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    • 10. 发明申请
    • RAPID RESPONSE RELATIVE HUMIDITY SENSOR USING ANODIC ALUMINUM OXIDE FILM
    • 使用阳极氧化铝膜快速响应相对湿度传感器
    • WO2011076124A1
    • 2011-06-30
    • PCT/CN2010/080145
    • 2010-12-22
    • NANO AND ADVANCED MATERIALS INSTITUTE LIMITEDZHANG, ChunMIAO, JianyingWANG, Ning
    • ZHANG, ChunMIAO, JianyingWANG, Ning
    • G01N27/22
    • G01N27/223
    • A rapid response relative humidity sensor based on nano-structured aluminum oxide thin film is disclosed. The main body of the sensor is an anodic aluminum oxide thin film of about 2-20 μm thick formed from an Al substrate which serves as one electrode. A porous metal layer of about 20-200 nm thick is formed over the anodic aluminum oxide thin film and functions as a second electrode. The alumina thin film contains nano-sized channels of about 10-100 nm in diameter, serving as a capacitive relative humidity sensor having high sensitivity and short response time. Thermal annealing at elevated temperature improves the linearity of the capacitance versus humidity curve, giving a full range humidity sensing range. Hysteresis and degradation are negligible for the humidity sensors.
    • 公开了一种基于纳米结构氧化铝薄膜的快速响应相对湿度传感器。 传感器的主体是由作为一个电极的Al衬底形成的大约2-20μm厚的阳极氧化铝薄膜。 在阳极氧化铝薄膜上形成约20-200nm厚的多孔金属层,起第二电极的作用。 氧化铝薄膜包含直径约10-100nm的纳米尺寸的通道,用作具有高灵敏度和较短响应时间的电容式相对湿度传感器。 高温下的热退火可提高电容与湿度曲线的线性度,从而提供全范围湿度检测范围。 湿度传感器的滞后和退化可忽略不计。