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1. 发明申请

WO2003023229A1 真空排気装置および真空排気装置の運転方法审中-公开
标题翻译：真空泵系统和真空泵系统的运行方法
公开(公告)号：WO2003023229A1
公开(公告)日：2003-03-20
申请号：PCT/JP2002/009048
申请日：2002-09-05
申请人：株式会社アルバック , 柴山浩司 , 山下祐一 , 矢作充 , 田島孝彦 , 相川純一 , 田中智成 , 菅家幸雄 , 深浦裕治
发明人：柴山浩司 , 山下祐一 , 矢作充 , 田島孝彦 , 相川純一 , 田中智成 , 菅家幸雄 , 深浦裕治
IPC分类号： F04C23/00
CPC分类号： F04C23/001 , F04C2220/12 , F16K15/042
摘要： Pairs of rotors R1, R2, R3, R4, R5 and R6 driven rotationally by a motor 22 are disposed in the body 21 of a main pump 20 comprising a multistage Roots dry vacuum pump. A suction opening 23 communicating with the rotor chamber of the rotor R1 is provided in the upper wall part at the left end of the body 21, a delivery section 24 communicating with the delivery side of the rotor chamber of the rotor R6 on the final stage is coupled to an exhaust pipe 25 provided with a silencer 26 and further coupled to a check valve 28 through a pipe 27. The check valve 28 has its forward direction toward the atmospheric side. The delivery section 24 or a delivery section 24' at the intermediate stage is coupled to an auxiliary pump 30 having an exhaust capacity smaller than that of the main pump 20. When the motor 22 is driven, gas exhausted through rotation of the rotors R1-R6 is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening 23 is exhausted. The delivery section 24 on the final stage is exhausted by driving the auxiliary pump 30, and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor R6 on the final stage or the rotor R5on the intermediate stage is lightened, and the power consumption of the motor 22 can be reduced significantly as compared with the prior art.
摘要翻译：由马达22旋转驱动的转子R1，R2，R3，R4，R5和R6设置在包括多级罗茨干式真空泵的主泵20的主体21中。在主体21的左端部的上壁部设置有与转子R1的转子室连通的吸入口23，与最终级的转子R6的转子室的输出侧连通的输送部24 连接到设置有消音器26的排气管25，并且还通过管道27联接到止回阀28.止回阀28具有朝向大气侧的向前方向。在中间阶段的输送部分24或输送部分24'联接到排气容量小于主泵20的排放能力的辅助泵30.当马达22被驱动时，通过转子R1- R6从转子室顺序地运送到下游侧，并且与抽吸口23连接的真空处理室被排出。通过驱动辅助泵30，最后一级的输送部分24被排出，并且压力降低。因此，与现有技术相比，在最终级的转子R6或中间级的转子R5上的排气作用的负担被减轻，与现有技术相比，马达22的功率消耗可以显着降低。

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