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1. 发明申请

WO2012007526A2 DEVICE, SYSTEM AND METHOD FOR USE IN MACHINES FOR ELECTROCHEMICAL PATTERN REPLICATION 审中-公开
标题翻译：用于电化学模式复制的设备，系统和方法
公开(公告)号：WO2012007526A2
公开(公告)日：2012-01-19
申请号：PCT/EP2011061996
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , MOELLER PATRIK , FREDENBERG MIKAEL , UTTERBAECK TOMAS , SVENSSON STEFAN , SANTOS ANTONIO , CHAUVET JEAN-MICHEL , ROSEN DANIEL , WIWEN-NILSSON PETER , LINDGREN LENNART , CAVAZZA GILBERT , RAYNAUD NICOLAS
发明人： MOELLER PATRIK , FREDENBERG MIKAEL , UTTERBAECK TOMAS , SVENSSON STEFAN , SANTOS ANTONIO , CHAUVET JEAN-MICHEL , ROSEN DANIEL , WIWEN-NILSSON PETER , LINDGREN LENNART , CAVAZZA GILBERT , RAYNAUD NICOLAS
IPC分类号： C25D1/00
CPC分类号： C25D1/00 , C25D5/02 , C25D7/123 , C25D17/001 , C25D17/005 , C25D17/008 , C25D17/06 , C25D17/12 , C25D21/12
摘要： A device for electrochemical pattern replication, ECPR, is provided. The device comprises; a base; a bottom chuck on a X-Y-Theta stage, said bottom chuck being configured to hold a master electrode or a substrate; and a Z-stage with an attached top chuck, said top chuck being configured to hold a master electrode when the bottom chuck is configured to hold a substrate or a substrate when the bottom chuck is configured to hold a master electrode; a displacement monitor system for measuring displacement of the master electrode relative the substrate, wherein said displacement monitor system comprises a position sensor and a reference frame, wherein the position sensor measures a distance to the reference frame. A method for electrochemical pattern replication method, ECPR, is also provided. The method comprises the steps of utilizing a master electrode and a substrate, said method comprising the steps of measuring x-, y-, and theta values of the master electrode, when the master electrode and the substrate are separated in a top position; measuring x-, y-, and theta values of the master electrode, when the master electrode and the substrate are adjacent in a bottom position; calculating a delta value, which is the difference in measured x-, y-, and theta values; comparing the delta value to a reference value; and adjusting the position of the master electrode in relation to the substrate to minimize the delta value. A device for providing electricity to a substrate arranged on a chuck during electrochemical pattern replication, ECPR, is also provided. The device comprises a contact module for mounting on the chuck on all sides of the substrate so that electrical contact is possible along the whole perimeter of a substrate.
摘要翻译：提供了一种用于电化学图案复制的装置，ECPR。该装置包括：一个基地所述底卡盘被配置为保持主电极或基板; 以及具有附接的顶部卡盘的Z形平台，当所述底部卡盘构造成保持主电极时，所述顶部卡盘被构造成当所述底部卡盘配置成保持基板或基板时保持主电极; 用于测量所述主电极相对于所述基板的位移的位移监测器系统，其中所述位移监测器系统包括位置传感器和参考框架，其中所述位置传感器测量到所述参考系的距离。还提供了电化学模式复制方法ECPR。该方法包括以下步骤：利用主电极和衬底，所述方法包括以下步骤：当主电极和衬底在顶部位置分离时，测量主电极的x-，y-和θ值; 当主电极和衬底在底部位置相邻时，测量主电极的x-，y-和θ值; 计算增量值，它是测量的x，y和θ值的差值; 将增量值与参考值进行比较; 并且调节主电极相对于衬底的位置以最小化Δ值。还提供了一种用于在电化学图案复制（ECPR）期间向布置在卡盘上的基板提供电力的装置。该装置包括用于在基板的所有侧面上安装在卡盘上的接触模块，使得沿着基板的整个周边的电接触是可能的。

