开
标题翻译：检查基板和结构检测装置的结合结构的方法
公开(公告)号：WO2010090605A1
公开(公告)日：2010-08-12
申请号：PCT/SG2010/000042
申请日：2010-02-08
申请人： AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH , COMPONENT TECHNOLOGY PTE LTD , CHUNG, Kum Pang , LAM, Chew Junn , XU, Jian , LIU, Tong , TANG, Zai Xin , ZAKARIA, Albertus
发明人： CHUNG, Kum Pang , LAM, Chew Junn , XU, Jian , LIU, Tong , TANG, Zai Xin , ZAKARIA, Albertus
IPC分类号： H01L21/66 , G01N21/956 , G01N21/29 , H01L21/60
CPC分类号： H01L24/85 , G01N21/8806 , H01L23/544 , H01L24/45 , H01L24/48 , H01L24/49 , H01L2223/54426 , H01L2223/54473 , H01L2224/05552 , H01L2224/05553 , H01L2224/05554 , H01L2224/0603 , H01L2224/45014 , H01L2224/45015 , H01L2224/45144 , H01L2224/48091 , H01L2224/48247 , H01L2224/48472 , H01L2224/4903 , H01L2224/49051 , H01L2224/73265 , H01L2224/78901 , H01L2224/85121 , H01L2224/859 , H01L2924/01005 , H01L2924/01013 , H01L2924/01014 , H01L2924/01015 , H01L2924/01027 , H01L2924/01033 , H01L2924/01075 , H01L2924/01077 , H01L2924/01079 , H01L2924/01082 , H01L2924/014 , H01L2924/10253 , H01L2924/12041 , H01L2924/12042 , H01L2924/14 , H01L2924/1461 , H01L2924/00014 , H01L2924/00 , H01L2924/20751
摘要： In an embodiment, a method for examining a bonding structure of a substrate may be provided. The method may include: providing a substrate including a bonding structure to be examined; determining one or more stereoscopic images including one or a plurality of predefined regions of interests of portions of the bonding structure to be examined, the predefined regions of interests corresponding to reference regions of interests in a stored predetermined reference model of a reference bonding structure of a reference substrate; determining one or more two-dimensional feature parameters and one or more three-dimensional feature parameters of the bonding structure to be examined from one or more of a plurality of the predefined regions of interests; and determining as to whether the determined feature parameters fulfill at least one predefined quality criterion with respect to the reference model.
摘要翻译：在一个实施例中，可以提供用于检查基板的接合结构的方法。该方法可以包括：提供包括待检查的结合结构的基板; 确定一个或多个立体图像，所述立体图像包括要被检查的所述结合结构的部分的一个或多个预定义的区域，所述预定区域对应于存储的参考区域中的参考区域，参考基板; 从多个预定义兴趣区域中的一个或多个确定待检查的接合结构的一个或多个二维特征参数和一个或多个三维特征参数; 以及确定所确定的特征参数是否满足关于所述参考模型的至少一个预定质量标准。

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