2. 发明申请

WO2012007526A3 DEVICE, SYSTEM AND METHOD FOR USE IN MACHINES FOR ELECTROCHEMICAL PATTERN REPLICATION 审中-公开
公开(公告)号：WO2012007526A3
公开(公告)日：2012-01-19
申请号：PCT/EP2011/061996
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SVENSSON, Stefan , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , WIWEN-NILSSON, Peter , LINDGREN, Lennart , CAVAZZA, Gilbert , RAYNAUD, Nicolas
发明人： MÖLLER, Patrik , FREDENBERG, Mikael , UTTERBÄCK, Tomas , SVENSSON, Stefan , SANTOS, Antonio , CHAUVET, Jean-Michel , ROSÉN, Daniel , WIWEN-NILSSON, Peter , LINDGREN, Lennart , CAVAZZA, Gilbert , RAYNAUD, Nicolas
IPC分类号： C25D1/00 , C25D7/12 , C25D17/06 , C25D21/12
摘要： A device and method for electrochemical pattern replication, ECPR, is provided. The device comprises;a base;a bottom chuck on a X-Y-Theta stage;and a Z-stage with an attached top chuck, said chucks being configured to hold a master electrode or a substrate;a displacement monitor system for measuring displacement of the master electrode relative the substrate, wherein said displacement monitor system comprises a position sensor (22, 28) and a reference frame (21, 29 ), wherein the position sensor measures a distance to the reference frame. The method comprises the steps of measuring x-,y-,and theta values of the master electrode, when the master electrode and the substrate are separated and when the master electrode and the substrate are adjacent calculating a delta value, which is the difference in measured x-,y-,and theta values; comparing the delta value to a reference value;and adjusting the position of the master electrode in relation to the substrate to minimize the delta value. A device for providing electricity to the substrate is also provided. The device comprises a contact module for mounting on the chuck on all sides of the substrate so that electrical contact is possible along the whole perimeter of a substrate.

3. 发明申请

WO2007058604A1 MASTER ELECTRODE AND METHOD OF FORMING THE MASTER ELECTRODE 审中-公开
标题翻译：主电极和形成主电极的方法
公开(公告)号：WO2007058604A1
公开(公告)日：2007-05-24
申请号：PCT/SE2006/001320
申请日：2006-11-20
申请人： REPLISAURUS TECHNOLOGIES AB , FREDENBERG, Mikael , MÖLLER, Patrik , WIWEN-NILSSON, Peter , ARONSSON, Cecilia , DAINESE, Matteo
发明人： FREDENBERG, Mikael , MÖLLER, Patrik , WIWEN-NILSSON, Peter , ARONSSON, Cecilia , DAINESE, Matteo
IPC分类号： C25D17/12 , C25D5/02 , C25F3/14 , B81C1/00
CPC分类号： C25D5/02 , B81C99/0085 , C23C14/34 , C23C14/3414 , C25D1/003 , C25D1/10 , C25D5/022 , C25D5/10 , C25D5/50 , C25D7/12 , C25D7/123 , C25F3/14 , H01L21/2885 , H01L21/32134 , H01L21/76838 , H01L21/76843 , H01L21/76852 , H01L21/76873 , H01L21/76877 , H01L21/76885 , H05K3/07 , H05K3/108 , H05K3/241 , H05K3/4647 , H05K2203/0117 , H05K2203/0733 , Y10T156/10
摘要： An electrode for forming an electrochemical cell with a substrate and a method of forming said electrode. The electrode comprises a carrier (1) provided with an insulating layer (7) which is patterned at a front side. Conducting material in an electrode layer (4) is applied in the cavities of the patterned insulating layer and in contact with the carrier. An connection layer (5) is applied at the backside of the carrier and in contact with the carrier. The periphery of the electrode is covered by the insulating material.
摘要翻译：用于形成具有基底的电化学电池的电极和形成所述电极的方法。电极包括设置有在前侧被图案化的绝缘层（7）的载体（1）。在电极层（4）中的导电材料施加在图案化绝缘层的空腔中并与载体接触。连接层（5）被施加在载体的背面并与载体接触。电极的周边由绝缘材料覆盖。

4. 发明申请

WO2012007520A1 A CHUCK, AND A METHOD FOR BRINGING A FIRST AND A SECOND SUBSTRATE TOGETHER 审中-公开
标题翻译：一种螯合剂，以及一种制备第一和第二种基材的方法
公开(公告)号：WO2012007520A1
公开(公告)日：2012-01-19
申请号：PCT/EP2011/061990
申请日：2011-07-13
申请人： REPLISAURUS GROUP SAS , MÖLLER, Patrik , FREDENBERG, Mikael , LINDGREN, Lennart , SANTOS, Antonio , CHAUVET, Jean-Michel , UTTERBÄCK, Tomas , ROSÉN, Daniel , WIWEN-NILSSON, Peter
发明人： MÖLLER, Patrik , FREDENBERG, Mikael , LINDGREN, Lennart , SANTOS, Antonio , CHAUVET, Jean-Michel , UTTERBÄCK, Tomas , ROSÉN, Daniel , WIWEN-NILSSON, Peter
IPC分类号： C25D1/00 , C25D7/12 , C25D17/06 , H01L21/683 , H01L21/67
CPC分类号： H01L21/67092 , C25D7/123 , C25D17/001 , C25D17/005 , C25D17/06 , C25D17/14 , H01L21/6838 , H01L21/68735
摘要： A chuck (100, 200, 500) for holding a master electrode (107, 207) or a substrate (111, 211) during an ECPR process is provided. The chuck comprises an interaction surface (102, 201) onto which the master electrode (107, 207) or the substrate (111, 211) is arranged, and attaching means (105, 205) for clamping said master electrode (107, 207) or said substrate (111, 211) to said interaction surface (102, 201) such that said master electrode (107, 207) or said substrate (111, 211) is conforming to the shape of said interaction surface (102, 201). Further, a method for bringing a master electrode in contact with a substrate in an ECPR process is provided. The method comprises the steps of arranging a master electrode or a substrate on a chuck, arranging a substrate or a master electrode on a second chuck, aligning said master electrode and said substrate such that a front side of said master electrode is at a distance from and facing a front side of said substrate, and bringing the front side of the master electrode into contact with the front side of the substrate by decreasing said distance such that a centre of the master electrode contacts a centre of the substrate, and continuously decreasing said distance while also continuously decreasing said convex shape.
摘要翻译：提供了一种用于在ECPR处理期间保持主电极（107,207）或基板（111,211）的卡盘（100,200,500）。所述卡盘包括配置有所述主电极（107,207）或所述基板（111,211）的相互作用面（102,201），以及用于夹持所述主电极（107,207）的连接单元（105,205）或所述衬底（111,211）到所述相互作用表面（102,201），使得所述主电极（107,207）或所述衬底（111,211）符合所述相互作用表面（102,201）的形状。此外，提供了在ECPR处理中使主电极与基板接触的方法。该方法包括以下步骤：将主电极或基板布置在卡盘上，将基板或主电极布置在第二卡盘上，使所述主电极和所述基板对准，使得所述主电极的前侧距离并且面向所述基板的前侧，并且通过减小所述距离使主电极的前侧与基板的前侧接触，使得主电极的中心接触基板的中心，并且连续地减小所述距离同时也连续地减小所述凸形。

5. 发明申请

WO2007058603A1 METHOD OF FORMING A MULTILAYER STRUCTURE 审中-公开
标题翻译：形成多层结构的方法
公开(公告)号：WO2007058603A1
公开(公告)日：2007-05-24
申请号：PCT/SE2006/001319
申请日：2006-11-20
申请人： REPLISAURUS TECHNOLOGIES AB , FREDENBERG, Mikael , MÖLLER, Patrik , WIWEN-NILSSON, Peter
发明人： FREDENBERG, Mikael , MÖLLER, Patrik , WIWEN-NILSSON, Peter
IPC分类号： C25D5/02 , C25D21/08 , C25D21/11 , C25F3/14
CPC分类号： C25D5/02 , B81C99/0085 , C23C14/34 , C23C14/3414 , C25D1/003 , C25D1/10 , C25D5/022 , C25D5/10 , C25D5/50 , C25D7/12 , C25D7/123 , C25F3/14 , H01L21/2885 , H01L21/32134 , H01L21/76838 , H01L21/76843 , H01L21/76852 , H01L21/76873 , H01L21/76877 , H01L21/76885 , H05K3/07 , H05K3/108 , H05K3/241 , H05K3/4647 , H05K2203/0117 , H05K2203/0733 , Y10T156/10
摘要： Method of forming a multilayer structure by electroetching or electroplating on a substrate. A seed layer is arranged on the substrate and a master electrode is applied thereto. The master electrode has a pattern layer forming multiple electrochemical cells with the substrate. A voltage is applied for etching the seed layer or applying a plating material to the seed layer. A dielectric material (9) is arranged between the structures (8) thus formed. The dielectric layer is planarized for uncovering the structure below and another structure layer is formed on top of the first. Alternatively, the dielectric layer is applied with a thickness two layers and the structure below is accessed by selective etching of the dielectric layer for selectively uncovering the top surface of the structure below. Multiple structure layer may also be formed in one step.
摘要翻译：通过在基板上电蚀或电镀形成多层结构的方法。种子层布置在衬底上，并且将主电极施加到衬底上。主电极具有与衬底形成多个电化学电池的图案层。施加电压以蚀刻种子层或将电镀材料施加到种子层。在如此形成的结构（8）之间布置介电材料（9）。平坦化电介质层以露出下面的结构，并且在第一层的顶部形成另一结构层。或者，电介质层被施加厚度为两层，并且通过选择性蚀刻电介质层来访问下面的结构，以选择性地露出下面结构的顶表面。也可以在一个步骤中形成多结构层。

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